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SEMI E109-0305 © SEMI 2001, 2005 34 # Current State Trigger New (Sub-) State Action Comment 3 ALLOCATED Production Equipment: The last lot allocation to the reticle by a preprocessing or processing lot is removed becaus …

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SEMI E109-0305 © SEMI 2001, 2005 33
14.5 Reticle Allocation State Model
14.5.1 The purpose of the Reticle Allocation State Model is to define the host’s view of a reticle’s allocation state.
14.5.2 Reticle Allocation State Model Diagram
Reticle Allocation State
Not Allocated
Allocated
1
2 3
4
Figure 8
ReticleAllocation State Model Diagram
14.5.3 Reticle Allocation State Definition
14.5.3.1 RETICLE ALLOCATION STATE — The super state of NOT ALLOCATED and ALLOCATED.
14.5.3.1.1 NOT ALLOCATED — A substate of RETICLE ALLOCATION STATE, this state is active when the
reticle is not allocated to a lot in the queue or not selected for inspection. For Bare Reticle Stockers – not kitted
and not currently selected for kitting.
14.5.3.1.2 ALLOCATED — A substate of RETICLE ALLOCATION STATE, this state is active when the reticle is
allocated to one or more lots in the queue or selected for inspection. For Bare Reticle Stockers – allocated includes
being selected for kitting or already kitted.
14.5.4 Reticle Allocation State Transition Table — Table 14 indicates the triggers and the expected behavior of the
instantiated reticle in regards to the allocation state.
Table 14 Reticle Allocation State Transition Definition
# Current State Trigger New (Sub-) State Action Comment
1 - A reticle is instantiated. NOT ALLOCATED
2 NOT
ALLOCATED
Production Equipment: The reticle becomes
allocated to a pre-processing or processing
lot.
Inspection Equipment: The reticle becomes
allocated to an inspection.
Bare Reticle Stocker: The reticle is selected
for kitting.
ALLOCATED
SEMI E109-0305 © SEMI 2001, 2005 34
# Current State Trigger New (Sub-) State Action Comment
3 ALLOCATED Production Equipment: The last lot
allocation to the reticle by a preprocessing or
processing lot is removed because this lot
has been moved to another state OR the
equipment has been restarted.
Inspection Equipment: The inspection for
which the reticle was allocated has been
finished or has been cancelled.
Bare Reticle Stocker: The reticle has been
deselected for kitting.
NOT ALLOCATED
4 RETICLE
ALLOCATION
STATE
The Reticle object has been destroyed. -
15 Verification
15.1 Verification is the operation of comparing an actual value with an expected value. Verification may be
performed by either the host or the equipment, depending upon whether the host is using the Bind,
ReticleTransferJob, or PodNotification service or not.
15.1.1 If the host provides the expected value before the actual value is obtained by the production equipment, then
the production equipment shall perform the verification.
15.1.2 If the host does not provide the expected value before the actual value is read, then the production equipment
shall provide to the host, the information necessary for host based verification.
15.1.3 There are three values that are defined by Reticle and Pod Management that require verification: PodID, Pod
Slot Map, and ReticleID.
15.2 PodID Verification
15.2.1 Table 15 defines the methods for verifying the PodID.
Table 15 PodID Verification Methods
Verification
Method Desired
Host Actions before
Load
Equipment Action When Reticle Pod Is
Loaded
Host Actions after Load
Production
Equipment Based
Bind or
ReticleTransferJob
Service: The host
executes the Bind or
ReticleTransferJob
service to associate a
reticle pod load port
and a PodID.
Bind or ReticleTransferJob Service: The
production equipment reads the PodID from
the reticle pod, compares it to the podID
supplied with the Bind or ReticleTransferJob
service.
Verification Passed: Transition 6 of the
Reticle Pod State Model occurs. The
production equipment proceeds with
processing.
Verification Passed: None.
SEMI E109-0305 © SEMI 2001, 2005 35
Verification
Method Desired
Host Actions before
Load
Equipment Action When Reticle Pod Is
Loaded
Host Actions after Load
Verification Failed: The equipment initiates
Transition 12 of the reticle pod state model
then Transition 29 and the reticle pod object
created via the bind or ReticleTransferJob
service is destroyed. The equipment also
initiates Transition 3 of the reticle pod state
model and a reticle pod object with the PodID
equal to the one determined by the PodID
read is instantiated. The reticle pod shall not
be opened by the equipment until and unless
the ProceedWithPod service is received from
the host.
Verification Failed: The host uses
either the CancelPod service to force
the reticle pod to be readied for
unload, or indicates to the production
equipment that it may proceed with
the unexpected reticle pod, by
sending the ProceedWithPod service.
In both cases the PodID specified in
the service is equal to the one
determined by the PodID read.
PodNotification
Service: The host
executes the
PodNotification
service to inform the
equipment of the
future arrival of a pod
to an unspecified
reticle pod load port.
PodNotification Service: The production
equipment reads the PodID from the reticle
pod, compares it to the PodID supplied with a
PodNotification service.
Verification Passed: Transition 6 of the
Reticle Pod State Model occurs. The
production equipment proceeds with
processing.
Verification Passed: None.
Verification Failed: Not Applicable; because
there is no association between a reticle pod
load port and a reticle pod, equipment based
verification failure is not possible. If a reticle
pod that has not been instantiated arrives at a
load port, the equipment shall consider this as
host based verification.
Verification Failed: Not Applicable,
because there is no association
between a reticle pod load port and a
reticle pod, equipment based
verification failed is not possible. If
a reticle pod that has not been
instantiated arrives at a reticle pod
load port, the equipment shall
consider this as host based
verification.” The host will respond
with either a ProceedWithPod or a
CancelPod Service. (See Host Based
verification method).
Host Based None required, the
host may issue a
ReserveAtPort service.
The production equipment reads the PodID
and reports it to the host in an event report.
Following PodID read the equipment initiates
Transition 3 of the Reticle Pod State Model
and a reticle pod object with the PodID equal
to the one determined by the PodID read is
instantiated. The reticle pod shall not be
opened the equipment until and unless the
ProceedWithPod service is received from the
host.
Verification Passed: The host sends
a ProceedWithPod service indicating
the verification passed.
Verification Failed: The host uses
the CancelPod or CancelPodAtPort
service to force the equipment to
prepare the pod for unload
.