semi合集-English.pdf - 第1355页
SEMI E30-1103 © SEMI 1992, 2003 29 4.2.4.5 Scenarios — Zone Transition Event occurs in equi pment: COMMENTS HOST EQUIPMENT COMMENTS Send enabled event report to host as shown in Section 4.2.1. Host defines Limit Attribut…
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4.2.4.3.2 Modification of Limit Values — Values for
the monitoring limits on any monitored variable may be
modified by the host using the message transaction
S2,F45/F46 (Define Variable Limit Attributes). The
equipment must reject any S2,F45 message which
contains limit information which conflicts with the
following rules:
— LIMITMAX≥UPPERDB≥LOWERDB≥LIMIT-
MIN;
— If either UPPERDB or LOWERDB is defined,
both must be defined; if either UPPERDB or
LOWERDB is undefined, both must be undefined.
The first rule is defined and graphically depicted in
Figure 4.2.2. The second rule refers to the host’s ability
to turn any limit “on” or “off”. While a minimum of
seven limits must be available for each monitored
variable, it will be common for the host application to
require less than seven or even none of the limits be
used. The limits not needed can be disabled by leaving
the values for UPPERDB and LOWERDB
“undefined”. Limits may be disabled for a VID or for
all monitored VIDs by using zero length lists in the
S2,F45 message.
All monitored variables must be one of three types:
integer, floating point, or Boolean. This may be
accomplished by using the following formats: 11, 20,
3(), 4(), 5().
NOTE 7: The binary format is not allowed. If the ASCII
format is used, the equipment shall perform a conversion into
one of the numeric types before performing any value
comparisons, both for limit validations and zone transitions.
4.2.4.3.3 Limit Values Request — The host may
request the current limit values for a specified VID
using the message transaction S2,F47/F48 (Variable
Limit Attribute Request).
4.2.4.4 Requirements
— A minimum of seven limits per monitored variable
must be available.
— One CEID per monitored variable must be supplied
for zone transition reporting.
— All limit definitions must be kept in non-volatile
storage.
— The equipment must enforce the limit validation
rules defined above.
— The specification and documentation of which
variables may be monitored with this capability is
the responsibility of the equipment manufacturer
based on the specific instance of equipment. This
subject also may be addressed by equipment models
of classes of semiconductor equipment.
Table 4.2 Limit State Transition Table
# Current State Trigger New State Action Comment
1 DISABLED Limit attributed defined w/
S2,F45.
ENABLED None The substate of ENABLED is
determined by the current value of
the monitored variable.
2 ENABLED Limit attributes set to
undefined w/ S2,F45.
DISABLED None None
3 BELOW LIMIT Variable Increased to be
≥UPPERDB
ABOVE LIMIT None Zone Transition.
4 ABOVE LIMIT Variable decreases to be
≤LOWERDB
BELOW LIMIT None Zone Transition.
5 NO ZONE Variable decreases to be
≤LOWERDB
BELOW LIMIT None Zone Transition.
6 NO ZONE Variable increases to be
≥UPPERDB
ABOVE LIMIT None Zone Transition.
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4.2.4.5 Scenarios — Zone Transition Event occurs in equipment:
COMMENTS HOST EQUIPMENT COMMENTS
Send enabled event report to host as shown in Section 4.2.1.
Host defines Limit Attributes:
COMMENTS HOST EQUIPMENT COMMENTS
[IF] S2,F45 is Multi-block
[THEN] Send Multi-block inquire S2,F39-->
<--S2,F40 Multi-block grant.
[END IF]
Host defines new variable limit
attributes. S2,F45-->
<--S2,F46 Equipment acknowledges host
request.
Host queries equipment for current Limits:
COMMENTS HOST EQUIPMENT COMMENTS
Host queries equipment S2,F47-->
for current variable limit
attribute definitions.
<--S2,F48 Equipment returns report
containing requested variable
limit attribute values.
4.2.5 Status Data Collection
4.2.5.1 Purpose — This capability allows the host to query the equipment for selected status information and is
useful in synchronizing with equipment status.
4.2.5.2 Definitions
Status variable value (SV) — A data item containing the value of a status variable. See SEMI E5 for a full definition
of this data item.
Status variable ID (SVID) — A unique identifier of a status variable. See SEMI E5 for a full definition of this data
item.
4.2.5.3 Detailed Description — The host may query equipment status by specifying the desired SVID’s. Upon such
a request, the equipment sends the host the value of the selected status variables. The host also may request the
description (name and units) of any or all available status variables.
4.2.5.4 Requirements
— The equipment manufacturer must provide unique SVID’s for the various status variables (SV) available for data
collection in the equipment.
— All status data is available for status data collection. See Section 5.2, Variable Item List, for a list of status
variables.
— All SV’s must contain valid data whenever provided to the host.
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4.2.5.5 Scenario
Request Equipment Status Report:
COMMENT HOST EQUIPMENT COMMENT
Host requests report of selected
status variable values S1,F3-->
<--S1,F4 Equipment responds with the
requested status variable
data.
Request Equipment Status Variable Name list:
COMMENT HOST EQUIPMENT COMMENT
Host requests equipment to identify
selected status variables. S1,F11-->
<--S1,F12 Equipment responds with the
requested status variable
descriptions.
4.2.6 On-line Identification
4.2.6.1 Purpose — Implementation of SEMI E5 (a GEM Fundamental Requirement) requires the equipment to
accept the S1,F1 from the Host at any time while it is ONLINE and COMMUNICATING, and respond with S1,F2.
The On-line Identification capability describes the host-initiated scenario. The equipment-initiated scenario is used
for a different purpose and is defined in sections 3.3 and 4.12 describing the GEM “Control Model”.
4.2.6.2 Definitions
Equipment Model Type (MDLN) — ASCII string containing the equipment model. See SEMI E5 for a full definition
of this data item.
Equipment Software Revision Code (SOFTREV) — ASCII string containing the equipment software revision. See
SEMI E5 for a full definition of this data item.
4.2.6.3 Detailed Description — On-line Identification allows the host to verify the presence and identity of the
equipment.
4.2.6.4 Requirements — (Host-Initiated) An S1,F2 response from the equipment must provide MDLN and
SOFTREV information which reflects the hardware and software configuration of the equipment.
SOFTREV must uniquely identify different releases of equipment software. Any change in equipment software
must result in a corresponding change to SOFTREV.
The equipment-initiated S1,F1 is not required except as described in sections 3.3 and 4.12 describing the GEM
“Control Model”.
4.2.6.5 Scenario:
Host Initiated
COMMENT HOST EQUIPMENT COMMENT
Are you there? S1,F1-->
<--S1,F2 Equipment replies with MDLN and
SOFTREV.