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SEMI F17-95 © SEMI 1995, 2004 2 6.2 The internal surface of th e finished tubing, component tube stub, or f itting made from tubing shall be free from all macroscopic pitting, stainin g or discoloration, and surface flaw…

SEMI F17-95 © SEMI 1995, 2004 1

SEMI F17-95 (Withdrawn 0704)

SPECIFICATION FOR HIGH PURITY QUALITY ELECTROPOLISHED

316L STAINLESS STEEL TUBING, COMPONENT TUBE STUBS, AND

FITTINGS MADE FROM TUBING

This specification was technically reapproved by the Global Gases Committee and is the direct responsibility

of the North American Gases Committee. Current edition approved by the North American Regional

Standards Committee on October 25, 2002. Initially available at www.semi.org December 2002; to be

published March 2003. Originally published in 1995.

NOTICE: This document was balloted and approved

for withdrawal in 2004.

1 Purpose

1.1 The purpose of this specification is to define the

ordering, surface condition, and quality assurance

requirements for high purity quality electropolished

316L stainless steel tubing, component tube stubs, and

fittings made from tubing.

2 Scope

2.1 This specification defines the special criteria for

nominal sizes of electropolished 316L stainless steel

tubing, component tube stubs, and fittings made from

tubing for use in high purity chemical (gas or liquid)

distribution systems in semiconductor manufacturing

facilities.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standard

SEMI F16 — Specification for 316L Stainless Steel

Tubing Which Is to Be Finished and Electropolished for

High Purity Semiconductor Manufacturing

Applications

3.2 ANSI/ASME Standards

B31.1 — Power Piping

B31.3 — Chemical Plant and Petroleum Refinery

Piping

B46.1 — Surface Texture: Surface Roughness,

Waviness, and Lay

1 American Society of Mechanical Engineers, United Engineering

Center, 345 East 47th Street, New York, NY 10017

3.3 ASTM Standards

A 269 — Specification for Seamless and Welded

Austenitic Stainless Steel Tubing for General Service

A 632 — Specification for Seamless and Welded

Austenitic Stainless Steel Tubing (Small Diameter) for

General Service

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 General Requirements

4.1 The finished tubing, component tube stubs, and

fittings made from tubing furnished under this

specification shall use the tubing governed by SEMI

F16 and shall meet the additional finish requirements

herein.

5 Ordering Information

5.1 Orders for finished tubing, component tube stubs,

or fittings made from tubing under this specification

shall include the following, as a minimum, to describe

the item:

• Quantity (meters, feet, number of items, or number

of lengths),

• Type of tubing (seamless or welded),

• Size (nominal outside diameter and wall thickness),

• Length (specific or random), and

• Other specific dimensions (such as for fittings).

6 Surface Condition

6.1 The internal surface of all finished tubing,

component tube stubs, and fittings made from tubing

shall be electropolished.

2 American Society for Testing and Materials International, 100 Barr

Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA.

Telephone: 610.832.9585, Fax: 610.832.9555 Website:

http://www.astm.org

SEMI F17-95 © SEMI 1995, 2004 2

6.2 The internal surface of the finished tubing,

component tube stub, or fitting made from tubing shall

be free from all macroscopic pitting, staining or

discoloration, and surface flaws. The O.D. of the tube

shall be homogeneous in texture and brightness and free

of obvious flaws.

6.3 Finished tubing, component tube stubs, and fittings

made from tubing shall be measured for internal surface

finish. Testing shall verify conformance to a surface

roughness standard of one of the following:

Table 1 Roughness Average (R

)

Multiple Measurements

Maximum Single

Measurement

micrometers microinches micrometers microinches

0.25 10 0.30 12

0.18 7 0.25 10

0.13 5 0.18 7

7 Surface Condition Measurements

7.1 Surface Roughness — When specified as per

Section 6.3, surface roughness shall be measured in

accordance with ANSI B46.1, using a stylus-type

instrument and a cutoff of 760 micrometers (0.030

inches), or equivalent process (which shall be submitted

for approval to the customer prior to order acceptance).

The results reported shall be Roughness Average (R

expressed in micrometers or microinches.

7.1.1 Measurements shall be made at 0, 90, 180, and

270 degrees around the tube’s inner circumference.

7.2 Scanning Electron Microscopy (SEM) photographs

of the electropolished internal surfaces of tubing,

component tube stubs, and fittings made from tubing

shall be provided by the manufacturer in accordance

with the sampling frequency criteria specified by the

customer. SEM analysis shall verify that no more than

40 defects shall be distinguishable in a 3400 to 3600×

field view in a 64 × 89 mm (2 1/2" × 3 1/2" ) picture.

7.3 Chemical analysis, using electron spectroscopy for

chemical analysis (ESCA), shall be performed on the

electropolished internal surfaces of tubing, component

tube stubs, and fittings made from tubing and shall be

provided by the manufacturer in accordance with the

sampling frequency criteria specified by the customer.

Elemental composition shall be expressed in atomic

percent units and shall verify a minimum chromium

oxide to iron oxide ratio of 2.2:1.

7.4 Auger Electron Spectroscopy (AES) analysis shall

be performed on the electropolished internal surfaces of

tubing, component tube stubs, and fittings made from

tubing and shall be provided by the manufacturer in

accordance with the sampling frequency criteria

specified by the customer.

8 Cleanliness

8.1 After electropolishing, finished tubing shall be final

cleaned with a process that uses deionized (DI) water

with a minimum resistivity of 17.5 megohm-cm at 25° C

as the final cleaning agent, and nitrogen or a suitable

filtered inert gas, as a drying agent. Both the water and

the gas shall be heated to a minimum of 60° C.

8.2 Tubing, component tube stubs, and fittings made

from tubing shall be sealed with polyethylene caps

pressed over 0.05 mm (1.75 mil) or thicker polyamide

squares after having been purged with nitrogen or a

suitable inert gas. Capped tubing, stubs, or fittings shall

be heat-sealed in a single 0.15 mm (6 mil) or thicker

polyethylene bag.

9 Permissible Variations in Dimensions

9.1 The permissible variations in dimensions shall be

as outlined in Table 3 of ASTM A 269 for nominal

sizes 1/2" diameter and larger and in Table 3 of ASTM

A 632 for nominal sizes smaller than 1/2" diameter.

9.2 Finished wall thicknesses for tubing, component

tube stubs, and fittings made from tubing are shown in

Table 2. The finished thicknesses must also comply

with the requirements of ANSI/ASME B31.1 and B31.3

for the intended service temperature and pressure. The

appropriate tolerances per Section 9.1 shall apply to

these finished wall thicknesses.

Table 2 Finished Wall Thickness for Various Tube

Sizes

Nominal O.D. Finished Tube Wall Thickness

1/4" , 3/8" 0.89 mm (0.035" )

1/2" 1.25 mm (0.049" )

3/4" , 1" , 1 ½" , 2" , 3" 1.65 mm (0.065" )

4" , 6" 2.11 mm (0.083" )

10 Certification

10.1 The supplier shall provide the following reports

and certification with all shipments of electropolished

tubing, component tube stubs, or fittings made from

tubing:

10.1.1 Type of tubing (seamless or welded),

10.1.2 Size (nominal outside diameter and wall

thickness),

10.1.3 Material composition report,

10.1.4 Heat code identification. Tubing, component

tube stubs, and fittings made from tubing shall be mill-

and heat-traceable and permanently etched for

correspondence to the applicable mill test reports,

10.1.5 Surface roughness certification,

10.1.6 Microscopic surface condition certification

(SEM),

10.1.7 Surface chemistry certification (ESCA), and

10.1.8 Surface depth profile certification (Auger).

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

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the contents in whole or in part is forbidden without express written

consent of SEMI.