semi合集-English.pdf - 第1161页

SEMI E5-1104 © SEMI 1982, 2004 103 Stream,Function Name (Mnemonic) Direction S4,F5 Handshake Complete (HCN) S,H<->E Description Receiver advises sender that the handshake is complete. The s ender may now s top its …

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SEMI E5-1104 © SEMI 1982, 2004 102
Stream,Function Name (Mnemonic) Direction
S4,F0 Abort Transaction (S4F0) S,H->E
Description
Same form as S1,F0.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S4,F1 Ready to Send Materials (RSN) S,H<->E,reply
Description
The sender advises the receiver that some material is awaiting transfer.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S4,F2 Ready to Send Acknowledge (RSA) S,H<->E
Description
Acknowledge or error
Structure
<RSACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S4,F3 Send Material (SMN) S,H<->E
Description
The receiver advises the sender that it is ready to receive material and that its transfer mechanism is running.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F4 Not Used
SEMI E5-1104 © SEMI 1982, 2004 103
Stream,Function Name (Mnemonic) Direction
S4,F5 Handshake Complete (HCN) S,H<->E
Description
Receiver advises sender that the handshake is complete. The sender may now stop its transfer mechanism.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F6 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F7 Not Ready to Send (ABN) S,H<->E
Description
Sender advises receiver that no material is being sent. The receiver may now stop its transfer mechanism.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F8 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F9 Stuck in Sender (SSN) S,H<-E
Description
An error from the sender to the host. The time between the receipt of Material (SMN) and the material leaving the sender’s
sensor exceeds the sender’s t1 timeout. The sender goes to a hold state until the disposition of the stuck material is determined.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F10 Not Used
SEMI E5-1104 © SEMI 1982, 2004 104
Stream,Function Name (Mnemonic) Direction
S4,F11 Stuck in Receiver (SRN) S,H<-E
Description
An error from the receiver to the host. The time between Send Material (SMN) and detection of the material at the receiver
exceeds the receiver’s t2 timeout. The receiver goes to a hold state until the disposition of material is determined.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F12 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F13 Send Incomplete Timeout (SIN) S,H<-E
Description
An error from the sender to the host. The time between the receipt of the Send Material (SMN) and the receipt of Handshake-
Complete (HCN) exceeds the sender’s t3 timeout. There has been an error in the handshake and the transfer mechanism is
turned off.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F14 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F15 Material Received (MRN) S,H<-E
Description
A message from the receiver to the host. Material has been transferred to the receiver.
Structure
L,2
1. <PTN>
2. <MID>
Exception
None
S4,F16 Not Used