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SEMI E91-0600 © SEMI 1999 , 2000 5 5.2.4 PSEM Process ing State Tr ans i tio n Table Table 1 Proce ssing State Transition Ta ble No. Current St ate Trigger New State Action Comment 1 Unde fine d After turning the pow er …

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5.2.3 Description of Prober Processing States
5.2.3.1 ABORTING (PROCESSING ACTIVE Sub-
state) — The prober has received ABORT command.
All activities are suspended. The prober is taking an
appropriate action to ensure possible safe state for the
prober itself and materials. Wafer data or lot data may
be unavailable.
5.2.3.2 ALARM PAUSED (PAUSE Sub-state) — An
alarm has occurred in PROCESS or PROCESS PAUSE
state. The prober is waiting for the alarm to be cleared.
5.2.3.3 CHECKING (PROCESS PAUSE Sub-state) —
The prober verifies that a process program update
performed is valid. This is a procedure same with that
taken in SETTING UP state before the prober is ready
to transit to READY state. Upon completion of
verification, an event will be created if the verification
is successfully ended. A transition is made to the
process state, based on the process model condition
table.
5.2.3.4 EXECUTING (PROCESS Sub-state) — The
prober is processing material automatically and can
continue to do so without external intervention. This
state may include interaction with the host or operator.
5.2.3.5 IDLE — The prober is waiting for an
instruction. IDLE is free of ALARMS and error
conditions.
5.2.3.6 IDLE with ALARMS — An alarm has occurred
in the IDLE state and the prober is waiting for all
alarms to be cleared.
5.2.3.7 INIT — Prober is in the course of initialization.
5.2.3.8 MAINTENANCE
5.2.3.8.1 The operator’s instruction has disabled
production by the prober.
5.2.3.8.2 Maintenance and inspection of the prober are
executed in this state.
5.2.3.9 PAUSE (PROCESSING ACTIVE Sub-state) —
PROCESS state is interrupted when the processing can
be paused. An action to ensure safety of the prober is
taken. The prober waits for a command (RESUME,
STOP or ABORT) or the alarm to be cleared.
5.2.3.10 PAUSED (PROCESS PAUSE Sub-state) —
In this state an operator can correct an error as far as the
current process program selection is not affected.
PROCESS state is suspended and the prober waits for a
command (RESUME, STOP or ABORT). In this state,
the operator is allowed to correct an error conditions
that does not affect the current process program
selected. One of such corrective actions that can be
taken by the operator is manual alignment of the wafer
in process.
5.2.3.11 PAUSED SETTING UP (PROCESS PAUSE
Sub-state) — When PROCESS state is suspended, the
prober is made to perform simple set-up operations.
Probe card replacing work and inker replacing work are
included in those operations.
5.2.3.12 PAUSING (PROCESS PAUSE Sub-state) —
PROCESS state is interrupted when the processing can
be paused. The prober cannot transit to PAUSED state
until safe state is ensured.
5.2.3.13 PROCESS (PROCESSING ACTIVE Sub-
state) — This state is the parent of those sub-states that
refer to the preparation and execution of a process
program.
5.2.3.14 PROCESS PAUSE (PAUSE Sub-state) —
The prober is free of alarm conditions in the PAUSE
state.
5.2.3.15 PROCESSING ACTIVE — The state in which
the prober is processing materials.
5.2.3.16 SETTING UP (PROCESS Sub-state) — The
prober is trying to satisfy requirements to be able to
start processing. This is the state under which the
prober has already received a process program and
materials to be processed, then has received START
command from the host or the operator and is making
preparation for the processing according to the process
program.
5.2.3.17 STOPPING (PROCESSING ACTIVE Sub-
state) — The prober has received STOP command and
sets up for the stop. All necessary cleanup is completed
within this state with regard to material, data, control
system, etc. Data is preserved. Any error condition is
cleared before exiting from this state.
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5.2.4 PSEM Processing State Transition Table
Table 1 Processing State Transition Table
No. Current State Trigger New State Action Comment
1 Undefined After turning the power
on, the operator has
commanded the prober to
perform initialization.
INIT The prober executes
initialization.
None
2 INIT Initialization of all
probers completes without
an alarm or error.
IDLE The prober is waiting for
a command by the host or
the operator.
None
3 IDLE Prober Job has been
created, and the prober
has already received a
process program and
materials, then has
received START
command from the host or
the operator.
SETTING UP The prober is set up
according to the process
program.
None
4 SETTING UP All set-up performance
has completed.
EXECUTING The prober executes
wafer transfer and
measuring.
None
5 EXECUTING Material processing
completes.
IDLE None None
6 PROCESS The prober received
STOP command.
STOPPING The prober completes the
current wafer or the
current die under
EXECUTING state and
unloads it in accordance
with the setting of ECV
“StopUnit”.
The prober starts clearing
data. Whether or not
unloading is executed after
the completion of the
current wafer or the
current die depends on the
specification.
7 PROCESS The prober received
ABORT command from
operator, host or self
generated.
ABORTING The prober is placed in a
safe state.
Wafer data or lot data may
be invalid or not available.
8 PROCESS An alarm occurs. ALARM
PAUSED
PROCESS activity is
suspended, the prober is
waiting for all alarms to
be cleared, STOP or
ABORT command.
ALARM PAUSED is
PAUSE sub-state.
9 PROCESS The prober received
PAUSE command from
the host or the operator.
PAUSING PROCESS state is
suspended when the
processing can be
stopped.
All operations required to
put the prober in safe
condition are performed.
PAUSING is PROCESS
PAUSE sub-state.
10 CHECKING Parameter checking ends
normally.
Previous
PROCESS
state.
Processing re-starts from
the previously suspended
state.
None
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No. Current State Trigger New State Action Comment
11 EXECUTING Processing of the last
wafer of a current lot
completed.
The prober has received
START command for
next lot.
SETTING UP None None
12 STOPPING The prober completes
clearing of data and no
alarm remains.
IDLE None None
13 PAUSING The prober stopped the
processing of the current
wafer which was in
EXECUTING state at a
possible stop breakpoint
and attained a safe state.
PAUSED The prober is waiting for
command (RESUME,
STOP or ABORT).
None
14 ALARM
PAUSED
Alarm is cleared. PAUSED The prober is waiting for
command (RESUME,
STOP or ABORT).
None
15 PROCESS
PAUSE
An alarm occurs in the
prober.
ALARM
PAUSED
The prober is waiting for
all alarms to be cleared,
STOP or ABORT
command.
None
16 PAUSED RESUME command was
received.
CHECKING Verification of process
program parameters.
Before continuing
processing, the host or
operator is required to
issue RESUME command.
17 PAUSED The operator instructed a
state transition.
PAUSED
SETTING UP
Probe card replacement
or inker replacement is
carried out by operator’s
instruction.
None
18 PAUSED
SETTING UP
The operator instructed a
state transition.
PAUSED None None
19 PAUSE The prober received
STOP command.
STOPPING The prober starts clearing
data.
Data is saved and valid.
20 PAUSE The prober received
ABORT command.
ABORTING If possible, unsafe
condition is reset.
Wafer data or lot data may
be invalid or not available.
21 STOPPING The prober received
ABORT command.
ABORTING If possible, unsafe
condition is reset.
Wafer data or lot data may
be invalid or not available.
22 ABORTING An abort performance has
completed.
IDLE None Only a state transition to
IDLE is permitted.
23 IDLE An alarm occurs. IDLE with
ALARMS
The prober is waiting for
all alarms to be cleared.
None
24 IDLE with
ALARMS
All alarms were cleared. IDLE None The IDLE state is free of
alarms.
25 IDLE The operator instructed a
state transition.
MAINTEN-
ANCE
None Maintenance and
inspection of the prober
modules and creation,
change and deletion of
process programs are
possible.
26 MAINTEN-
ANCE
The operator instructed a
state transition.
IDLE None None