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SEMI E109.1-0704 © SEMI 2002, 2004 6 Parameter Name Format SECS-II Data Item SECS-II Format ObjectActionParameter Result List on one or more argum ents (parameters) providing additional information con cerning the result…

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SEMI E109.1-0704 © SEMI 2002, 2004 5
Parameter Name Parameter Range SECS-II Data Item
RPMAcknowledge Enumerated:
0 = Acknowledge, service has been performed
1 = Service does not exist
2 = Cannot perform now
3 = At least parameter is invalid
4 = Acknowledge, service will be performed with completion
notified later with parameters for response
5 = Service is not completed or prohibited
6 = no such objects exist
7–63 Reserved
SVCACK
RPMStatus List of RPMAcknowledge and Status L,2
1.<SVCACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
:
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
ServiceStatus “ServiceStatus” PARAMNAME
ServiceStatusValue Enumerated:
OUT OF SERVICE = 0
IN SERVICE = 1
PARAMVAL = U1
SourceLocation 1–80 characters RPMSOURLOC
Status List of n errors L,n
1.L,2
1.<ERRCODE
1
>
2.<ERRTEXT
1
>
:
n.L,2
1.<ERRCODE
n
>
2.<ERRTEXT
n
>
5.4 Object Service Parameter Mapping
5.4.1 Table 3 maps the SEMI E109 service parameters that use S14F19 to SECS-II data items.
Table 3 Object Service Parameters for SECS-II
Parameter Name Format SECS-II Data Item SECS-II
Format
ObjectAction “CancelMoveReticle”
“MoveReticle”
“OktoUseReticle”
“RejectReticle”
“Re-qualifyReticle”
SVCNAME 20
ObjectAction-
ParameterRequest
List of one or more arguments (parameters) providing
additional information concerning the action requested.
Structure composed of ServiceParameterName and
ServiceParameterValue
L,n
1. L,2
1. <SPNAME
1
>
2. <SPVAL
1
>
:
m. L,2
1. <SPNAME
m
>
2. <SPVAL
m
>
SEMI E109.1-0704 © SEMI 2002, 2004 6
Parameter Name Format SECS-II Data Item SECS-II
Format
ObjectActionParameter
Result
List on one or more arguments (parameters) providing
additional information concerning the result of the action
requested.
L,n
1. L,2
1. <SPNAME
1
>
2. <SPVAL
1
>
:
m. L,2
1. <SPNAME
m
>
2. <SPIVAL
m
>
RPMAcknowledge Enumerated SVCACK 10
ServiceParameterName " ReticleID"
" PortID"
" DestinationLocation"
" SourceLocation"
" QualificationIntervalTime"
“Status”
SPNAME 20
ServiceParameterValue Depends on parameter used SPVAL 10, 20, 51, 52
Status List of one or more arguments (parameters) providing
information concerning the result of the action requested.
Structure composed of ErrorText and ErrorCode.
L,m
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
:
m. L,2
1. <ERRCODE
m
>
2. <ERRTEXT
m
>
ErrorCode Enumerated ERRCODE 51
ErrorText Text ERRTEXT 20
5.5 SECS-II Data Items without Corresponding E109 Parameters
5.5.1 Table 4 contains the SECS-II data items that do not correspond to SEMI E109 service parameters.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
Used by S3,F17 to differentiate between “Bind”,
“CancelPod”, “CancelPodNotification”, “CancelPodOut”,
“CancelPodAtPort”, “CancelBind”, “Clamp”,
“ClosePod”, “IndexDown”, “IndexUp”, “OpenPod”,
“PodComplete”, “PodIn”, “PodNotification”, “PodOut”,
“PodRelease”, “PodTagReadData”, “PodTagWriteData”,
“ProceedWithPod”, and “Unclamp” services.
Note: the text between the quotes is the actual value used
in the parameter CARRIERACTION.
CARRIERACTION
Used to satisfy SECS-II conventions for linking a multi-
block inquiry with a subsequent multi-block message.
Neither required nor specified by RPMS.
DATAID
Used to inform receiver of total message length size for
SECS-II multi-block conventions. Neither required nor
specified by SEMI E109.
DATALENGTH
Used to satisfy SECS-II multi-block requirements.
Neither required nor specified by SEMI E109.
GRANT
SEMI E109.1-0704 © SEMI 2002, 2004 7
Function SECS-II Data Item
Used by S3F25 to differentiate between port related
“ChangeServiceStatus,” “CancelReservationatPort,” and
“ReserveAtPort” services. Note: the text between the
quotes is the actual value used in the parameter
PORTACTION.
PORTACTION
Used by S3F27 to specify desired Access mode. ACCESSMODE
Used by S3F35 to differentiate between
“ReticleTransferJob” and “CancelReticleTransferJob”
JOBACTION
6 Variable Data Item Mapping
6.1 This sections shows the specific SECS-II data classes, and formats needed for the SECS-II implementation of
SEMI E109 data items.
Table 5 Variable Data Item Mapping Table
Variable Name Class Format
Access Mode DVVAL 51 (U1)
Access Mode
i
SV 51 (U1)
AlarmInfo DVVAL L,2
1. Alarm number (U4)
2. Alarm Description (A)
AvailPartitionCapacity DVVAL 51 (U1)
AvailPartitionCapacity
i
SV 51 (U1)
BufferCapacityList SV L,n
1.<BufferPartitionInfo
i
>
.
.
n.<BufferPartitionInfo
i
>
BufferPartitionInfo DVVAL L,4
1.<PartitionID>
2.<PartitionType>
3.<AvailPartionCapacity>
4.<PartitionCapacity>
BufferPartitionInfo
i
SV L,4
1.<PartitionID
i
>
2.<PartitionType
i
>
3.<AvailPartionCapacity
i
>
4.<PartitionCapacity
i
>
BypassReadID DVVAL 11 (BOOLEAN)
PodID DVVAL 20 (A[1–64])
PodID
i
SV 20 (A[1–64])
PodLocationMatrix SV L,n
1.L,2
1.<LocationID
1
>
2.<PodID
1
>
.
.
n.L,2
1.<LocationID
n
>
2.<PodID
n
>