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SEMI E20-0697 © SEMI 1991, 2002 2 power sources. The 24 VAC power to e n ergize this circuit is provided from within a main power enclosure, so that the EMO circuit i s independent of module power. Each m odule EMO is co…

SEMI E20-0697 © SEMI 1991, 2002 1

SEMI E20-0697 (Reapproved 1102)

CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND

EMERGENCY OFF STANDARD

This standard was technically approved by the Global Physical Interfaces and Carriers Committee and is the

direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Physical Interfaces and Carriers Committee on July 21, 2002. Initially

available at www.semi.org October 2002; to be published November 2002. Orignally published in 1991;

previously published June 1997.

1 Purpose

1.1 The purpose of the standard is to specify the

Emergency Off capability to the modules of a cluster

tool; to allow module Emergency Off disconnect and

reconnect in a safe manner without removing power

from the rest of the tool; and to prevent power from

being applied to a module when its Emergency Off is

non-functional.

2 Scope

2.1 The standard deals with the delivery and

emergency interruption of electrical power to the

modules of a cluster tool.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Impact

3.1 The standard requires that power can be delivered

to an individual module only if its Emergency Off is

functional. This does not preclude removal of power

from the module by non-emergency means.

3.2 The standard specifies the Emergency Off circuit

functions that must be provided at the Emergency Off

interfaces of a cluster tool, including the plug,

momentary bypass switch and bypass jumper plug.

Pinouts for the Emergency Off plug and bypass jumper

plug are specified.

4 Referenced Standards

4.1 SEMI Standards

SEMI E21 — Cluster Tool Module Interface:

Mechanical Interface and Wafer Transport Standard

4.2 Military Standards

1 Available through the Naval Publications and Forms Center, 5801

Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone:

215.697.3321

MIL-C-26500E — General Specification for

Connectors — General Purpose, Electrical, Miniature,

Circular, Environmental Resisting

5 Terminology

5.1 Definitions

5.1.1 daisy-chained — Connected so that the removal

of one component causes the interruption of the circuit

to another component.

5.1.2 emergency off (EMO) — Fail-safe control switch

or circuit which, when de-energized, will stop the

operation of associated equipment and will shut off all

potential hazards outside the main power enclosure.

5.1.3 EMO interface — The location at which a

process or cassette module EMO cable is connected

into the cluster tool circuit.

6 Requirements

6.1 Power Distribution

6.1.1 Mains — Each cluster tool (as defined in SEMI

E21) shall have its power provided by one or more

contactors enabled by the EMO. The power is to be

delivered to one or more power distribution enclosures,

where voltage transformation may take place before

distribution to the module (as defined in SEMI E21).

6.1.2 Module Power Distribution — The power

distribution to each module is provided through a

dedicated circuit breaker in the power distribution

enclosure. The rated current and voltage in each circuit

is determined by the tool configuration. A discussion of

how this standard may be implemented is given in

Related Information R1-1.

6.1.3 Operation of the EMO — Activation of the EMO

shall not cause or allow an unsafe condition to exist

(see Related Information R1-2).

6.2 EMO Circuit

6.2.1 Description — Each module attached to the

cluster tool is to have at least one EMO button

operating an EMO switch (see Related Information R1-

3). The switches are daisy chained into a circuit, or

circuits, that disconnect the main power and any backup

SEMI E20-0697 © SEMI 1991, 2002 2

power sources. The 24 VAC power to energize this

circuit is provided from within a main power enclosure,

so that the EMO circuit is independent of module

power. Each module EMO is connected to the chain at

its EMO interface. A momentary bypass switch, also

located at each module EMO interface, allows

separation of the module from the cluster tool without

tripping the EMO, provided that electrical power is

removed from the module by turning off the dedicated

circuit breaker (see Related Information R1-4). Jumpers

in the bypass jumper plug connect the EMO circuit in

series with contacts that open if the dedicated circuit

breaker is turned on.

6.2.2 Wiring — Copper wire used in the EMO circuits

shall be 0.82 mm

cross-section (#18 AWG) or larger.

6.2.3 Labeling — A label with the following legend is

to be affixed to the power distribution enclosure near

each module circuit breaker: Caution: Energizing this

circuit with the associated EMO bypass jumper plug

installed will interrupt power to the entire cluster tool.

6.3 Connection at EMO Interface

6.3.1 EMO Connector — The connector at the EMO

interface is reserved for EMO functions only. Metal

shell bayonet-type connectors are specified per MIL-C-

26500E as follows: MS24265R16B10SN on the panel,

and MS24266R16B10PN on the cable and on the EMO

bypass jumper plug. The receptacle is panel mounted at

the EMO interface and the plug is mounted on the

module EMO cable.

6.3.2 Module EMO Connector Pinouts — Pins 1 and 2

of the EMO cable plug connect across contacts in the

module EMO switch. In the receptacle, pins 1 and 2

connect to the EMO circuit and pins 3 and 4 connect

across the contacts specified in Section 6.2.1.

6.3.3 EMO Bypass Jumper Plug — Pin 1 is jumpered

to pin 4 and pin 2 is jumpered to pin 3 in the plug. This

will result in placing the contacts specified in Section

6.2.1 into the EMO circuit when the plug is installed.

NOTICE: The user’s attention is called to the

possibility that compliance with this standard may

require use of an invention covered by patent rights. By

publication of this standard, Semiconductor Equipment

and Materials International (SEMI) takes no position

respecting the validity of any patent rights asserted in

connection with any item mentioned in this standard. In

particular, users of the specification should be aware

that Drytek, Inc., A Unit of General Signal, 16 Jonspin

Road, Wilmington, MA 01887-1087, Phone: (508) 657-

3933, has neither claimed nor disclaimed that

compliance with this specification would require use of

an invention covered by one or more of its patents.

Users of this standard are expressly advised that

determination of any such patent rights, and the risk of

the infringement of such rights, are entirely their own

responsibility.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

SEMI E20-0697 © SEMI 1991, 2002 3

RELATED INFORMATION 1

NOTE: The material contained in these application notes is not an official part of SEMI E20 and is not meant to modify or

supersede it in anyway. Rather, these notes are provided primarily as a source of information to aid in the application of the

standard. As such, they are to be considered as reference material only. The standard should be referred to in all cases.

R1-1 AC Power Distribution

R1-1.1 One method of providing power and EMO

functions to a cluster tool is shown in Figure R1-1 (see

Section 6.1.2). A standby power supply (SPS) or

uninterruptible power supply (UPS) is included to

maintain EMO and selected cluster tool functions in the

event of main power failure. It may be desirable to

include additional circuit breakers in the main power

enclosure if individual module disconnects are needed

at level I in Figure R1-1. Disconnect at level II in

Figure R1-1 is made possible by the module circuit

breakers; SEMI E7, “Electrical Interfaces

Specification,” should be used for loads up to 10 kW.

Additional main power enclosures could be provided

for modules with heavy AC loads, provided that each

main contactor is operated by one common EMO

circuit, however, some user’s safety codes may demand

a single source of supply.

R1-2 Operation of Remote Equipment

R1-2.1 Activation of the EMO shall stop, by fail-safe

means at the tool, the delivery of potentially hazardous

energy (e.g., high voltage, laser) or hazardous material

(e.g., toxic process gas, coolant) to the cluster tool (see

Section 6.1.3).

R1-3 EMO Switch Placement

R1-3.1 The EMO switches on each module (see

Section 6.2.1) need to be placed so that they are

accessible to any person in the vicinity of the cluster

tool. Local safety codes may take precedence in matters

of EMO switch placement. The standard ensures that

each module has at least one EMO switch and that its

operation, when the module is attached, removes power

from the entire cluster tool.

R1-4 EMO Bypass

R1-4.1 Implementation — The functions, specified in

Section 4.2.1, to allow EMO bypass and to ensure that

module power is off when the EMO is removed from

the cluster tool EMO circuit, can be implemented as

shown in Figure R1-2. A relay or switch, operated in

parallel with the dedicated circuit breaker specified in

Section 6.1.2 for the module, provides 24 VAC to the

coil of a double pole relay when the circuit breaker is

de-energized. An indicator light in parallel with the coil

illuminates when the bypass is enabled and the power

to the module is off. One set of contacts of this relay is

used to enable the momentary EMO bypass switch. The

other set is connected across pins 3 and 4 of the EMO

receptacle at the EMO interface and is in the EMO

circuit when the EMO bypass jumper plug is installed.

Both sets of contacts are wired to open when voltage is

removed from the relay coil, i.e., when the circuit

breaker is closed.

R1-4.2 Module Disconnect — The dedicated circuit

breaker (see Section 6.2.1) to the module must be

turned off prior to disconnect. This causes the contacts

in series with the momentary EMO bypass switch to

close, rendering it operational. At this point, the EMO

switch on the module is still in the cluster tool EMO

circuit. To disconnect, the operator holds in the EMO

bypass switch while removing the module EMO plug

from the EMO interface and then connecting the EMO

bypass jumper plug. The momentary bypass switch can

then be released.

R1-4.3 Module Connect — To connect a module, the

dedicated circuit breaker (see Section 6.2.1) must be off

at the power distribution point to the module. The

power cable may be attached to the module at this time.

The operator holds in the momentary bypass switch

while disconnecting the EMO bypass jumper plug from

the EMO interface and connecting the module EMO

Plug. The momentary bypass switch can then be

released. Power cannot be applied to the module unless

the EMO is connected (as shown in Figure R1-2).

R1-5 Additional Documents and References

In implementing the standard, documents that may

provide additional guidance include:

R1-5.1 SEMI Document

SEMI S2 — Safety Guidelines for Semiconductor

Manufacturing Equipment

R1-5.2 Other Documents

International Electrotechnical Commission (IEC)

Standard 204, Sections 1, 2 and 3.

(U.S.) National Electrical Code (NEC).

2 National Fire Protection Association, Batterymarch, Quincy, MA

02269.