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SEMI F12-0998 © SEMI 199 3, 1998 3 9.3 Su b merge each test specimen a s sho wn in Figure 2, and subject it to the specif ied pressure for the 23°C (73°F) colum n based on t ube si ze as shown in Table 1. (See Appendix 1…

SEMI F12-0998 © SEMI 1993, 1998 2

6 Apparatus

6.1 Constant Temperature Oven

6.1.1 The constant temperature oven must have

sufficient capacity to accommodate the specimens and

control the temperature within ± 3°C (± 5°F).

6.1.2 See Figure 1 for test set-up.

Figure 1

Test Set-Up

6.2 Nitrogen Supply

6.2.1 The supply of nitrogen must have a pressure

regulator to control the pressure to the specimens

accurately.

6.2.2 The nitrogen supply must include an instrument

for monitoring pressure to within 2% of the test range

(650 kPa, 94 psi).

6.3 Submersion Tank — The submersion tank is used

for observing leakage of nitrogen from the fitting

connection. (See Figure 2.) It consists of a container

capable of holding enough isopropyl alcohol to allow

the specimen to be submerged 25 ± 5 mm (1 ± .2 in)

below the fluid surface at a 45° ± 5° angle.

Figure 2

Submersion Tank for Observing

7 Safety Precautions

WARNING: This test method will subject test

specimens to conditions that may exceed the

normal performance ratings of the products

under evaluation. Adequate precautions must

be taken to prevent injury to the person

conducting the test.

8 Test Specimens and Conditioning

8.1 Sample Size — Test at least three specimens at

each test condition.

8.2 Specimen Tubing Length — At least 150 mm (6

in).

8.3 Specimen Surface — All surfaces of the specimens

shall be free of visible flaws, scratches, or other

imperfections, unless typically found on a

representative sample of the product.

8.4 All specimens must be conditioned for a minimum

of one hour in an air environment of 23° ± 2.8°C (73° ±

5°F) prior to being subjected to test.

9 Test Procedure

9.1 A representative specimen must be assembled and

should accompany the test specimens during the heat

cycle but will be used for the sole purpose of

monitoring temperature.

NOTE: The representative specimen must be of the same size

and type as the test specimens being tested. The representative

specimen shall not be pressurized during any portion of the

test.

9.1.1 Insert a temperature probe into the center of the

representative fitting specimen. Ensure that the

temperature probe is sealed from the oven environment

to prevent any of the heated air from entering the

specimen. (See Figure 3.)

Figure 3

Placement of Probe

9.1.2 Place the representative specimen among the test

specimens to monitor temperature during the heat cycle.

9.2 Assemble the test specimens in accordance with

manufacturer’s specifications. The test specimens shall

be as described in Section 8. A seal cap shall also be

attached to allow the specimen to be pressurized.

SEMI F12-0998 © SEMI 1993, 19983

9.3 Submerge each test specimen as shown in Figure

2, and subject it to the specified pressure for the 23°C

(73°F) column based on tube size as shown in Table 1.

(See Appendix 1.) Observe the fitting connection for

leakage for a minimum of one minute. Record the

leakage results in the Proof Test area of the Test Data

Sheet. (See Related Information 1.) This is a proof test

to determine the integrity of the fitting connection

before it is subjected to a heat cycle.

9.3.1 If excessive leakage (more than can be humanly

counted) occurs, stop the test, and record as excessive

leakage on the Test Data Sheet. (See Related

Information 1.)

9.4 Condition the specimens to 75°C (167°F) by

placing the specimens into the oven (see Figure 1)

while subjecting them to the specified pressure for that

temperature and tube size as shown in Table 1. (See

Appendix 1.)

NOTE: More than one specimen may be conditioned

simultaneously. Only fittings with the same test pressure and

temperature should be conditioned simultaneously. Specimens

must be leak tested individually.

9.4.1 The specimens shall remain in the oven 15

minutes after it has stabilized to the specified

temperature.

9.4.2 Release nitrogen pressure from the specimens,

remove from the oven, and allow to cool to room

temperature 23° ± 2.8°C (73° ± 5°F). Do not disturb the

specimens while cooling.

9.4.3 After the temperature of the specimens has

reached room temperature, allow the specimens to

remain undisturbed for 15 additional minutes before

leak testing.

9.5 Submerge each specimen as shown in Figure 2,

and pressurize to the specified pressure for the 23°C

(73°F) temperature. Observe the fitting connection for

leakage for a minimum of one minute.

9.6 Release the pressure in the specimen, and record

the results on the Test Data Sheet. (See Related

Information 1.)

NOTE: The release of pressure from the specimen when

removing from the oven and from the submersion tank is for

safety reasons, and compliance is strongly recommended.

9.6.1 Unit of measure for leakage is the number of

nitrogen bubbles per minute.

9.6.2 Leakage from the seal cap is beyond the scope of

this document and is not required to be measured or

recorded.

9.7 After completion of leakage measurement, repeat

Sections 9.4 through 9.6 ten times (cycles) at the same

pressure and temperature level with the same

specimens.

9.7.1 If excessive leakage (more than can be humanly

counted) occurs, stop the test, and record as excessive

leakage on the Test Data Sheet. (See Related

Information 1.)

9.8 After completion of ten cycles, repeat the test with

new specimens starting at Section 9.2, but substituting

for the temperature in Section 9.4, 100°C (212°F) and

125°C (257°F) as shown in Table 1. (See Appendix 1.)

10 Data Accuracy

10.1 Pressure — ± 2%

10.2 Temperature — ± 1°C (± 2°F)

11 Test Data Sheet

The test data sheet shall include the following

information:

11.1 Date tested.

11.2 Operator and test facility.

11.3 Description of items tested, including:

Tubing — Manufacturer, O.D., wall thickness, part

number, and material.

Fitting — Manufacturer, type, size, part number, and

material.

11.4 All of the data described in Section 9.

NOTE: A sample test data sheet is included as Related

Information 1.

APPENDIX 1

NOTE: This appendix was approved as an official part of SEMI F12 by full letter ballot procedure.

Table 1 Nitrogen Pressure for Each Test Temperature

Tube Size

(Diameter × Thickness in

mm (in) Test Temperature: °C (°F)

23 (73) 75 (167) 100 (212) 125 (257)

Test: Pressure kPa (psi)

Ø3 × 0.5 (0.020 in) 570 (82) 320 (46) 230 (33) 200 (29)

Ø 3.18 (1/8 in) × 5 540 (78) 320 (46) 230 (33) 200 (29)

Ø 4 × 0.5 420 (60) 240 (35) 170 (25) 140 (20)

Ø 6 × 1 570 (82) 320 (46) 230 (33) 200 (29)

Ø 6.35 (1/4 in) × 0.5 270 (39) 150 (22) 110 (16) 90 (13)

Ø 6.35 (1/4 in) × 1.2

(0.050 in)

650 (94) 370 (54) 260 (38) 220 (32)

Ø8 × 1 430 (62) 240 (35) 170 (25) 140 (20)

Ø8 × 1.2 510 (73) 290 (42) 210 (30) 170 (25)

Ø8.53 (3/8 in) × 0.8

(0.031 in)

320 (46) 200 (29) 150 (22) 120 (17)

Ø8.53 (3/8 in) × 1.6

(0.063 in)

650 (94) 320 (46) 230 (33) 200 (29)

Ø10 × 1 340 (49) 190 (28) 140 (20) 120 (17)

Ø10 × 1.6 530 (79) 320 (46) 230 (33) 200 (29)

Ø12 × 1 280 (40) 180 (26) 120 (17) 100 (15)

Ø12 × 1.6 460 (66) 260 (38) 190 (28) 160 (23)

Ø12.7 (1/2 in) × 1.6 520 (75) 250 (36) 180 (26) 150 (22)

Ø19.06 (3/4 in) × 1.6 290 (42) 160 (23) 120 (17) 100 (15)

Ø25 × 1.5 210 (30) 120 (17) 80 (12) 70 (10)

Ø25 × 2 270 (39) 160 (23) 120 (17) 100 (15)

Ø25.4 (1 in) × 1.6 210 (30) 120 (17) 80 (12) 70 (10)

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

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