semi合集-English.pdf - 第1182页

SEMI E5-1104 © SEMI 1982, 2004 124 Stream,Function Name (Mnemonic) Direction S6,F13 Annotated Event Report Send (AERS) M,H<-E,reply Description This message is the same as S6F11 with th e exc eption that VID’s are sen…

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SEMI E5-1104 © SEMI 1982, 2004 123
Stream,Function Name (Mnemonic) Direction
S6,F11 Event Report Send (ERS) M,H<-E, reply
Description
The purpose of this message is for the equipment to send a defined, linked, and enabled group of reports to the host upon the
occurrence of an event (CEID).
If S6,F11 is Multi-block, it must be preceded by the S6,F5/S6,F6 Inquire/Grant transaction.
Structure
L,3
1. <DATAID>
2. <CEID>
3. L,a
1. L,2
1. <RPTID
1
>
2. L,b
1. <V
1
>
.
.
b. <V
b
>
.
.
a. L,2 report a
1. <RPTIDa>
2. L,c #Vs this report
1. <V
1
>
.
.
c. <V
c
>
Exception
If there are no reports linked to the event a ‘null’ report is assumed. A zero-length list for # of reports means there are no reports
linked to the given CEID.
Stream,Function Name (Mnemonic) Direction
S6,F12 Event Report Acknowledge (ERA) S,H->E
Description
Acknowledge or error
Structure
<ACKC6>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 124
Stream,Function Name (Mnemonic) Direction
S6,F13 Annotated Event Report Send (AERS) M,H<-E,reply
Description
This message is the same as S6F11 with the exception that VID’s are sent with data.
If S6,F13 is Multi-block, it must be preceded by the S6,F5/S6,F6 Inquire/Grant transaction.
Structure
L,3
1. <DATAID>
2. <CEID>
3. L,a
1. L,2
1. <RPTID
1
>
2. L,b
1. L,2
1. <VID
1
>
.
.
b. L,2
1. <VID
b
>
b. <V
b
>
.
.
a. L,2
1. <RPTID
a
>
2. L,c
1. L,2
1. <VID
1
>
2. <V
1
>
.
.
c. L,2
1. <VID
c
>
2. <V
c
>
Exception
If there are no reports linked to the event a ‘null’ report is assumed. A zero-length list for # of reports means there are no reports
linked to the given CEID.
Stream,Function Name (Mnemonic) Direction
S6,F14 Annotated Event Report Acknowledge (AERA) S,H->E
Description
Acknowledge or error
Structure
<ACKC6>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 125
Stream,Function Name (Mnemonic) Direction
S6,F15 Event Report Request (ERR) S,H->E, reply
Description
The purpose of this message is for the host to demand a given report group from the equipment.
Structure
<CEID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F16 Event Report Data (ERD) M,H<-E
Description
Equipment sends reports linked to given CEID to host.
Structure
Identical to structure of S6,F11.
Exception
A zero-length item means there are no reports linked to the given CEID.
Stream,Function Name (Mnemonic) Direction
S6,F17 Annotated Event Report Request (AERR) S,H->E,reply
Description
Same as S6,F15, but requests annotated reports.
Structure
<CEID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F18 Annotated Event Report Data (AERD) M,H<-E
Description
Equipment sends annotated reports linked to given CEID.
Structure
Same as S6,F13.
Exception
A zero-length item means there are no reports linked to the given CEID.
Stream,Function Name (Mnemonic) Direction
S6,F19 Individual Report Request (IRR) S,H->E,reply
Description
The purpose of this message is for the host to request a defined report from the equipment.
Structure
<RPTID>
Exception
None