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SEMI E30-1103 © SEMI 1992, 2003 17 Table 3.4 Processing State Tran sition Table # Current State Trigger New State Action Comments 1 INIT Equipment initialization complete. IDLE None None 2 IDLE Commit has been made to se…

SEMI E30-1103 © SEMI 1992, 2003

3.4 Equipment Processing States — The behavior of

the equipment in the performance of its intended

function must be documented. This processing state

model is highly dependent on the equipment process,

technology, and style. However, there are expected to

be common aspects to these models.

The Processing State Diagram, Figure 3.4, is provided

as an example of an implementation model. This model

demonstrates the expected nature of the processing state

model documentation. There is no requirement that

these specific states be implemented.

The equipment must generate collection events for each

processing state transition, as well as provide status

variables (ProcessState, PreviousProcessState) whose

values are the current processing state and the previous

processing state.

In referring to the Processing State Diagram, note that

the initialization state INIT is not an actual processing

state. It is shown here simply to indicate that the IDLE

processing state is entered upon completion of

equipment system initialization. On the following pages

detailed descriptions are provided for the equipment

processing states and state transitions (numbered) as

shown in the diagram.

3.4.1 Description of Equipment Processing States

IDLE

In this state the equipment is awaiting instructions.

PROCESSING ACTIVE

This state is the parent of all substates where the

context of process program execution exists.

PROCESS

This state is the parent of those substates that refer to

the active preparation and execution of a process

program.

SETUP

In this state all external conditions necessary for

process execution are satisfied, such as ensuring

material is present at the equipment, input/output ports

are in the proper state, parameters such as temperature

and pressure values are within limits, etc. If all setup

operations are already complete, then this becomes a

fall through state and a transition to the next state takes

place.

READY

In this state the equipment is ready for process

execution and is awaiting a START command from the

operator or the host.

EXECUTING

Executing is the state in which the equipment is

executing a process program automatically and can

continue to do so without external intervention.

PAUSE

In this state processing is suspended and the equipment

is awaiting a command.

Each state transition is defined in the following table.

Note that all transitions in this table should be

considered collection events.

Figure 3.4

Processing State Diagram

SEMI E30-1103 © SEMI 1992, 2003

Table 3.4 Processing State Transition Table

# Current State Trigger New State Action Comments

1 INIT Equipment initialization

complete.

IDLE None None

2 IDLE Commit has been made to set

up.

SETUP None None

3 SETUP All setup activity has

completed and the equipment

is ready to receive a START

command.

READY This activity is

equipment-

specific.

None

4 READY Equipment has received a

START command from the

host or operator console.

EXECUTING This activity is

equipment-

specific.

None

5 EXECUTING The processing task has been

completed.

IDLE None None

6 PROCESSING

ACTIVE

Equipment has received a

STOP command from host or

operator console.

IDLE None None

7 PROCESSING

ACTIVE

Equipment has received an

ABORT command from host

or operator console.

IDLE This activity is

equipment-

specific.

None

8 PROCESS The equipment decides to

PAUSE due to a condition

such as alarm.

PAUSE This activity is

equipment-

specific.

For this type of

problem, an

operator assist is

usually required.

9 PROCESS Equipment has received a

PAUSE command from host

or operator console.

PAUSE This activity is

equipment-

specific.

None

10 PAUSE Equipment has received a

RESUME command from

host or operator console.

PROCESS

substate

This activity is

equipment-

specific.

None

4 Equipment Capabilities and Scenarios

This section describes the details of the capabilities

required by GEM and provides scenarios for their use.

Capabilities are operations performed by semiconductor

manufacturing equipment. These operations are

initiated through the communications interface using

SECS-II messages. A scenario is a group of SECS-II

messages arranged in a sequence to perform a

capability. Other information may be included with the

scenario for clarity. For each capability, the reader is

provided with a statement of purpose, pertinent

definitions, a detailed description, requirements, and

scenarios.

The following capabilities are discussed:

Establish Communications

Event Notification

Dynamic Event Report Configuration

Variable Data Collection

Trace Data Collection

Limits Monitoring

Status Data Collection

On-line Identification

Alarm Management

Remote Control

Equipment Constants

Process Program Management

Material Movement

Equipment Terminal Services

Error Messages

SEMI E30-1103 © SEMI 1992, 2003

Clock

Spooling

Control

4.1 Establish Communications — The Establish

Communications capability provides a means of

formally establishing communications following system

initialization or any loss of communications between

communicating partners, and thus of notifying the

communication partner that a period of non-

communication has occurred.

4.1.1 Purpose — Communications between host and

equipment are formally established through use of the

Establish Communications Request/Establish

Communications Acknowledge transaction.

The use of S1,F1/F2 for this purpose is ambiguous

since the transaction can be used for other purposes and

may occur at any time.

The S1,F13/F14 transaction, used in conjunction with

the Communications State Model, provides a means for

equipment to notify the host, or the host to notify the

equipment, that there has been a period of inability to

communicate. The successful completion of this

transaction also signals a possible need for

synchronization activities between host and equipment.

4.1.2 Definitions

COMMACK — Acknowledge code returned in the

Establish Communications Acknowledge message. See

the SEMI E5 Standard for a full definition of this data

item.

EstablishCommunicationsTimeout — An equipment

constant used to initialize the interval between attempts

to re-send an Establish Communications Request. This

value specifies the number of seconds for the interval.

See the SEMI E5 Standard for a full definition of this

variable data item.

4.1.3 Description — There are potential problems

when one side of the communications link fails and the

other side does not detect it. From the point of view of

the host, a loss of communications has many possible

causes. In some cases, host-controlled settings on the

equipment may need to be reset. In other cases, the

equipment may have continued an automatic processing

sequence during the period of no communication and

may have changed states. The definition of a formal

protocol for establishing communications alerts the host

to the need to synchronize itself with the equipment’s

current status.

Equipment shall consider communications as formally

established whenever either of the following conditions

have been satisfied:

— Communications Request has been sent to the host

and an Establish Communications Acknowledge

has been received within the transaction timeout

period and with an acknowledge code of Accept, or

— Communications Request has been received from

the host, and an Establish Communications

Acknowledge response has been successfully sent

with an acknowledge code of Accept.

When the equipment sends an Establish

Communications Request to the host, this notifies the

host of the possible need to synchronize itself with the

equipment.

When the equipment is attempting to establish

communications, an Establish Communications Request

shall be sent periodically until communications have

been formally established as described above. The

interval between attempts must be user-configurable

and begins as soon as a connection transaction failure is

detected (see Section 3.2).

Attempting to establish communications is not a low-

level connectivity issue, but rather a logical application

issue used by either party to notify its partner that the

host may need to perform synchronization activities

with the equipment.

4.1.4 Requirements

— Equipment must support the Communication State

Model (see Section 3.2).

— Equipment must provide the EstablishCommunica-

tionsTimeout equipment constant described above.

14 Satisfaction of either of these conditions will result in a transition

to the COMMUNICATING substrate. See Section 3.2 for further

detail.