semi合集-English.pdf - 第5850页

SEMI P33-0998 © SEMI 1998 4 Table 2 Specific ations for Beveled and Rounded Ed ge Dimensions T AABBC C Nominal Minimum Maximum Minimum Maximum Minimum Maximum Units 9.00 0.20 0.60 0.20 0.60 2.00 3.00 mm NOTE: “D ” is r a…

SEMI P33-0998 © SEMI 19983

Table 1 Specifications for Edge Length, Squareness, and Thickness for Square Substrates

Nominal Edge Length

Edge Length

Minimum

Edge Length

Maximum Squareness

Thickness

Minimum

Thickness

Maximum Units

230 mm 229.6 230.0 0.186/213 8.90 9.10 mm

Figure 1

Square Hard Surface Photomask Substrate

Figure 2

Measurement Fixture and Calculation to Determine Substrate Squareness

SEMI P33-0998 © SEMI 1998 4

Table 2 Specifications for Beveled and Rounded Edge Dimensions

T AABBCC

Nominal Minimum Maximum Minimum Maximum Minimum Maximum Units

9.00 0.20 0.60 0.20 0.60 2.00 3.00 mm

NOTE: “D” is radius of curvature of concerns.

Figure 3

Beveled Edge Dimensions

Figure 4

Square Quality Area

Figure 5

Substrate Identification by Corner Chamfer(Non-Critical Side)

Figure 6

Dimension of Corner Chamfer