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SEMI E52-0703 © SEMI 1995, 2003 23 Code Gas Name Symbol Formula Synonym Ref 341 Isobutyl Alcohol C4H10O (CH 3 ) 2 CHCH 2 OH 3 298 Diethyl sulfide C4H10S C 4 H 10 S UN 2375; Ethyl sulfide; 2 214 Diethylzinc C4H10Zn Zn(C 2…

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SEMI E52-0703 © SEMI 1995, 2003 22
Code Gas Name Symbol Formula Synonym Ref
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
332 Acetone, hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3-Dioxolane 3
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
89 Propane C3H8 CH
3
CH
2
CH
3
1
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
149 Trimethylaluminum C3H9Al Al(CH
3
)
3
TMA, TMAl 4
151 Trimethylarsenic C3H9As (CH
3
)
3
As Trimethylarsine, TMAs 2
277 Trimethylborane C3H9B (CH
3
)
3
B 2
131 Trimethoxyborine C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate 2
152 Trimethylgallium C3H9Ga Ga(CH
3
)
3
TMGa 4
153 Trimethylindium C3H9In (CH
3
)
3
In TMIn 3
109 Trimethylamine C3H9N (CH
3
)
3
N Methylamine 1
294 Trimethyl ester phosphoric acid C3H9O4P C
3
H
9
O
4
P Methyl phosphate;
Trimethoxyphosphine oxide
2
132 Trimethylphosphorous C3H9P (CH
3
)
3
P Trimethylphosphine, TMP 2
133 Trimethylphosphite C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine 2
150 Trimethylantimony C3H9Sb (CH
3
)
3
Sb Trimethylstibene 2
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
241 Perfluorobutane C4F10 C
4
F
10
3
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
129 Octafluorocyclobutane C4F8 (CF
2
)
4
Perfluorocyclobutane or
Cyclobutane, Perfluoro
1
236 Octafluorobutane C4F8 C
4
F
8
3
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
117 Butane C4H10 CH
3
(CH
2
)
2
CH
3
1
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
SEMI E52-0703 © SEMI 1995, 2003 23
Code Gas Name Symbol Formula Synonym Ref
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
161 Tertiarybutylarsine C4H11As C(CH
3
)
3
AsH
2
TBA 8
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
162 Tertiarybutylphosphine C4H11P C(CH
3
)
3
PH
2
TBP 8
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
299 Tetramethoxygermanium C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4 2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
301 Tetramethoxy silane C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4);
Tetramethyl ester; Tetramethyl
silicate
2
302 Tetramethyl lead C4H12Pb (CH
3
)
4
Pb (CH3)4Pb; Plumbane,
tetramethyl;
2
154 Diethylsilane C4H12Si (C
2
H
5
)
2
SiH
2
2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
158 Tetramethylcyclotetra-siloxane C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TOMCATS 7
93 Ethyl Acetylene C4H6 CH
3
CH
2
C=CH 1
100 Butadiene C4H6 CH
2
=C=CHCH
3
Methylallene 1
98 Transbutene C4H8 CH
3
CH=CHCH
3
2
104 Butene C4H8 CH
3
CH
2
CH=CH
2
1-Butene 1
106 Isobutene C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene 2
107 Cisbutene C4H8 CH
3
CH=CHCH
3
Cis-2-Butene 2
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
182 Tetrahydrofuran C4H8O C
4
H
8
O 2
140 Nickel Carbonyl C4O4Ni Ni(CO)
4
1
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
120 Methylbutene C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene 1
122 Dimethylpropane C5H12 (CH
3
)
4
C Neopentane 2
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
303 Trimethylvinylsilane C5H12Si C
5
H
12
Si Vinyltrimethylsilane;
CH2=CHSi(CH3)3
2
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
304 Pyridine C5H5N C
5
H
5
N Azabenzene; Azine 2
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate); 2-
Methyl1-2-propenoic acid
2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
192 Hexafluorobenzene C6F6 C
6
F
6
2
178 4-Methyl, 1-Pentene C6H12 (CH
3
)
2
CHCH
2
CH=CH
2
2
127 Hexane C6H14 CH
3
(CH
2
)
4
CH
3
2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
257 Triethylaluminum C6H15Al (C
2
H
5
)
3
Al 2
SEMI E52-0703 © SEMI 1995, 2003 24
Code Gas Name Symbol Formula Synonym Ref
306 Triethyl arsine C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic 2
307 Trietoxy arsine C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid;
Triethyl arsenite
2
308 Triethoxyborane C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide; 2
148 Triethylgallium C6H15Ga (C
2
H
5
)
3
Ga TEGa 4
309 Triethylindium C6H15In (C
2
H
5
)
3
In Indium triethyl 2
310 Triethylamine C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine; 2
163 Triethylborate C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane 2
311 Triethoxyphosphine C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN 2323;
Phosphorous acid, triethyl ester
2
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
258 Triethylantimony C6H15Sb (C
2
H
5
)
3
Sb 2
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
312 Triethoxy silane C6H16O3Si (C
2
H
5
O)
3
SiH 2
313 Triethyl silane C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH; 2
139 Hexamethyldisilane C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS 3
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
197 Benzene C6H6 C
6
H
6
2
180 Phenol C6H6O C
6
H
5
OH 2
314 Trimethylisoxazole C6H9NO CH
3
CH=CHCH=CHCON
H
2
3,4,5-Trimethylisoxazole,
Sorbamide
3
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
181 Toluene C7H8 C
6
H
5
CH
3
Methylbenzene 2
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
179 o-Xylene C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
342 3-one-2,5-dimethyl hexadiene C8H10 CH
2
=C(CH
3
)C=CC(CH
3
)C
H
2
3
343 1,7-Octadiyne C8H10 HC=C(CH
2
)
4
C=CH 3
344 2,6-Octadiyne C8H10 CH
3
C=CCH
2
CH
2
C=CCH
3
3
345 1,3,5,7-Octatetraene C8H10 CH
2
=CHCH=CHCH=CHC
H=CH
2
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
315 Tetraethylgermane C8H20Ge (C
2
H
5
)
4
Ge (C2H5)4Ge; Germanium
tetraethyl
2
144 Tetraethoxysilane C8H20O4Si (C
2
H
5
O)
4
Si TEOS 2
316 Tetraethyl lead C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN 1649 2
317 Tetraethyl silane C8H20Si C
8
H
20
Si Tetraethylsilane;
Tetraethylsilicon; (C2H5)4Si
2
318 Tetrakis(dimethylamino)-
titanium
C8H24N4Ti C
8
H
24
N
4
Ti 2
319 Styrene C8H8 C
8
H
8
Ethenylbenzene; Un 2055 2