semi合集-English.pdf - 第5551页

SEMI P10-0705 © SEMI 1990, 2005 46 </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="FilmScale" type="xs:double"/> </xs:sequence> <xs:sequence minOccurs…

SEMI P10-0705 © SEMI 1990, 2005 45

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndSubstrate"/>

</xs:complexType>

<xs:complexType name="EuvBlankTypeType">

<xs:sequence>

<xs:element name="EuvFlatnessFront" type="xs:string"/>

<xs:element name="EuvFlatnessBack" type="xs:string"/>

<xs:element name="EuvMultilayerComposition"

type="xs:string"/>

<xs:element name="EuvCappingComposition" type="xs:string"/>

<xs:element name="EuvMmrWavelength" type="xs:double"/>

<xs:element name="EuvMeanPeakReflectivity"

type="xs:double"/>

<xs:element name="EuvPeakReflectivityUniformity"

type="xs:string"/>

<xs:element name="EuvAbsorberComposition"

type="xs:string"/>

<xs:element name="EuvAbsorberOpticalProperties"

type="xs:double"/>

<xs:element name="EuvBlankResistance" type="xs:double"/>

<xs:element name="EuvExpansionCoeff" type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartEuvBlankType"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndEuvBlankType"/>

</xs:complexType>

<xs:complexType name="ShipPlotType">

<xs:sequence>

<xs:element name="PlotType" type="xs:string"/>

<xs:element name="PlotScale" type="xs:double"/>

<xs:element name="Quantity" type="xs:integer"/>

<xs:sequence minOccurs="0">

<xs:element name="Price" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PlotFormat" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternPlotNormalTone"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ShipTo" type="ShipToType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartShipPlot"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndShipPlot"/>

</xs:complexType>

<xs:complexType name="FilmsType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Quantity" type="xs:integer"/>

SEMI P10-0705 © SEMI 1990, 2005 46

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="FilmScale" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="FilmSize" type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="FilmColor" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="FilmNormalTone" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Price" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ShipTo" type="ShipToType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartFilms"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndFilms"/>

</xs:complexType>

<xs:complexType name="PhaseShiftType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseShiftQualityId"

type="xs:string"/>

</xs:sequence>

<xs:element name="PsmWavelength" type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionTarget"

type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionTolerance"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionRange"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionError"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="TransmissionEquipReqd"

type="xs:string"/>

<xs:sequence minOccurs="0">

SEMI P10-0705 © SEMI 1990, 2005 47

<xs:element name="TransmissionModeReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="TransmissionMarkSiteId"

type="xs:string"/>

</xs:sequence>

<xs:element name="TransmissionMarkLocation"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionMarkFeature"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element

name="TransmissionMarkLocationDrawing" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionMarkDrawing"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleTarget"

type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleTolerance"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleRange"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleError"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="PhaseAngleEquipReqd"

type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleModeReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="PhaseAngleSiteId"

type="xs:string"/>

</xs:sequence>