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SEMI F67-1101 © SEMI 2001 5 8.3.7.2 When the im p ur ity lev el is i n th e ra ng e of th e APIMS or ultratrace analytical instrumentation, Close V13 and Open V12. Close V 9 and V10, O p en V11. 8.3.7.3 Mo nitor impurity…

SEMI F67-1101 © SEMI 2001 4

8.2.2.2 An impurity analyzer is used to measure higher

concentrations of impurities such as found in the test

gas.

8.2.2.3 Electronically controlled mass flow controllers

are used to accurately blend the impurity challenge

level.

8.2.2.4 Data collection equipment is used to gather

output from the ultratrace analytical instrumentation.

8.2.2.5 All instruments used should be calibrated

regularly, according to manufacturer’s specifications.

8.2.3 Test Set-up and Schematic

8.2.3.1 Assemble the test setup according to Figure 1.

Do not install the DUT until a purge flow is established

through MFC1.

8.2.3.2 For the test set-up, pure gas is blended with

challenge gas to create a test gas mixture.

8.2.3.3 The DUT is connected, purged per the

manufacturer’s recommendation, positioned with the

appropriate attitude (if required by the manufacturer),

and heated (if required by manufacturer) under pure gas

flow.

8.2.3.4 Challenge gas flow is introduced and the

impurity analyzer measures the impurity levels. If

appropriate, the APIMS or other ultratrace analytical

instrumentation may be used to measure the test gas

while the test gas bypasses the DUT

. See Section 9 on

Exposure Precautions.

8.2.3.5 Measure and record the test gas concentration

for the desired impurity.

8.2.3.6 Following measurement of the test gas, the

bypass should be purged with pure gas to ensure

impurity removal from the section of the test set-up that

is downstream of the DUT.

8.3 Test Procedures — Refer to Figure 1.

8.3.1 Use of the impurity analyzer is recommended to

protect the APIMS or ultratrace analytical

instrumentation from high impurity concentrations

which may harm the instrument. The test may be

conducted without the impurity analyzer at the risk of

exposing the APIMS or ultratrace analytical

instrumentation to high impurity concentrations.

8.3.2 Analytical Instrumentation Setup

8.3.2.1 Set up and calibrate the analytical

instrumentation (APIMS or ultratrace analytical

instrumentation and impurity analyzer) according to

manufacturer specifications. This includes establishing

the appropriate flow rate to the instrument.

8.3.2.2 Acquire zero data to establish the analytical

instrumentation baseline and stability prior to starting

the test.

8.3.3 Establish flow of pure gas through the manifold

bypass:

8.3.3.1 Start with all valves closed except purge gas to

analytical instrumentation (V11 and V13 open).

8.3.3.2 Open V1 and adjust R1 to the suggested

operating pressure range of 275–415 kPa (40–60 psig).

8.3.3.3 Open V2, V8, V9 and adjust R3 to provide

appropriate backpressure for operation of the APIMS or

other ultratrace analytical instrumentation. R3 will vent

excess gas providing the volume challenge to the DUT.

Set MFC1 to the appropriate flow rate. Readjust R1

and R3 to obtain the proper operating conditions.

8.3.4 Monitor drydown of the manifold bypass:

8.3.4.1 Close V11 and Open V10.

8.3.4.2 Purge the bypass manifold until the impurity

level is in the range of the APIMS or ultratrace

analytical instrumentation.

8.3.4.3 Close V13 and Open V12. Close V10 and

Open V11.

8.3.4.4 Purge the bypass manifold until the moisture

impurity level at the APIMS or ultratrace analytical

instrumentation is below 1.0 ppb.

8.3.5 Re-isolate the APIMS or ultratrace analytical

instrumentation:

8.3.5.1 Close V12 and Open V13. Maintain a constant

purge to the analytical instrumentation.

8.3.6 Install the DUT, Purging with Pure Gas:

8.3.6.1 Open V6. Remove the DUT inlet face-seal

connection. Quickly install the DUT inlet. Remove the

DUT outlet face-seal connection and install the DUT

outlet. Open V7.

8.3.6.2 Isolate the manifold bypass, directing all flow

through the DUT, close V8 and V9.

8.3.6.3 Adjust R1 and R3 until P1 measures the stated

purifier operating pressure.

8.3.6.4 Purge the DUT per the manufacturer’s

recommendation. If required, heat the DUT per

manufacturer’s recommendation.

8.3.7 Monitor the impurity level at the outlet of the

DUT until stable:

8.3.7.1 Initial impurity monitoring may be done with

the impurity analyzer. Close V11, open V9 and V10.

SEMI F67-1101 © SEMI 20015

8.3.7.2 When the impurity level is in the range of the

APIMS or ultratrace analytical instrumentation, Close

V13 and Open V12. Close V9 and V10, Open V11.

8.3.7.3 Monitor impurity level until stable.

8.3.8 Initiate Impurity Challenge:

8.3.8.1 Isolate the DUT and APIMS or ultratrace

analytical instrumentation. Close V7 and V12, open

V13.

8.3.8.2 Open V3 and adjust R2 to the suggested

operating pressure range of 275–415 kPa (40–60 psig).

Open V5 and set MFC2 to the desired flow. (See

Appendix 1 to determine the desired flow for MFC2).

8.3.8.3 Verify test gas impurity. Open V4, V8, and

V10 and then close V5 and V11, supplying test gas to

the impurity analyzer. Adjust R2 as necessary to

maintain appropriate pressure for supplying MFC2.

Monitor test gas impurity until stable and verified to

theoretical impurity value (See Appendix 1).

8.3.8.4 Initiate test. Direct input test gas through the

DUT to the APIMS or ultratrace impurity analyzer,

Open V6 and V7. Open V12 and close V13. Isolate

impurity analyzer, Close V8 and V10. Open V11.

8.3.8.5 Zero test gas flow totalizers (Pure Gas MFC1

and challenge gas through MFC2) beginning Purifier

Capacity Test.

8.3.9 Determination of purifier capacity:

8.3.9.1 The test will require several weeks or months

depending on the purifier’s capacity for retention of and

the concentration of the impurity.

8.3.9.2 The test may be done on newly activated media

or may be done using existing media that has been

regenerated. The test may be destructive to the DUT.

8.3.9.3 Constant monitoring of the purifier effluent

over the duration of the test is preferred. However,

periodic monitoring, e.g. every few hours is sufficient.

8.3.9.4 The test gas can be periodically monitored at

the impurity analyzer by closing V11 and opening V8

and V10. If significant, ensure that flow volume to

impurity analyzer during this time is subtracted from

total volume input through DUT. In addition,

instrument calibration should be monitored as

recommended by the manufacturer.

8.3.9.5 Monitor trends in outlet purity until the

breakthrough point for the impurity is detected. Time,

liters of gas, and outlet purity should be recorded.

8.4 Repeat test for each new impurity to be analyzed

using a new or regenerated DUT.

9 Exposure Precautions

9.1 The APIMS or ultratrace analytical instrument

should not be exposed to high levels of impurities.

After installation of the purifier, it should be purged

well, per the manufacturer’s recommendation. A

typical recommendation might be to purge a minimum

of 150 bed volumes before directing the flow to the

APIMS.

10 Calculation of Purifier Capacity

10.1 Use the following formula to calculate Purifier

Capacity:

10.2 (Test Duration (min)) × (Test Flow Rate slpm) =

Total Liters Test Gas (TLTG)

10.3 Impurity(liters) = (TLTG) × ppm × 10

-6

10.4 Purifier Capacity = (Total Impurity

(liters)/(Purifier Volume(liters))

10.5 Purifier Capacity is reported as total liters of each

given impurity per liter purifier, and is a dimensionless

number.

11 Reporting Results

11.1 The following test conditions should be reported:

11.1.1 Date and time of test,

11.1.2 Operator,

11.1.3 Pure gas flow rate (slpm),

11.1.4 Challenge gas flow rate (sccm),

11.1.5 Test pressure kPa (psig or psia),

11.1.6 DUT operating temperature (° C),

11.1.7 Purifier manufacturer, model, and serial

number, and volume,

11.1.8 Ultratrace analytical instrumentation used,

11.1.9 Test gas impurities and levels, and

11.1.10 Calibration certificates for the mass flow

devices, pressure gauges and ultratrace analytical

instrumentation.

12 Related Documents

SEMI F30 — Start-up and Verification of Purifier

Performance Testing for Trace Gas Impurities and

Particles at an Installation Site

SEMI F43 — Test Method for Determination of

Particle Contribution by Point-Of-Use Purifiers

NOTE 3: Unless otherwise indicated, all documents cited

shall be the latest published versions.

Purge Gas

DUT

Pure Gas

(>9N Purity)

APIMS

Ultratrace

Analytical

Instrumentation

Impurity Analyzer

Legend

DUT = Device Under Test

P1 = Test Pressure

R1 = Pure Gas 0–100 psig Regulator

R2 = Challenge Gas 0–100 psig Regulator

R3 = Vent Gas 0–100 psig Back Pressure Regulato

V1 = Pure Gas Source Isolation Valve

V2 = Pure Gas System Isolation Valve

V3 = Challenge Gas Source Isolation Valve

V4 = Challenge Gas System Isolation Valve

V5 = Challenge Gas Vent Isolation Valve

Challenge Gas

(~1% Impurity)

V6 V7

Vent

V10

V11

MFC1

6 = DUT Inlet Isolation Valve

V7 = DUT Outlet Isolation Valve

V8 = DUT Bypass Inlet Isolation Valve

V9 = DUT Bypass Outlet Isolation Valve

V10 = Impurity Analyzer Sample Isolation Valve

V11 = Impurity Analyzer Purge Gas Isolation Valve

V12 = APIMS/UAI Sample Isolation Valve

V13 = APIMS/UAI Purge Gas Isolation Valve

MFC1 = Pure Gas Mass Flow Controller

MFC2 = Challenge Gas Mass Flow Controller

V13

V12

MFC2

Figure 1

Suggested Point of Use Purifier Capacity Test Setup