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SEMI E42-0704 © SEMI 1995, 2004 112 deselect — The operation that prevents a selected recipe from subse quent execution without its first being selected again. distributed rec ipe namespace — A namespace that is capable …

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SEMI E42-0704 © SEMI 1995, 2004 111
16 Glossary of Terms
The list of terms in this section is intended only as a
guide. Formal definitions are provided in the main body
of the document.
agent — A type of resource system in a factory that
includes both hardware and software components, at
least some of which are also resources.
Examples of agents include recipe namespace servers,
cells, stations, clusters, attached cluster modules,
equipment, and smart equipment subsystems. Agents
are associated with a physical system or a collection of
physical systems, including computer platforms.
agent-specific attribute — A recipe attribute that
applies only to a specific agent.
agent-specific parameter — A variable parameter that
has been “tuned” for a specific agent by modifying its
original initial value and/or restrictions and placing the
result in the agent-specific attribute AgentSpecific
LinkParam.
agent-specific recipe — A recipe stored in the default
namespace of a specific agent.
agent-specific dataset — The recipe component
containing the set of agent-specific attributes that have
been set for that recipe for a specific agent.
approve — The operation that sets a recipe's
ApprovalLevel
attribute to a non-zero value.
approved — A recipe is approved whenever its
ApprovalLevel
attribute is non-zero.
approval level — (1) Used to reflect different degrees
of recipe development and qualification; (2) The value
of the attribute ApprovalLevel
.
attribute — Information concerning an object that may
be used either for internal or external purposes.
attribute length — The length of an individual attribute,
calculated as the sum of the lengths of the attribute
name and the attribute value, exclusive of formatting
information.
attribute length attribute — An attribute that contains
the sum of the lengths of the attributes. A managed
recipe, agent-specific dataset, and execution recipe
each have their own attribute length attribute.
attribute timestamp attribute — The timestamp of the
last change to any of a recipe's attributes.
authorized user — A user who is able to identify him or
herself to the host or equipment as having the level of
authority required for a particular activity, such as
certifying a recipe for that equipment.
body — See recipe body.
centralized namespace — A recipe namespace that is
not distributed.
certification-level — The value of the attribute
Certified
.
certified — (1) Factory-level approval that a recipe
produces the expected results on a particular instance of
equipment; (2) A recipe for which the Certified
attribute is defined and given a non-zero value for a
specific agent.
certify — The operation of changing the certification-
level of a recipe for an installation of equipment.
class — See recipe class.
clear — An attribute is cleared (reset) by setting its
value to its default value.
component agent — A subordinate agent that provides
services to a supervisory agent.
copy — Originate a recipe by the internal operation of
duplicating a recipe and assigning a new identifier.
create — The operation of entering a recipe body into a
namespace and assigning it a new (unused) identifier.
de-certify — The operation of clearing the certification
level (Certified
attribute) for a specific agent.
dedicated namespace — A recipe namespace with
exactly one member.
default namespace — A dedicated, centralized
namespace that is used by standalone equipment and/or
for hardware-specific (agent-specific) recipes.
default value — A pre-defined value. All non-
mandatory recipe attributes are assigned a default value
as part of their definition. An attribute set to its default
value may be omitted when a recipe is transferred.
delegate — An agent's supervisor delegates a recipe
that is executed by its component agent. The delegating
agent is responsible for ensuring that the component has
access to a current copy of the recipe and that the recipe
is selected, started, and deselected at the proper time.
delete — A recipe is deleted by removing its identifier,
preventing further access, and freeing its storage.
derived object form — An object form of a recipe that
is based upon a recipe in source form and that
represents a more efficient format for execution
purposes. Typically, but not by definition, this is a
“tokenized” form and requires less storage.
descriptor — (1) The length and timestamp attributes of
a recipe's attributes or of one of its components; (2) The
set of all of the individual descriptors of a recipe.
SEMI E42-0704 © SEMI 1995, 2004 112
deselect — The operation that prevents a selected
recipe from subsequent execution without its first being
selected again.
distributed recipe namespace — A namespace that is
capable of using namespace segments provided by
multiple agents.
download — To send a recipe to the recipe executor.
edit — An operation which creates a new recipe body
or changes the body of an existing recipe.
editor — A service which allows a user to create or
modify the contents of the recipe body. Editors are not
defined by RMS and are generally considered as
external to a namespace.
eol — The ASCII line-feed character (0A
16
) signifying
the end of a line of text.
empty — An attribute with a binary, list, or text format
with no content.
end of line character — See eol.
equipment — An agent with associated hardware that
provides, at a minimum, recipe execution services.
event — A detectable occurrence of interest to a service
user.
exception — An irregular event that indicates some
abnormal or unacceptable condition that requires
attention but does not constitute a safety hazard. Within
RMS, exceptions indicate the abnormal completion of
an operation.
execute — An agent executes a recipe by reading the
recipe contents and implementing its instructions,
process parameters, or other information required for its
own processing.
executing agent — The agent that is capable of
executing a specific recipe.
execution area — The storage location of the recipe(s)
currently selected (ready) for execution.
executable copy — A selected recipe, or “copy” of a
selected recipe, which is in the execution area.
execution recipe — The subtype of recipe that is stored
by the recipe executor.
execution recipe descriptor — Consists of the execution
attribute description, the generic attribute description,
and the body descriptor, in that order.
execution recipe storage — Storage for recipes
provided by the recipe executor for recipes that are not
currently selected.
external reference — (1) The reference which a recipe
makes to another recipe; (2) The list of subrecipes
referenced by a parent recipe.
forced overwrite — The replacement of an existing
execution recipe with a downloaded recipe with the
same identifier.
fundamental requirements — The requirements for
information and behavior that must be satisfied for
compliance to the Recipe Management Standard.
Fundamental requirements apply to specific areas of
application or objects.
generic attribute — A recipe attribute that applies to all
agents capable of executing a specific recipe.
get available storage — The operation that calculates
the amount of remaining recipe storage capacity, in
bytes, exceeding overhead requirements.
header length — The sum of the lengths of the
attributes the header contains at the time the calculation
is performed.
host — A supervisory agent that represents the factory
to its subordinates.
identification attribute — An attribute that is used to
identify a specific object and that is not included in a
recipe section when a recipe is transferred.
identification code — A text string containing a unique
and persistent “signature” for the recipe executor that
last performed verification on a recipe.
identifier — One or more attributes of an object that
uniquely identify it within a specific context.
last value — The setting for a variable parameter
specified by the user when the recipe was last selected
for execution.
link — The operation performed on a main recipe that
collects and resolves external references, and collects
variable parameter definitions, for that recipe and all
referenced recipes.
linked recipe set — The set of recipes identified by the
link operation and specified by the attribute LinkList
.
logical recipe — A recipe with a particular set of
attributes and a particular body considered
independently from its physical location. A logical
recipe may have multiple instances or copies.
main recipe — (1) The recipe, within a set of one or
more recipes to be linked together, which is not a
subrecipe; (2) The starting recipe or “entry point” for a
set of recipes.
managed recipe — A recipe that is stored with a recipe
namespace.
SEMI E42-0704 © SEMI 1995, 2004 113
mandatory attribute — A required attribute that always
exists and has a non-default value.
modify variable parameters — An operation that
modifies the variable parameter definitions applied to a
specific agent.
name — A text-based attribute of an object that may be
used as all or part of an identifier. Certain restrictions
on its characters exist. (See SEMI E39.)
namespace — A domain within which object identifiers
are unique. Also see recipe namespace.
namespace specifier — An object specifier applied to a
recipe namespace.
non-numeric parameter — Any variable parameter that
is not a numeric parameter.
non-shared namespace — A recipe namespace that has
at most one member.
notification service — A service that does not expect a
response.
numeric parameter — Any variable parameters that
can take on any numeric value for their format type,
between a parameter low limit and a parameter high
limit. These limits shall not exceed absolute minimum
and maximum limits set for that parameter by the
agent's supplier.
numeric version — See version number.
object form — (1) Any recipe not in text form; (2) The
body of a recipe which has been compressed from the
source form. (See also the generic attribute
BodyFormat
.)
object specifier — A logical pointer to a remote object.
See SEMI E39 (OSS).
operator — The user who interacts locally with agent
through the agent's human interface.
originate — Any operation which produces a new
recipe identifier, including copying, renaming, creating,
editing a read-only recipe, and downloading a new
version.
originating namespace — The recipe namespace from
which an execution recipe was originally downloaded
and/or to which it is to be uploaded.
parameter — A control value that affects the agent's
process. Also see variable parameter.
parameter definition — A formal declaration of a
variable parameter that specifies the parameter's name,
initial value, and restrictions.
parameter domain — The set of all possible values for
a given form that fulfill the conditions of the parameter
restriction (if any).
parameter restriction — A required part of a parameter
definition specifying one or more conditions that any
value assigned to that parameter is required to satisfy to
be valid.
parent recipe — Any recipe with external references to
subrecipes.
primary class — A recipe class which is not a subclass
of another class.
PROCESS class — The required primary class for all
recipes used for the agent's normal process.
protect — The operation of changing the approval level
of an individual recipe to that of the RecipeRead-
OnlyLevel attribute of the recipe namespace.
read-only recipe — A recipe that is protected. A recipe
with an approval-level greater than, or equal to, the
value of the namespace attribute RecipeRead-
OnlyLevel cannot be changed by updating, deleting,
renaming, unlinking, or re-linking.
recipe — (1) The pre-planned and reusable portion of
the set of instructions, settings, and parameters under
control of the agent that determine the processing
environment seen by the manufactured object and that
may be subject to change between runs or processing
cycles; (2) The aggregation composed of a generic
header, zero or more agent-specific headers, and a
recipe body.
recipe attribute — Structured information concerning a
recipe within the recipe header.
recipe body — The contents of the recipe containing
the data used for execution purposes.
recipe class — A formal grouping of recipes with a
common language syntax and functionality.
managed recipe descriptor — Consists of the generic
attribute descriptor and the body descriptor, followed
by descriptors for any agent-specific datasets.
recipe execution area — Storage used for currently
selected recipes (i.e., for the current process cycle).
recipe executor — The component of an executing
agent responsible for understanding and verifying the
syntax and semantics of a recipe, for validating it, and
for executing it.
recipe identifier — Consists of the recipe's class, name,
and version.