semi合集-English.pdf - 第3836页
SEMI F19-0304 © SEMI 1995, 2004 6 NOTICE: SEMI makes no warranties or representations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of the s…
SEMI F19-0304 © SEMI 1995, 2004 5
6.8.3 Waviness is acceptable if the surface roughness
requirements are met.
6.8.4 Orange peel is acceptable if the surface
roughness requirements are met.
6.8.5 Dents, frostiness, blistering and interrupted
electropolishing are not acceptable.
6.8.6 Contamination (water spots, rust, process
residues, chemical staining, etc.) are not acceptable.
6.8.7 Pitting, stringers, and inclusions apparent to the
unaided eye are not acceptable in UHP grade surfaces.
Acceptance of these defects in HP and UHP grade
surfaces shall be determined by the SEM test method of
SEMI F73 and shall be in conformance with the
specifications of Table 1.
7 Test Methods
7.1 Test methods are listed in Table 1 and described in
Section 6, Requirements.
8 Sampling
8.1 Sampling shall be per agreement between
component supplier and purchaser.
9 Certification
9.1 The component supplier shall provide the follow-
ing reports and certifications with all shipments of
processed components:
9.1.1 Name/part number/description of component(s),
9.1.2 Quantity of components by size or description,
9.1.3 Product grade of each size or category of
components per the classifications in this specification,
and
9.1.4 Certification that the manufacturing processes
were performed per an appropriate quality control
program and that the processes are qualified.
10 Product Labeling
10.1 Product labeling shall be per agreement between
component supplier and purchaser.
11 Related Documents
11.1 SEMI Standard
SEMI F55 — Test Method for Determining the
Corrosion Resistance of Mass Flow Controllers
11.2 ASME
2
Standards
2 American Society of Mechanical Engineers: United Engineering
Center, Three Park Avenue, New York, NY 10016-5990, USA.
ASME B46.1 — Surface Texture (Surface Roughness,
Waviness and Lay)
11.3 ASTM
1
Standards
ASTM F 1372 — Test Method for Scanning Electron
Microscope (SEM) Analysis of Metallic Surface
Condition for Gas Distribution System Components
ASTM F 1374 — Test Method for Ionic/Organic
Extractables of Internal Surfaces – IC/GC/FTIR for Gas
Distribution System Components
ASTM F 1375 — Test Method for Energy Dispersive
X-Ray Spectrometer (EDX) Analysis of Metallic
Surface Condition for Gas Distribution System
Components
ASTM F 1394 — Test Method for Determination of
Particle Contribution from Gas Distribution System
Valves
ASTM F 1396 — Test Method for Determination of
Oxygen Contribution by Gas Distribution System
Components
ASTM F 1397 — Test Method for Determination of
Moisture Contribution by Gas Distribution System
Components
ASTM F 1398 — Test Method for Determination of
Total Hydrocarbon Contribution by Gas Distribution
System Components
ASTM G 150 — Standard Test Method for
Electrochemical Critical Pitting Temperature Testing of
Stainless Steels
Telephone: 800.843.2763; Fax: 973.882.1717; Website:
http://www.asme.org
SEMI F19-0304 © SEMI 1995, 2004 6
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F20-0305 © SEMI 1995, 2005 1
SEMI F20-0305
SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS,
EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS
USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH
PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on November 4, 2004. Initially available at www.semi.org January 2005; to be published January
2005. Originally published in 1995; previously published July 2004.
1 Purpose
1.1 The purpose of this specification is to define the metallurgical cleanliness requirements and material
composition of 316L stainless steel required for use in the manufacture of components for general purpose, high
purity, and ultra-high purity chemical (gas or liquid) distribution systems.
2 Scope
2.1 This specification defines the requirements for 316L stainless steel bar, forgings, and extruded shapes as
specified in ASTM A 276, plate stock as specified in ASTM A 240, and tubing as specified in ASTM A 269 and
ASTM A 632, for use in the manufacture of components used in general purpose and high purity chemical (gas or
liquid) distribution systems in semiconductor manufacturing facilities.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 ASTM Standards
1
A 182/A 182M — Specification for Forged or Rolled Alloy-Steel Pipe Flanges, Forged Fittings, and Valves and
Parts for High Temperature Service
A 240/A 240M — Specification for Heat-Resisting Chromium and Chromium-Nickel Stainless Steel Plate, Sheet,
and Strip for Pressure Vessels
A 262 — Practices for Determining Susceptibility to Intergranular Attack in Austenitic Stainless Steels
A 269 — Standard Specification for Seamless and Welded Austenitic Stainless Steel Tubing for General Service
A 276 — Specification for Stainless and Heat-Resisting Steel Bars and Shapes
A 479/A 479M — Specification for Stainless and Heat Resisting Steel Bars and Shapes for Use in Boilers and Other
Pressure Vessels
A 480/A 480M — Specification for General Requirements for Flat-Rolled Stainless and Heat-Resisting Steel Plate,
Sheet and Strip
A 484/A 484M — Specification for General Requirements for Stainless and Heat-Resisting Wrought Steel Products
(Except Wire)
A 632 — Standard Specification for Seamless and Welded Austenitic Stainless Steel Tubing (Small-Diameter) for
General Service
A 751 — Test Methods, Practices and Terminology for Chemical Analysis of Steel Products
1 American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohoken, PA 19428-2959, USA. Telephone: 610.832.9585,
Fax: 610.832.9555, Website: www.astm.org