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SEMI E52-0703 © SEMI 1995, 2003 13 Code Gas Name Symbol Formula Synonym Ref 103 Difluorochloroethane C2H3ClF2 CF 2 ClCH 3 F-142B, R-142B 1 82 Difluoroethane C2H4F2 CH 3 CHF 2 Ethylidene Fluoride, R-152A 1 64 Difluoroethy…

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SEMI E52-0703 © SEMI 1995, 2003 12
Code Gas Name Symbol Formula Synonym Ref
46 Carbonyl Fluoride CF2O CF
2
O 1
34 Carbonyl Sulfide COS COS 1
19 Chlorine Cl2 Cl
2
1
201 Chlorine Dioxide ClO2 ClO
2
2
202 Chlorine Pentafluoride ClF5 ClF
5
2
77 Chlorine Trifluoride ClF3 ClF
3
1
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2
119 Chloropentafluoroethane C2ClF5 ClCF
2
CF
3
F-115, R-115 1
205 Chlorosilane SiH3Cl SiH
3
Cl 2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
74 Chlorotrifluoromethane CClF3 ClCF
3
F-13, R-13 1
107 Cisbutene C4H8 CH
3
CH=CHCH
3
Cis-2-Butene 2
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
37 Cyanogen Chloride ClCN ClCN 1
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
61 Cyclopropane C3H6 C
3
H
6
1
14 Deuterium D2 H
2
2
D2 2
350 Deuterium Ammonia ND3 ND
3
3
244 Deuteriumsilane SiD4 SiH
2
4
2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
58 Diborane B2H6 B
2
H
6
1
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
130 Dibromotetrafluorethane C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2 1
84 Dichlorodifluoromethane CCl2F2 CCl
2
F
2
F-12, R-12 1
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
265 Dichloromethane CH2Cl2 CH
2
Cl
2
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
125 Dichlorotetrafluoroethane C2Cl2F4 F
3
CCCl
2
F F-114, R-114 1
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
154 Diethylsilane C4H12Si (C
2
H
5
)
2
SiH
2
2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
232 Difluoroamidogen NF2 NF
2
2
SEMI E52-0703 © SEMI 1995, 2003 13
Code Gas Name Symbol Formula Synonym Ref
103 Difluorochloroethane C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B 1
82 Difluoroethane C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A 1
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
160 Difluoromethane CH2F2 CH
2
F
2
Methylene Fluoride 2
134 Difluorosilane SiH2F2 SiH
2
F
2
10
217 Digermane Ge2H6 Ge
2
H
6
2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
122 Dimethylpropane C5H12 (CH
3
)
4
C Neopentane 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
281 Diphenylmethan-4,4' -diisocyanat C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
97 Disilane Si2H6 Si
2
H
6
2
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
54 Ethane C2H6 CH
3
CH
3
1
348 Ethane, 1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
136 Ethanol C2H6O CH
3
CH
2
OH 2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
93 Ethyl Acetylene C4H6 CH
3
CH
2
C=CH 1
75 Ethyl Chloride C2H5Cl C
2
H
5
Cl Chloroethane orEthane, Chloro or
Ethyl Chloride
1
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
174 Ethylbenzene C8H10 C
6
H
5
C
2
H
5
2
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
18 Fluorine F2 F
2
1
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
223 Fluoroacetylene C2HF FC=CH 2
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1
SEMI E52-0703 © SEMI 1995, 2003 14
Code Gas Name Symbol Formula Synonym Ref
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
43 Germane GeH4 GeH
4
1
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3 - Dioxolane 3
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
137 Halothane C2HBrClF3 BrClHCCF
3
6
1 Helium He He 1
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
192 Hexafluorobenzene C6F6 C
6
F
6
2
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
118 Hexafluoroethane C2F6 F
3
CCF
3
F-116, Perfluoroethane 1
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
139 Hexamethyldisilane C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS 3
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
127 Hexane C6H14 CH
3
(CH
2
)
4
CH
3
2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
50 Hydrazine N2H4 H
2
NNH
2
2
269 Hydrazoic Acid HN3 HN
3
1
7 Hydrogen H2 H
2
1
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
24 Hydrogen Cyanide HCN HCN 1
12 Hydrogen Fluoride HF HF 1
17 Hydrogen Iodide HI HI 1
23 Hydrogen Selenide H2Se H
2
Se 1
22 Hydrogen Sulfide H2S H
2
S 1
229 Hydrogen telluride H2Te H
2
Te 2
90 Intentionally Left Blank
92 Intentionally Left Blank
175 Intentionally Left Blank