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SEMI E87-0705 © SEMI 1999, 2005 57 R1-2.201 Correct Carrier Delivery to Wrong Port 1 Scenario R1-2.20.1 Assumpti ons: Fixed Load Port Eq uipment base d verification. R1-2.20.2 Indicated st ates: LTS = Load Port Transfer …
SEMI E87-0705 © SEMI 1999, 2005 56
Table R1-16 Carrier-Out Dequeuing (Cancellation)
# Comment Dir Message LTS LRS LCAS
0 Initial condition.
1 Host commands to cancel all carrier-out services from
queue.
H->E CancelAllCarrierOut
2 All carrier-out services are canceled from queue.
TB R
3 Current carrier-out service completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
4 Unloading transfer starts. H<-E TransferBlocked TB
A
5 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA
R1-2.17 Carrier Association Cancellation
R1-2.17.1 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-17 Carrier Association Cancellation
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with specified carrierID,
and reserved for loading.
H->E
H<-E
Bind
Associated
2 Host decides to cancel current carrier delivery.
R A INR SNR
3 Host commands to cancel association. H->E
H<-E
CancelBind
NotAssociated
RTL
NR NA (T) (T)
R1-2.18 Access Mode Change
R1-2.18.1 Initial condition: Access mode = AUTO
R1-2.18.2 Indicated states: AMS = Access Mode State
Table R1-18 Access Mode Change
# Comment Dir Message AMS
0 Initial condition. A
1 Host commands to change access mode to MANUAL. H->E ChangeAccess M
2 Access mode is changed to MANUAL. H<-E Manual
R1-2.19 Load Port Service Status Change
R1-2.19.1 Initial condition: Load port service status = IN SERVICE
R1-2.19.2 Indicated states: LTS = Load Port Transfer State
Table R1-19 Load Port Service Status Change
# Comment Dir Message LTS
0 Initial condition. IS
1 Host commands to change service status to OUT OF SERVICE. H->E ChangeServiceStatus OS
2 Service status is changed to OUT OF SERVICE. H<-E OutofService
SEMI E87-0705 © SEMI 1999, 2005 57
R1-2.201 Correct Carrier Delivery to Wrong Port 1 Scenario
R1-2.20.1 Assumptions: Fixed Load Port Equipment based verification.
R1-2.20.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-20 Correct Carrier Delivery to Wrong Port 1 Scenario
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port 1 is
associated with
specified carrierID,
and reserved for
loading.
H->E
H<-E
Bind (lp1)
LP1 Associated
RTL
2 Transfer starts at load
port 2.
H<-E LP2 TRANSFER
BLOCKED
3 Transfer Completes
at load port2.
H<-E Transfer
Complete
R A
NA
INR
4 CarrierID read at load
port 2
Equipment based
verification indicates
the carrier is at the
correct equipment.
H<-E
H<-E
H<-E
LP1 NOT
ASSOCIATED
LP2
ASSOCIATED
IV0
RTL
NR NA
TB
NR
A WFH
SNR
R1-2.21 Correct Carrier Delivery to Wrong Port 2 Scenario
R1-2.21.1 Assumptions: Fixed Load Port Equipment based verification.
R1-21.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-21 Correct Carrier Delivery to Wrong Port 2 Scenario
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDSA CSMS
A
CIDS
B
CSMS
B
0 Initial condition. NR NA (T) (T)
1 Load port 1 is
associated with
specified
carrierID A, and
reserved for
loading.
H->E
H<-E
Bind (CA,
LP1)
Lp1
Associated
NR NA (T) (T)
2 Load port 2 is
associated with
specified
carrierID B, and
reserved for
loading.
H->E
H<-E
Bind (CB,
LP2)
Lp2
Associated
RTL
2 Carrier A
Transfer starts at
load port 2.
H<-E LP2
TRANSFER
BLOCKED
R
3 Transfer
Completes at
load port2.
H<-E Transfer
Complete
RTL
R A
TB
NR
A
INR SNR
INR SNR
SEMI E87-0705 © SEMI 1999, 2005 58
# Comment Dir Message LTS1 LRS2 LCAS3 LTS2 LRS2 LCAS2 CIDSA CSMS
A
CIDS
B
CSMS
B
4 CarrierID read at
load port 2,
Equipment based
verification
indicates that a
correct carrier
was delivered to
the wrong load
port.
H<-E
H<-E
H<-E
LP1 NOT
ASSOCI-
ATED
Carrier B
object
destroyed
Alarm LP2
verification
failed
WFH
5 Host oks
processing.
H-> ProceedWith
Carrier
NR NA
IVO
(T) (T)
R1-2.22 CarrierID Read Fail Scenario 1
R1-2.22.1 Assumptions: Fixed buffer Equipment, Equipment based Verification, Bind service has been received.
R1-2.22.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-22 CarrierID Read Fail Scenario 1
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL A INR SNR
1 Carrier Arrives. E>H Transfer Blocked TB A INR SNR
2 ID read attempt fails. E>H State change to Waiting For Host
3 Decision to continue is made.
TB A WFH SNR
4 Host sends ProceedWithCarrier
service.
H>E
E>H
ProceedWithCarrier
State change to Id Verification OK
TB A IVO SNR
R1-2.23 CarrierID Read Fail Scenario 2
R1-2.23.1 Assumptions: Fixed buffer Equipment, Equipment based Verification, Bind service has been received.
R1-2.23.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-23 CarrierID Read Fail Scenario 2
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked TB
INR
2 ID read attempt fails. E>H State change to Waiting For Host
3 Decision to stop is made.
TB WFH
4 Host sends CancelCarrier service. H>E
E>H
CancelCarrier
State change to Id Verification Failed
TB
A
IVF
SNR
R1-2.24 CarrierID Read Fail Scenario 3
R1-2.24.1 Assumptions: Fixed buffer Equipment, Host based Verification.
R1-2.24.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.