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SEMI E87-0705 © SEMI 1999, 2005 4 Status Data Collection Equipment Constants Alarm Ma nagement Equipment Control 6.3 Object - Based Standard s Object Services Standard (SEMI E 3 9) Event Reporting (SEMI E53) …
SEMI E87-0705 © SEMI 1999, 2005 3
5.2.17 object instantiation — the act of storing of information related to a physical or logical entity so that it can be
recalled on demand based on its public identifier.
5.2.18 on-line equipment — equipment that is con-nected to, and able to communicate fully with, the host.
5.2.19 process equipment — equipment used to produce product, such as semiconductor devices. This excludes
metrology and material handling equipment.
5.2.20 production equipment — equipment used to produce product, such as semiconductor devices, including
substrate sorting, process, and metrology equipment and excluding material handling equipment.
5.2.21 properties — a set of name value pairs assigned to an object or used in a service message to include
additional information about the object (i.e., carrier, port, etc.).
5.2.22 re-initialization — a process where production equipment is either powered off then on or when some kind
of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On
production equipment that contains some kind of mass storage device this can also be called a “reboot”.
5.2.23 read position — any position on a load port or in an internal buffer from which the tag on a carrier can be
read.
NOTE 1: This position may vary on any particular equipment depending on the read technology selected by the end user. Some
technology/load ports may allow the carrier to be moved during reading. Equipment may have more than one read position.
5.2.24 single communication connection — exactly one physical connection using exactly one logical session and a
standard set of messages.
5.2.25 slot map –– the information that relates which slots in a carrier hold substrates, both correctly and
incorrectly.
5.2.26 slot map read –– the process of the equipment reading the slot map for substrate position and placement
within the carrier.
5.2.27 standard message set — messages conforming to standard message specifications.
5.2.28 substrate — material held within a carrier. This can be product, or durables such as reticles.
5.2.29 substrate port — the carrier location from which substrates are accessed by the equipment.
5.2.30 transfer unit — maximum number of carriers allowed in a specific transfer service:
AA is the maximum number of carriers allowed for acquisition at the transfer source.
BB is the maximum number of carriers allowed for deposit at the transfer destination.
CC is the maximum number of carriers allowed for transfer in one transport vehicle.
The transfer unit is the minimum of AA, BB, and CC.
5.2.31 undocked — the status of a carrier on a load port or in an internal buffer that is not at the docked position.
5.2.32 unload — the operation of removing a carrier from a load port.
5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a carrier can be
written to. This position may vary on any particular equipment depending on the write technology selected by the
end user. Some technology/load ports may allow the carrier to be moved during writing. The read position and the
write position may or may not be the same position.
6 Requirements
6.1 Carrier Management Standard (CMS) compliant equipment is required to provide certain capabilities defined by
other standards: accessibility to status infor-mation, event reporting, alarm management, and equipment control.
These requirements shall be satisfied through compliance to the following sets of standards:
6.2 Generic Equipment Model Standard (GEM) SEMI E30
Event Notification
SEMI E87-0705 © SEMI 1999, 2005 4
Status Data Collection
Equipment Constants
Alarm Management
Equipment Control
6.3 Object-Based Standards
Object Services Standard (SEMI E39)
Event Reporting (SEMI E53)
Exception Management (SEMI E41)
7 Conventions
7.1 Objects
7.1.1 Whenever the equipment is required to know about specific kinds of entities, and required to manage
information concerning these entities, it is useful to treat these entities as objects that comply with the basic
requirements of SEMI E39 Object Services Standard (OSS). This is especially true whenever there are a large
number of objects of a given type or when the entities are transient rather than permanent. In both cases, it is
difficult to describe a general way for the host and equipment to specify which particular entity is referenced and to
get information related only to a specific one out of many.
7.1.2 By defining these entities as objects that comply with OSS, it is only necessary for the host to specify the type
of object and its specific identifier in order to inquire about one or more properties of the specific entity of interest.
7.1.3 Object Properties
7.1.3.1 A property (attribute) is information about an individual object that is presented as a name/value pair. The
name is a formally reserved text string that represents the property, and the value is the current setting for that
property.
7.1.3.2 Properties shall be accessible to the host via the service GetAttr for the Carrier object. Using SEMI E39
Object Services Standard, for example, it is possible to:
get the list of IDs for the current carriers at the equipment, and
get the specified properties for one or more individual carriers.
7.1.4 Rules for Object Properties
Attributes with RO access can not be changed using SetAttr service as defined in OSS.
Attributes with RW access can be changed using SetAttr service as defined in OSS.
Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting
with “UD” (User Defined). Care should be taken to ensure the name of the attribute is unique.
7.1.5 Object Attribute Table
7.1.5.1
The object attribute table is used to list all the attributes related to the defined object as shown below the
access is defined as Read only (RO) or Read/Write (RW). The REQD column is used to specify whether the
attribute is required for implementation. Finally, the Form column is used to specify the format of that particular
attribute.
Table 1 Object Attribute Table
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = “Carrier”
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7.2 State Model Methodology
7.2.1 A state model has three elements: definitions of each state and sub-state, a diagram of the states and the
transitions between states, and a state transition table. The diagram of the state model uses the Harel State Chart
notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is
presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex Systems”, by D.
Harel, 1987
1
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7.2.2 State Model Requirements
7.2.2.1 The state models included in this standard are a requirement for CMS compliance. A state model consists of
a state model diagram, state definitions, and a state transition table. All state transitions in this standard, unless
otherwise specified, shall correspond to collection events. More explicitly, there must be a unique collection event
for each state transition.
7.2.2.2 Equipment must maintain state models for each of the required state models as defined in this document.
Equipment shall maintain individual and unique state models for each logical entity instantiated or physical entity in
the equipment that has state models associated with it. The event identifier reported during a particular state
transition change for each of these state models shall be shared for all associated state models but unique for each
transition. For example, if the equipment has two load ports and the load port state model defines 10 transitions,
there must be exactly 10 event identifiers for each load port transfer state model but not 10 for each physical load
port. The information identifying the physical entity or logical entity undergoing the transition will be contained
within the associated event report.
7.2.2.3 A state model represents the host's view of the equipment, and does not necessarily describe the internal
equipment operation. All CMS state model transitions shall be mapped sequentially into the appropriate internal
equipment collection events that satisfy the requirements of those transitions. In certain implementations, the equip-
ment may enter a state and have already satisfied all of the conditions required by the CMS state model for transition
to another state. In this case, the equipment makes the required transition without any additional actions in this
situation.
7.2.2.4 Some equipment may need to include additional sub-states other than those in this standard. Additional sub-
states may be added, but shall not change the CMS defined state transitions. All expected transitions between CMS
states shall occur.
7.2.2.5 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The
“actions” (column 5) includes a combination of:
Actions taken upon exit of the previous state,
Actions taken upon entry of the new state, and
Actions taken which are most closely associated with the transition.
7.2.2.6 When a state model is defined with multiple AND sub-states, the equipment may report all state entry
events with only one collection event. When conditional paths are defined in the state model, it is not necessary to
report any state transition(s) until a terminal state is reached at which time each transition used to reach that state is
reported.
Table 2 State Transition Table
Num Previous State Trigger New State Actions Comments
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