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SEMI E40-0705 © SEMI 1995, 2005 23 10.4.10 PRGetAllJobs — This message shall return a list containing jo b identifiers and the associated states of thos e jobs for all jobs which h ave not completed. Table 16 PRGetAllJob…

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Parameter Req/Ind Rsp/Cnf Comment
PRStatus - M
10.4.6 PRJobAlert — Notification of process job milestones achieved by the processing resource are communicated
using the PRJobAlert service. Process job milestones, which are described in ¶8.2.1, are events which are important
to the control and tracking of the process job. The milestones required to be supported are PR Job Setup, PR Job
Processing, PR Job Processing Complete, and PR Job Complete. An additional milestone, PR Job Waiting for Start,
is used with the manual start option.
Table 12 PRJobAlert Service Detail
Parameter Req/Ind Comment
Timestamp M
PRJobID M Identifies the process job on which the milestone has been reached.
PRJobMilestone M
PRStatus M
10.4.7 PRJobEvent — Process job informational event notification, which is described in ¶8.2.2, is communicated
using the PRJobEvent service. These are defined for Waiting for Material and Process Job State Change events.
Support for informational events is not required.
Table 13 PRJobEvent Service Detail
Parameter Req/Ind Comment
PREventID M
Timestamp M
PRJobID M Identifies the process job which generated the event.
PREventData C
10.4.8 PRJobSetRecipeVariable — Sends a request to change the settings for a list of recipe variable parameters.
Implementation of this service is optional.
Table 14 PRJobSetRecipeVariable Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M -
RecVariableList M - (list of)
RecipeVariable
PRStatus - M Indicates success or failure. Failure is if a variable can’t be set. A
List of variables which could not be set is returned in the status.
10.4.9 PRJobSetStartMethod — Sends a request to change the start method for job(s). This request will fail if a
specified job is not in the QUEUED/POOLED state. Implementation of this service is optional.
Table 15 PRJobSetStartMethod Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList M - (List of) PRJobID
PRProcessStart M - Indicates auto or manual start.
PRStatus - M Indicates success or failure.
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10.4.10 PRGetAllJobs — This message shall return a list containing job identifiers and the associated states of those
jobs for all jobs which have not completed.
Table 16 PRGetAllJobs Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList - M
10.4.11 PRGetSpace — This message shall return the remaining number of jobs that can be created for the
processing resource.
Table 17 PRGetSpace Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobSpace - M
10.4.12 PRSetMtrlOrder — Request the Processing Management Service to use a specific strategy for the order in
which materials are processed.
Table 18 PRSetMtrlOrder Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRMtrlOrder M - Sets the value for the strategy the service will use.
PRAck - M Indicates success or failure.
10.5 Mapping of Semantics to Syntax — Table 20 provides the correspondence between the message semantics
defined in Section 8.2 and the syntax as defined in Section 10.4. The use of ‘.req’, ‘.rsp’, or ‘.nfy’ suffixes shows the
direction of message flow. ‘.req’ is a message request from the service user to the service provider. ‘.rsp’ is a
response message from the service provider to the service user. ‘.nfy’ is a notification from the service provider to
the service user.
Table 19 Correspondence of Message Semantics to Syntax
Parameter Comment
PR Job Create PRJobCreate.req
PR Job Create Acknowledge PRJobCreate.rsp
PR Job Setup PRJobAlert.nfy (PRJobMilestone = PR Job Setup)
PR Job Processing PRJobAlert.nfy (PRJobMilestone = PR Job Processing)
PR Job Processing Complete PRJobAlert.nfy (PRJobMilestone = PR Job ProcessingComplete)
PR Job Complete PRJobAlert.nfy (PRJobMilestone = PR Job Complete)
PR Job Waiting for Material PRJobEvent.nfy (PREventID = Waiting for Material)
PR Job State Changes PRJobEvent.nfy (PREventID = Process Job State Change)
PR Job Abort PRJobCommand.req (PRCmdName = ABORT)
PR Job Stop PRJobCommand.req (PRCmdName = STOP)
PR Job Cancel PRJobCommand.req (PRCmdName = CANCEL)
PR Job Pause PRJobCommand.req (PRCmdName = PAUSE)
PR Job Resume PRJobCommand.req (PRCmdName = RESUME)
PR Job Waiting for Start PRJobAlert.nfy (PRJobMilestone = PR Job Waiting for Start)
PR Job Start Process PRJobCommand.req (PRCmdName = STARTPROCESS)
PR Job Start Acknowledge PRJobCommand.rsp (PRSatus.PRAck = TRUE)
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11 Variable Data
11.1 The purpose of this section is to define the list of variable data requirements for Processing Management
compliant equipment. Values of these variables are available to the host via collection event reports.
11.2 Variable Data Definitions — The identifier and all other attributes of the ProcessJob object shall be available
for inclusion in event reports associated with it. The following attributes are most likely to be used: PRJobID,
PRJobState, RecID, RecVariableList and PRMtlNameList.
12 Compliance
12.1 Processing management defines the standard services available to achieve job-based material processing in
equipment. The capabilities supported allow flexible management of automated processing encompassing many
process types. Only a subset of these capabilities may be needed for a particular implementation.
12.2 Fundamental Requirements — All processing agent implementations shall support the fundamental
requirements. These have been indicated in the appropriate sections of the document and are listed together below:
Create and execute a single process job to completion, given:
a single material of the appropriate type, uniquely identified.
a unique recipe identifier for which the corresponding recipe can be found.
Detect and report the success or failure of the process job, indicating complete, partial, or non-processing of the
material.
Support Abort of the process job at all times, immediately ceasing activity and terminating the process job.
Maintain the data of required process job attributes indicated in Table 2.
Reject requests with incomplete or invalid parameters.
Reject requests for capabilities not supported.
Implement the services and messages with the exception of those required for the Optional capabilities.
12.2.1 Satisfying fundamental requirements may not provide sufficient flexibility or performance for some
equipment. In such cases, fundamental functionality should be supplemented by optional capabilities as appropriate
to the needs of the system.
12.3 Additional Capabilities — Optional capabilities defined or enabled in this standard include:
Processing resource pre-conditioning and post-conditioning.
Stop, Pause, and Resume of a process job.
Manual process start.
Process job queuing and Cancel on a queued job.
Process tuning.
Processing of material groups.
Multiple concurrent process jobs.
Multiple consecutive process jobs in a single visit.
Process job with no material.
Notification of waiting for material.
Implement PRJobCreateEnh and PRJobMultiCreate.
Report the process job milestones: Setup, Processing, Processing Complete, and Job Complete.