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Table 2 Sample A ttitu de Test Data MFC Mfg/Model/Serial # Acme/ XYZ- 100/0001 Name Plat e Gas/Range Nitrogen 100 sccm Test Gas Nitrogen Temp 20.2  C Date 3/9/98 Factory Calibration Gas Nitrogen Attitude Pressure (kPa) …

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15 Calculations or Interpretation of Results
15.1 Attitude sensitivity between two mounting positions is calculated as follows:
ZAS
nm =
Z
m
Z
n
Where,
ZAS
nm
= Zero attitude Sensitivity between attitude n and attitude m
Z
n
= zero indication at attitude n
Z
m
= zero indication at attitude m
SAS
nm
= S
n
S
m
Where,
SAS
nm
= Span attitude Sensitivity between attitude n and attitude m
S
n
= Actual flow in attitude n
S
m
= Actual flow in attitude mZAS
max
= The maximum zero attitude sensitivity for all attitudes.
SAS
max
= The maximum span attitude sensitivity for all attitudes
15.2 Interpretation
15.2.1 Table 2 shows examples of raw and reduced data. For the MFC tested, the maximum zero shift was 0.3%
F.S. and the maximum span shift was 0.4% F.S.
Table 1 Attitude Test Data
MFC Mfg/Model/Serial # ____________________________________________
Name Plate Gas/Range ______________________________________________
Test Gas _________________________________________________________
Temp ____________________________________ Date __________________
Factory Calibration Gas _____________________________________________
Attitude Pressure
(kPa)
Indicated Flow
by DUT with
Zero Actual Flow
(% F.S.)
Zero Attitude
Sensitivity Compared
to Attitude 1
(% F.S.)
Actual Flow by Flow
Standard at 100%
DUT Setpoint
(% F.S.)
Span Attitude
Sensitivity Compared
to Attitude 1
(% F.S.)
1 135.8
0 0
2 135.8
3 135.8
4 135.8
5 135.8
ZAS
max
= SAS
max
=
1 308
0 0
2 308
3 308
4 308
5 308
ZAS
max
= SAS
max
=
SEMI E80-0299 © SEMI 1999, 2004 4
Table 2 Sample Attitude Test Data
MFC Mfg/Model/Serial # Acme/ XYZ-100/0001
Name Plate Gas/Range Nitrogen 100 sccm
Test Gas Nitrogen
Temp 20.2 C
Date 3/9/98
Factory Calibration Gas Nitrogen
Attitude Pressure
(kPa)
Indicated Flow
by DUT with
Zero Actual Flow
(% F.S.)
Zero Attitude
Sensitivity Compared
to Attitude 1
(% F.S.)
Actual Flow by Flow
Standard at 100%
DUT Setpoint
(% F.S.)
Span Attitude
Sensitivity Compared
to Attitude 1
(% F.S.)
1 135.8
0
0
100
0
2 135.8
0.1
-0.1
100.2
0.2
3 135.8
0
0
100
0
4 135.8
-0.1
0.1
99.8
-0.2
5 135.8
0
0
100
0
ZAS
max
=
0.2
SAS
max
=
0.4
1 308
0
0
100
0
2 308
0.15
-0.15
100.2
0.2
3 308
0
0
100
0
4 308
-0.15
0.15
99.8
-0.2
5 308
0
0
100
0
ZAS
max
=
0.3
SAS
max
=
0.4
NOTE 1: The values in bold italics are calculated values.
SEMI E80-0299 © SEMI 1999, 2004 5
16 Illustrations
Flow
Flow
Flow
Flow
12
3
45
HBD VIU
VFD
HED VID
VFU
HUD
HBD = Horizontal Base Down
VIU = Vertical Inlet Up
VFD = Veritical Flow Down
HED = Horizontal Either side Down
VID = Vertical Inlet Down
VFU = Vertical Flow Up
HUD = Horizontal Upside Down
*
For this test method the DUT
must be mounted ±1
O
in all
axes
*****
Figure 1
MFC Mounting Attitudes
SEMI E80-0299 © SEMI 1999, 2004 6