semi合集-English.pdf - 第2579页

SEMI E90-0705 © SEMI 1999, 2005 19 Dictionary Parameter Form Description (List of) SubstrateObjectAttributes List of structure: Attribute name Attribute Valu e List of substrate attributes. Each substrate attributes is a…

100%1 / 7923
SEMI E90-0705 © SEMI 1999, 2005 18
Substrate Attribute Name Use as AttrSetting in Create Service
SubstType O
SubstUsage O
12.1.4 Use of attribute settings for the Delete service are optional and specific to the application.
12.2 Table 9 defines services required for substrate tracking. These services must be supported with substrate
object.
Table 9 Substrate Tracking Service Message Definition Table
Message Service Name Type Description
CancelSubstrate R Request to the equipment to skip the substrate and move into its source location or
destination location. Equipment instantiated substrate ID is required by this service. This
service is only required when the equipment provides capabilities for reading substrate
identifiers.
Change substrate state R Request to change substrate state. This message can be used to inform the equipment that
external intervention has occurred and the state of the substrate (SubstState) must be
corrected. For example, changing from AT DESTINATION state to AT SOURCE state.
ProceedWithSubstrate R Request to the equipment to accept the substrate. Equipment instantiated substrate ID is
required by this service. This service is only required when the equipment provides
capabilities for reading substrate identifiers.
UpdateSubstrateObject R Request to create a substrate object or to continue updating existent substrate object
attributes for the specified substrate identifier with the substrate information provided with
the service. If the substrate object was previously instantiated, the attribute(s) of the
substrate are updated as specified with this service. If transfer is not completed or substrate
is not at the equipment the service request fails. This service is used when substrates are
moved directly between linked equipment without the use of a carrier. This is an optional
service.
12.3 Substrate Tracking Service Parameter Dictionary
Table 10 Substrate Tracking Service Parameter
Dictionary Parameter Form Description
ErrorCode Enumerated Contains the code for the specific error found.
ErrorText Text Text in support of the error code.
STAcknowledge Enumerated Acknowledge of request.
Status A list of ErrorCode/ErrorText pairs Report any errors found.
STStatus A structure consisting of STAcknowledge
and Status
Return information for a service.
SubstID Text Identifier of a substrate.
SubstLocID Text Identifier of substrate location.
SubProcState Enumerated Processing State of a substrate.
SubstState Enumerated Transport State of a substrate.
SEMI E90-0705 © SEMI 1999, 2005 19
Dictionary Parameter Form Description
(List of)
SubstrateObjectAttributes
List of structure:
Attribute name
Attribute Value
List of substrate attributes. Each substrate
attributes is an attribute name/value pair. The
UpdateSubstrateObject service requires some
substrate object attributes to be specified. For
example, SubstrateID, SubstType, and at least
one of the following must be included:
SubstState, SubstProcState. All other substrate
object properties are optional as is in the case of
LotID, SubstSource, SubstUsage, SubstHistory,
etc. Supplier may define attributes to be
included in the service that are equipment
dependent as in the case of linked litho tools.
ObjSpec See SEMI E39. Specifier of the object owner.
ObjectActionStatus Structure
ServiceAcknowledge
Status
(List of)
ObjectActionParameterResult
List of structure:
Attribute name
Attribute Value
List of return parameters regarding the result of
the request as name/value pairs.
ObjectAction Text “UpdateSubstrateObject”
OperationID Unsigned Integer Identifies a specific request. See SEMI E39.
ObjectLinkID Unsigned Integer Set to non-zero if and only if additional
completion reports will be sent.
ServiceAcknowledge Enumerated 0 - Acknowledge performed successful
1 - Service does not exist
2 - Cannot perform now
3 - At least one parameter is invalid
4 - Service will be performed later with
notification
5 - Service is not completed or prohibited
6 - Not used
7-63 - Reserved
Status List of structure
Errorcode
Errortext
Table 11 Change Substrate State Message Pararmeter Table
Parameter Req/Ind Rsp/Conf Description
(list of) SubstID M =
(list of) SubstState C
(See NOTE 1.)
— The order of SubstStates corresponds to the order of SubstID list.
(list of) SubstProcState C
(See NOTE 1.)
— The order of SubstStates corresponds to the order of SubstID list.
Status — M Information about the results.
Table 12 UpdateSubstrateObject Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M — “UpdateSubstrateObject”
ObjSpec C — The object specifier of the object owner. See SEMI E39.
SEMI E90-0705 © SEMI 1999, 2005 20
Parameter Req/Ind Rsp/Conf Description
SubstrateObjectAttributes M = SubstrateID, SubstType, and at least one of the following
must be included: SubstState, SubstProcState. See
UpdateSubstrateObject service message definition for
additional requirements.
OperationID C — Used if multiple requests will be linked to events. Set to
zero otherwise.
ObjectLinkID — C Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus — M Acknowledge of the service acceptance and a list of error
code and error text pairs if any.
ObjectActionParameterResult — C List of return parameters regarding the result of the
request as name/value pairs. Service returns the substrate
object attributes updated that the request specified.
Table 13 ProceedWithSubstrate Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M - “ProceedWithSubstrate”.
ObjSpec M - The object specifier of the object owner. See SEMI E39.
SubstrateObjectAttributes M = SubstID, and SubstLocID are required.
OperationID M - Used if multiple requests will be linked events. Set to
zero otherwise.
ObjectLinkID - M Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus - M Acknowledge of the service acceptance and a list of
error code and error text pairs if any.
ObjectActionParameterResult - M SubstID, and SubstLocID are required.
Table 14 CancelSubstrate Service Parameter
Parameter Req/Ind Rsp/Conf Description
ObjectAction M - “CancelSubstrate”.
ObjSpec M - The object specifier of the object owner. See SEMI
E39.
SubstrateObjectAttributes M = SubstID, and SubstLocID are required.
OperationID M - Used if multiple requests will be linked events. Set to
zero otherwise.
ObjectLinkID - M Set to non-zero if additional completion reports will be
sent.
ObjectActionStatus - M Acknowledge of the service acceptance and a list of
error code and error text pairs if any.
ObjectActionParameterResult - M SubstID, and SubstLocID are required.
13 Variable Data
13.1 The host may inquire about any data related to specific Substrates, Substrate Locations and Batch Locations at
any time by using the OSS service GetAttr.
13.2 Implementations of Specification for Substrate Tracking that use the Event Reporting capability specified by
SEMI E30 (GEM) have the following requirement: For the objects defined by Specification for Substrate Tracking,
the identifier of that object and all of the attributes of that object shall be available for inclusion in event reports
associated with that object. The tables listed below specify the object attribute variables that must be available for
state model transitions: