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SEMI E109-0305 © SEMI 2001, 2005 48 Table 26 CancelPodAtPort Service Paramete rs Parameter Name Req/Ind Rsp/Conf Description PortID M — Any pod that exists on the load port specified shall be made ready for unloading. CM…

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SEMI E109-0305 © SEMI 2001, 2005 47
18.4.2 Bind
18.4.2.1 The Bind service is used to associate a PodID with a load port. The Bind can contain a PropertiesList of
pod object attributes that are supplied by the host. A pod object is instantiated when this service is used
successfully. The Bind service will be rejected if the pod specified has already been instantiated through the Bind or
PodNotification service, or a PodID read. The Bind service also triggers a transition in the Load Port Reservation
state model from NOT RESERVED to RESERVED.
Table 23 Bind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The PortID where a pod is expected.
PodID M — The expected PodID.
PodPropertiesList C — A list of name value pairs providing attributes for the
pod object being instantiated with the Bind service.
CMStatus — M Information concerning the result of the service.
18.4.3 CancelBind
18.4.3.1 The CancelBind request is used to cancel the association between a port and a PodID. The pod object is
destroyed when this service is used successfully. The CancelBind service also triggers a transition in the Load Port
Reservation state model from RESERVED to NOT RESERVED.
Table 24 CancelBind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which to cancel the load port to pod association.
Either PortID or PodID must be specified.
PodID C — The PodID for which to cancel the load port to pod association.
Either PortID or PodID must be specified.
CMStatus — M Information concerning the result of the service.
18.4.4 CancelPod
18.4.4.1 The CancelPod request is used to stop a reticle pod. If the reticle pod is at a reticle pod load port, then it
shall be made ready for unload. The production equipment shall reject this service if issued after reticles have been
removed for processing.
Table 25 CancelPod Service Parameters
Parameter Name Req/Opt Rsp/Conf Description
PodID M — The PodID to cancel.
CMStatus — M Information concerning the result of the service.
PortID C — The PortID where the pod object is located. This parameter is not
required if the pod object has been previously instantiated.
18.4.5 CancelPodAtPort
18.4.5.1 CancelPodAtPort is used to abort any pod at a designated port. This service can be used when the podID
of the pod at the designated port is unknown.
SEMI E109-0305 © SEMI 2001, 2005 48
Table 26 CancelPodAtPort Service Parameters
Parameter Name Req/Ind Rsp/Conf Description
PortID M — Any pod that exists on the load port specified shall be made ready for
unloading.
CMStatus — M Information concerning the result of the service.
18.4.6 CancelPodNotification
18.4.6.1 The CancelPodNotification is used by the host to request the equipment cancel a previous PodNotification
service. This service shall cause the equipment to destroy the pod object specified.
Table 27 CancelPodNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod object to destroy.
CMStatus — M Information concerning the result of the service.
18.4.7 ChangeAccess
18.4.7.1 The ChangeAccess message requests a change of access mode for the load ports specified in the PortList.
Table 28 ChangeAccess Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
AccessMode M — The new desired access mode.
PortList C — The list of ports to use the new access mode.
CMStatus — M Information concerning the result of the service.
18.4.8 ChangeServiceStatus
18.4.8.1 The ChangeServiceStatus service is used to request the production equipment change a load port service
state.
Table 29 ChangeServiceStatus Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ServiceStatus M — The new service state.
CMStatus — M Information concerning the result of the service.
18.4.9 OktoUseReticle
18.4.9.1 The OktoUseReticle service is sent by the host to indicate that the reticle may be used for processing. The
equipment should change the reticle state model RETICLE AT EQUIPMENT status to QUALIFIED.
Table 30 OktoUseReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — ReticleID to designate the RETICLE AT EQUIPMENT status.
RPMStatus — M Information concerning the result of the service.
SEMI E109-0305 © SEMI 2001, 2005 49
18.4.10 PodComplete
18.4.10.1 The PodComplete service is used by the host to inform the equipment that all actions for transferring
reticles in and out of the pod are complete. This service is used when the equipment has not previously received a
ReticleTransferJob service for the pod. This service may also be used in the event of a Reticle Transfer Job that is
not completed successfully.
Table 31 PodComplete Parameters
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the Pod that is complete.
PortID C — The Port ID the Pod currently occupies.
CMStatus — M Information concerning the result of the service.
18.4.11 PodNotification
18.4.11.1 The PodNotification service is used by the host to inform the equipment that a Pod with the ID specified
will be arriving at the equipment. The load port is not specified; therefore no pod to load port association takes
place. A pod object with the ObjID equal to the PodID specified in the service is instantiated. The PodNotification
service will be rejected if the pod specified has already been instantiated through the Bind or PodNotification
service, or a PodID read.
Table 32 PodNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod object to instantiate.
PodPropertiesList C The PropertiesList of the pod to instantiate.
CMStatus — M Information concerning the result of the service.
18.4.12 ProceedWithPod
18.4.12.1 The ProceedWithPod service is sent by the host to indicate that the pod operations may continue. When
using host based verification it is used by the host to indicate to the production equipment that the verification of
PodID and/or the Cassette Slot Map is correct. For successful production equipment based verification the
production equipment shall not require this message before proceeding with the pod. For failed production
equipment based verification the production equipment shall require either a CancelPod or ProceedWithPod service.
18.4.12.2 Using Table 33, for the Host based PodID verification case, the ProceedWithPod service sent by the host
after the first PodID read is referred to as ProceedWithPod #1, the ProceedWithPod service sent after slot map read
is referred to as ProceedWithPod #2.
Table 33 ProceedWithPod Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which processing may proceed.
PodID M — The PodID for which processing may proceed.
PodPropertiesList C — A list of name value pairs providing attributes for the pod object.
CMStatus — M Information concerning the result of the service.