semi合集-English.pdf - 第1492页

SEMI E30.5-0302 © SEMI 2001, 2002 20 CPNAME CPVAL Description Ran g e Format CP -ELE ME NTLIS T L,n 1. <C P -ELEMENTI D> : n. CP-LOCATIONID Unique identif ier of the loc ation to be use d for the “CARRIERBLD” assig…

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SEMI E30.5-0302 © SEMI 2001, 200219
12.5.10 STOP
complete the current cycle, stop in a safe condition and return to the IDLE processing state. Stop
has the intent of stopping the process entirely. The equipment is not required to support the continuation of
processing.
12.6 Host Command Parameters Names (CPNAME)
Table 12 Host Command Parameter Table
CPNAME
CPVAL
Description Range Format
CARRIERBLD L,2
1. L,2
1. CP-CARRIERID **
2. CARRIERID
or
1. L,2
1. CP- LOCATIONID **
2. (STORAGE)ID
2. L,N
1. L,2
1. PROCESS-BLD-GROUP
2. L,M
:
N. L,2
1. PROCESS-BLD-GROUP
** Both CP-CARRIERID and CP-LOCATION may be
included if no carrier ID reader is available.
CP-ABORT-LEVEL MSEM defined abort levels
HALT - halt,
goto ABORTED
CLEANUP - halt, preform cleanup procedure,
goto ABORTED
“HALT”
“CLEANUP”
A[7]
CP-ALIGNLIST L,n
1. CP-ALIGNNAME
:
n.
For the SEMI M20 or M20P Coordinate system
CP-ALIGN-DEF-LIST As defined in Section 9
CP-ALIGNNAME Alignment name A[1..80]
CP-AUTOSTART Defines if a START command is required from an
external source (operator or host) to exit the READY
state. 0 = START command required,
1 = AUTOSTART no external START command
required to begin execution.
0–1 U1
CP-CARRIERID ID of carrier that the measurement data is associated
with.
A[1..16]
CP-ELEMENTID The M21 address for a specific rectangular pattern on
the wafer.
I4[2]
SEMI E30.5-0302 © SEMI 2001, 2002 20
CPNAME
CPVAL
Description Range Format
CP-ELEMENTLIST L,n
1. <CP-ELEMENTID>
:
n.
CP-LOCATIONID Unique identifier of the location to be used for the
“CARRIERBLD” assignment.
U4
CP-LOTID lot id A[1..80]
CP-MATERIALLIST L,n
1. <CP-SLOTID or CP-WAFERID>
:
n.
CP-M21-ALIGNLIST L,n
1. CP-ALIGNNAME
:
n.
For the SEMI M21 Coordinate system
CP-M21-SITELIST L,n
1. CP-SITENAME
:
n.
For the SEMI M21 coordinate system
CP-PPNAME Process Program name A[1..80]
CP-PRIORITY assignment priority 0–9
0–highest
priority
U4
CP-SITELIST L,n
1. CP-SITENAME
:
n.
For the SEMI M20 or M20P coordinate system
CP-SITE-DEF-LIST As defined in Section 9.
CP-SITENAME unique identifier for a site A[1..16]
CP-SLOTID slot number 1–n U4
CP-SLOTLIST Specifies carrier slots that contains substrate to
measure.
L,n
1. CP-SLOTID
:
n.
0 indicates all
slots
CP-WAFERID Physical wafer identifier A[1..24]
SEMI E30.5-0302 © SEMI 2001, 200221
CPNAME
CPVAL
Description Range Format
PROCESS-BLD-GROUP L, n
1. L, 2
1. CP-PPBUILDID
2. PPBUILDGROUPID
2. L, 2
1. CP-PPNAME
2. PPNAME
3. L, 2
1. CP-LOTID
2. LOTID
4. L, 2
1. CP-AUTOSTART
2. START
5. L, 2
1. CP-MATERIALLIST
2. L, n
1. CP-SLOTID
:
n.
or
1. CP-WAFERID
2. L, n
:
n.
n ≥ 2
List of n data
items