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SEMI F53-0600 © SEMI 2000 3 10.2 The user m ust have a working k no wledge of the respective instrumentation, must practice prop er handl ing of te st components , and must understan d good laboratory practices. The user…
SEMI F53-0600 © SEMI 2000 2
5.1.18 V — volt
5.1.19 V/m — volts/meter
5.2 Definitions
5.2.1 conducted susceptibility — equipment vulnera-
bility to conducted emissions.
5.2.2 electromagnetic — all energy of electrical or
magnetic nature; i.e., electric current flow or magnetic
field.
5.2.3 electromagnetic compatibility — the capability
of electronic equipment or systems to be operated in the
intended operational electromagnetic environment at
designed levels of efficiency.
5.2.4 electromagnetic interference — impairment of a
wanted electromagnetic signal by an electromagnetic
disturbance.
5.2.5 ground — a conducting conne ction, whether
intentional or accidental, by which an electric circuit or
piece of equipment is connected to the earth, or to some
conducting body of relatively large extent.
5.2.6 limit — the level of susceptibility that a stated
standard allows.
5.2.7 noise (electrical) — unwanted electrical signals
that produce undesirable effects in the circuits of
control systems in which they occur.
5.2.8 radiated susceptibility — equipment vulnerable
to radiated emissions.
5.2.9 stable — the state a signal level obtains when its
magnitude varies by less than or equal to ± 2.0% of full
scale over a one minute period.
6 Summary of Method
6.1 This test method describes the test equipment and
procedures for determining if the thermal mass flow
controller is susceptible to both radiated and conducted
interference. Initially, the controller is exposed to
radiated electric fields over a frequency range from 14
kHz to 1 GHz at field strength levels less than 10
volts/meter (V/m). Furthermore, the controller’s power
leads will be tested for susceptibility to voltage
transients with 10 µs rise times. See flow chart of the
test method, Figure 1.
7 Interferences
7.1 MFCs are located in areas where electromagnetic
(EM) fields are present. If an MFC is susceptible to the
fields, then the delivered flow by the MFC could be
adversely effected. The magnitude of the EM field’s
effect on the MFC performance shall be quantified by
this test method.
8 Apparatus
8.1 Radiated Electric Field Susceptibility (RS-03)
8.2 Signal Generator, 14 kHz to 1 GHz
8.3 Audio Power Amplifier, 14 kHz to 1 MHz
8.4 RF Power Amplifier #1, 1 MHz to 400 MHz
8.5 RF Power Amplifier #2, 500 MHz to 1 GHz
8.6 Field Strength Meter
8.7 Oscilloscope
8.8 Parallel Element Antenna, 14 kHz to 20 MHz
8.9 Biconical Antenna, 30 MHz to 200 MHz
8.10 Conical Log Spiral Antenna, 300 MHz to one
GHz
8.11 Tripod
8.12 Coaxial Cable, 50-ft, RG-58, with BNC male
plugs at each end.
8.13 X10 Attenuator Scope Probe
8.14 Assorted Coax Cables for Interconnects
8.15 Flow Standard — Installed downstream and in
series with the flow through the MFC. The flow
standard shall be capable of measuring flow to within ±
0.3% of full scale.
8.16 Flow Output Monitor — Connected to the MFC
output and signal common/ground points. The
monitor/recorder shall be capable of measuring over a
range of 0–10 VDC to within ± 5 mV.
8.17 Transient Susceptibility of Power and Control
Leads (CS-06) (Conducted Susceptibility)
8.18 Spike Generator, with series and parallel outputs
8.19 Oscilloscope, dual channel
8.20 X10 Attenuator Probe
8.21 X100 Scope Attenuator Probe, two each
8.22 Test Leads, 12-in long with banana plugs at each
end, four each
9 Reagents and Materials
9.1 Test Gas — Nitrogen with a dew point of less than
or equal to -40°C and at a source delivery pressure of
35 psig.
10 Safety Precautions
10.1 Safety Precautions — This test method may
involve hazardous materials, operations, and equip-
ment.
SEMI F53-0600 © SEMI 20003
10.2 The user must have a working knowledge of the
respective instrumentation, must practice proper
handling of test components, and must understand good
laboratory practices. The user should not operate the
components in such a manner as to exceed the ratings
(i.e., pressure, temperature, flow, and voltage).
10.3 Technical Precautions — These tests are to be
performed in a shielded or screened room to prevent
possible problems with nearby instrumentation or
electrical systems caused by the EM fields. At a
minimum, the instrumentation associated with this test
series (see Figure 2) must be shielded from the EM
fields to ensure their proper operation.
11 Preparation of Apparatus
11.1 The test gas source and delivery system must be
capable of satisfying the test volume flow rate at a
constant pressure, ± 0.1 psia.
11.2 The test gas source and delivery system must be
capable of delivering a gas at ambient temperature ±
1°C for the duration of each analysis. The ambient
temperature shall be held to 22°C ± 1°C.
12 Calibration and Standardization
12.1 For each test, verify that calibration of test
equipment is up-to-date.
13 Procedure
13.1 Install the MFC into the test setup per
manufacturer’s recommendations.
13.2 Apply power to all devices sho wn in Figure 3 per
manufacturer’s specifications. Allow the devices to
warm up for the duration specified by the equipment
manufacturer.
13.3 Purge the system with nitrogen for a length of
time equal to ten times the amount of time it takes to
replace the system volume once, when the test MFC is
at its full-scale rated flow rate.
13.4 Close inlet shut-off valve. Then close the outlet
shut-off valve located adjacent to the MFC (see Figure
2). Adjust the MFC setpoint to zero flow. Wait for the
signals to become stable. Record the following on the
data sheet:
• MFC indicated flow,
• Flow standard flow,
• Ambient temperature,
• Gas temperature, and
• Gas pressure.
13.5 Ensure that the inlet and outlet shut-off valves
adjacent to the MFC (see Figure 2) are open. Adjust
the MFC setpoint to 50%. Ensure that all
manufacturer’s recommended conditions are met for the
MFC. Once the output signals become stable, record
the MFC output signal, the flow standard output signal,
the ambient and gas temperature, and the gas pressure
on the data sheet in Table 1.
13.6 Ensure that the MFC power leads and control sig-
nal cables are shielded in the area that will be irradiated
by the EM fields. The cable shielding shall be intact up
to the connector. The type of shielding and connector
shall be recorded on the data sheet in Table 1.
13.7 Radiated Electric Field Susceptibility (RS-03)
13.7.1 Testing from 14 kHz to 20 MHz:
13.7.1.1 Mount the parallel element antenna on a
tripod at a distance of one meter from the controller and
connect the antenna to the audio power amplifier using
the 50-ft length of RG-58 coaxial cable (see Figure 3).
Set the switch to low frequency range.
13.7.1.2 Connect the amplifier input to the signal
generator output.
13.7.1.3 Turn on amplifier and signal generator.
13.7.1.4 Using the X10 probe, connect the scope
across the antenna terminals.
NOTE 2: It is important to use the X10 probe rather than a
coax that terminates in 50 ohms. The audio amplifier will not
drive the required voltage into 50 ohms.
13.7.1.5 Set frequency output of the signal generator
to 14 kHz.
13.7.1.6 Turn off signal generator modulation and set
voltage across the antenna input connector at 35-V rms.
NOTE 3: With this voltage applied to the antenna at
frequencies below one MHz, the required field strength of 10
V/m at a distance of one meter from the antenna should be
established.
13.7.1.7 If, at any frequency, the required voltage
cannot be developed across the antenna terminals, set to
the maximum possible without exceeding equipment
ratings.
13.7.1.8 When voltage is set, turn on modulation and
adjust for 50% amplitude modulation with the internal
one kHz source.
13.7.1.9 Check operation of the controller in the
presence of this radiated field. Record the MFC
indicated flow, flow standard output, and the frequency
on the data sheet in Table 1.
SEMI F53-0600 © SEMI 2000 4
13.7.1.10 Before changing frequency as described in
Sections 13.7.1.10–13.7.1.15, reduce the voltage
amplitude to zero.
13.7.1.11 Set frequency to 20 kHz and repeat Sections
13.7.1.6–13.7.1.9.
13.7.1.12 Set frequency to 50 kHz and repeat Sections
13.7.1.6–13.7.1.9.
13.7.1.13 Set frequency to 100 kHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.14 Set frequency to 200 kHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.15 Set frequency to 500 kHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.16 Set frequency to one MHz and repeat
Sections 13.7.1.6–13.7.1.9.
13.7.1.17 Shut down the test equipment. Then remove
the audio amplifier and install RF power amplifier #1 in
its place.
13.7.1.18 Having exceeded one MHz, turn antenna
switch to the high frequency range.
13.7.1.19 Turn on test equipment and resume testing.
13.7.1.20 Set output of the signal generator to two
MHz and set field strength to 10 V/m, using field
strength meter at the controller location.
NOTE 4: If, at any frequency, the required field cannot be
developed, set to the maximum possible without exceeding
equipment ratings.
13.7.1.21 When voltage is set, turn on modulation and
adjust for 50% amplitude modulation with the internal
one kHz source.
13.7.1.22 Check operation of the controller in the
presence of this radiated field. Record the MFC
indicated flow, the flow standard output, and the
frequency on the data sheet.
13.7.1.23 Before changing frequency as described in
Sections 13.7.1.23–13.7.1.25 reduce the field amplitude
to zero.
13.7.1.24 Set frequency to 5 MHz and repeat Sections
13.7.1.19–13.7.1.22.
13.7.1.25 Set frequency to 10 MHz and repeat
Sections 13.7.1.19–13.7.1.22.
13.7.1.26 Set frequency to 20 MHz and repeat
Sections 13.7.1.19–13.7.1.22.
13.7.1.27 After testing at fixed frequencies, sweep the
signal source from 50 kHz to 20 MHz at an amplitude
of about 35 V rms or 10 V/m. If a malfunction occurs
during the sweep, stop and go back to that frequency
range and try to find the malfunction by testing at single
frequencies. Record the MFC indicated flow, the flow
standard outputs, and the frequency. If the malfunction
cannot be found by testing at single frequencies and
only shows up when sweeping, the problem is probably
that the signal source has to switch ranges at certain
frequencies and during the switching can create strong
transient noise. Only the results at single frequencies
can be trusted; the sweep is only to locate the problems,
not to completely define them.
13.7.1.28 Reduce signal source output to zero and de-
energize test equipment.
13.7.1.29 Disconnect and remove parallel element
antenna.
13.7.1.30 Testing from 30 MHz to 200 MHz:
13.7.1.31 Mount biconical antenna on the tripod. Test
in a sequence similar to that in Sections 13.7.1.1–
13.7.1.9.
13.7.1.32 Verify that RF power amplifier #1 is still in
place.
13.7.1.33 At a minimum, test at the follo wing
frequencies: 30 MHz, 40 MHz, 50 MHz, 60 MHz, 70
MHz, 80 MHz, 90 MHz, 100 MHz, 120 MHz, 140
MHz, 160 MHz, 180 MHz, and 200 MHz.
13.7.1.34 At each frequency, set the field strength to
10 V/m using the field strength meter at the controller
location with the antenna in both the vertical and the
horizontal positions.
13.7.1.35 Check operation of the controller in the
presence of the radiated fields generated. Record the
MFC indicated flow, the flow standard outputs, and the
frequency on the data sheet.
13.7.1.36 After testing at fixed frequencies, sweep the
signal source from 30 MHz to 200 MHz. If a
malfunction occurs during the sweep, stop and go back
to the faulty frequency range and try to find the
malfunction by testing at single frequencies. Record
the MFC indicated flow, the flow standard outputs, and
the frequency on the data sheet. If the malfunction
cannot be found by testing at single frequencies and
only shows up when sweeping, the problem is probably
that the signal source has to switch ranges at certain
frequencies and can create strong transient noise during
the switching. Only the results at single frequencies
can be trusted; the sweep is only to locate problems, not
to completely define them.
13.7.1.37 Reduce signal source output to zero and de-
energize test equipment.
13.7.2 Testing from 300 MHz to one GHz: