semi合集-English.pdf - 第1139页

SEMI E5-1104 © SEMI 1982, 2004 81 Stream,Function Name (Mnemonic) Direction S2,F45 Define Variable Limit Attributes (DVLA) M,H->E,reply Description Structure L,2 1. <DATAID> 2. L,m (m = # of variables in this de…

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SEMI E5-1104 © SEMI 1982, 2004 80
Stream,Function Name (Mnemonic) Direction
S2,F44 Reset Spooling Acknowledge (RSA) M,H<-E
Description
Acknowledge or error
Structure
L,2
1. <RSPACK> (accept or reject)
2. L,m (m = number of streams with errors)
1. L,3
1. <STRID
1
>
2. <STRACK
1
> (error in stream)
3. L,n (n = number of functions in error)
1. <FCNID
1
>
.
.
n. <FCNID
n
>
.
.
m. L,3
1. <STRID
m
>
2. <STRACK
m
> (error in stream)
3. L,n (n = number of functions in error)
1. <FCNID
1
>
.
.
n. <FCNID
n
>
Exception
1. If RSPACK = 0, a zero-length list, m = 0, is given, indicating no streams or functions in error.
2. A zero-length list, n = 0, indicates no functions in error for specified stream.
SEMI E5-1104 © SEMI 1982, 2004 81
Stream,Function Name (Mnemonic) Direction
S2,F45 Define Variable Limit Attributes (DVLA) M,H->E,reply
Description
Structure
L,2
1. <DATAID>
2. L,m (m = # of variables in this definition)
1. L,2
1. <VID
1
>
2. L,n (n = # of limits being defined/changed for VID
1
)
1. L,2
1. <LIMITID
1
>
2. L,p (p = {0,2})
1. <UPPERDB
1
>
2. <LOWERDB
1
>
.
.
n. L,2
1. <LIMITID
n
>
2. L,p (p = {0,2})
1. <UPPERDB
n
>
2. <LOWERDB
n
>
.
.
m.L,2
1. <VID
m
>
2. L,n (n = # of limits being defined/changed for VID
m
)
1. L,2
1. <LIMITID
1
>
2. L,p (p = {0,2})
1. <UPPERDB
1
>
2. <LOWERDB
1
>
.
.
n. L,2
1. <LIMITID
n
>
2. L,p (p = {0,2})
1. <UPPERDB
n
>
2. <LOWERDB
n
>
Exception
1. A zero-length list, m = 0, sets all limit values for all monitored VIDs to “undefined.”
2. A zero-length list, n = 0, sets all limits values for that VID to “undefined.”
3. A zero-length list, p = 0, sets that limit to “undefined.”
SEMI E5-1104 © SEMI 1982, 2004 82
Stream,Function Name (Mnemonic) Direction
S2,F46 Variable Limit Attribute Acknowledge (VLAA) M,H<-E
Description
Acknowledge definition of variable limit attributes or report error. If DVLA is not accepted due to one or more invalid
parameters (e.g., LIMITACK = 3), then a list of invalid parameters is returned containing the variable limit attribute and reason
for rejection. If an error condition is detected, the entire message is rejected (i.e., partial changes are not allowed).
Structure
L,2
1. <VLAACK>
2. L,m (m = number of invalid parameters)
1. L,3
1. <VID
1
> (VID with error)
2. <LVACK
p
> (reason)
3. L,n {n = 0,2}
1. <LIMITID
1
> (1st limit in error for VID
p
)
2. <LIMITACK
1
> (reason)
.
.
m. L,3
1. <VID
m
> (VID with error)
2. <LVACK
m
> (reason)
3. L,n {n = 0,2}
1. <LIMITID
1
> (1st limit in error for VID
x
)
2. <LIMITACK
1
> (reason)
Exception
1. A zero-length list, m = 0 indicates no invalid variable limit attributes.
2. A zero-length list, n = 0 indicates no invalid limit values for that VID.
Stream,Function Name (Mnemonic) Direction
S2,F47 Variable Limit Attribute Request (VLAR) S,H->E,reply
Description
This message allows the host to query the equipment for current variable limit attribute definitions.
Structure
L,m (m = # of VIDs this request)
1. <VID
1
>
.
.
m. <VID
m
>
Exception
A zero-length list, m = 0, requests a list of all VID values that can have variable limit attributes.