semi合集-English.pdf - 第1707页

SEMI E40-0705 © SEMI 1995, 2005 19 Table 6 Parameter Dictionary, Part 2 Parameter Name Definition Form: Possible Values PRJobID The unique identifier for a process job. It can be a ccessed as the ObjID attribute of the p…

100%1 / 7923
SEMI E40-0705 © SEMI 1995, 2005 18
Parameter Name Definition Form: Possible Values
ErrorCode Contains the code for the specific error found. Enumerated:
PRJobCreate, PRJobCreateEnh,
PRJobMultiCreate:
Parameters improperly specified
Insufficient parameters specified
Unsupported option requested
Busy (no queueing or queue full)
PRJobCreateEnh, PRJobMultiCreate:
Object identifier in use
PRJobCommand:
Parameters improperly specified
Insufficient parameters specified
Unsupported option requested
Command not valid for current state
PRJobComplete:
No material altered
Material partially processed
All material processed
Recipe specification related error
Failed during processing
Failed while not processing
Failed due to lack of material
Job aborted
Job stopped
Job cancelled
ErrorText Text in support of the error code. Text
PRAck Indicates whether the activity was successful. Boolean:
TRUE — Successful
FALSE — Unsuccessful
PRCmdName Indicates which process job command to perform. Text:
ABORT
STOP
CANCEL
PAUSE
RESUME
STARTPROCESS
PREventData Data related to the specific event. Varies per parameter reported
PREventID Identifier of the specific event which occurred. Enumerated:
Unique collection event ID for
Waiting for Material and Process Job State
Change events.
SEMI E40-0705 © SEMI 1995, 2005 19
Table 6 Parameter Dictionary, Part 2
Parameter Name Definition Form: Possible Values
PRJobID The unique identifier for a process job. It can be accessed as
the ObjID attribute of the process job. The host may provide
this identifier to the processing resource. In this case, the host
must guarantee uniqueness of job identifiers for all the
process jobs in the PROCESS JOB STATE in the equipment.
Text
PRJobList List of process job identifiers and their states. List of
Structure
PRJobID
PRJobState
PRJobMilestone Process job milestone. Enumerated:
PR Job Setup
PR Job Processing
PR Job Processing Complete
PR Job Complete
PR Job Waiting for Start
PRJobSpace Used to indicate the number of jobs that can currently be
created for the processing resource.
Integer
PRJobState A unique state of the process job according to the process job
state model.
Enumerated:
QUEUED/POOLED
SETTING UP
WAITING FOR START
PROCESSING
PROCESS COMPLETE
PAUSING
PAUSED
STOPPING
ABORTING
STOPPED
ABORTED
PRMtlName Textual identifier of the material being processed. Text: Unique for each material with respect
to the processing agent.
PRMtlType Identifies the type of material being processed. Enumerated
PRMtrlOrder Defines the order by which material in the process jobs
material list will be processed.
Enumeration:
ARRIVAL – process whichever material
first arrives.
OPTIMIZE – process in an order that
maximizes throughput.
LIST – follow the order in the list.
PRPauseEvent Variable containing information which is transferred to the
corresponding PRJob attribute. Shall conform to event
identifiers as defined in either SEMI E30 or E53.
(list of)
text
PRProcessStart Indicates that the processing resource start processing
immediately when ready.
Boolean:
TRUE – Automatic Start
FALSE – Manual Start
PRRecipe Specification of the process job recipe. Structure composed of:
PRRecipeMethod
RecID
(List of) RecipeVariable
PRRecipeMethod Indication of recipe specification type, whether tuning is
applied and which method is used.
Enumerated:
Recipe only
Recipe with VariableTuning
SEMI E40-0705 © SEMI 1995, 2005 20
Parameter Name Definition Form: Possible Values
PRStatus Reports the acceptance or rejection of a requested operation. Structure composed of:
PRAck
(List of) Status
RecID Identifier of the recipe applied. Text:
Unique with respect to the processing agent.
RecipeVariable Variables supporting a recipe method. Structure composed of:
RecipeVarName
RecipeVarValue
RecipeVarName The name of the recipe variable. Text:
Depends on recipe
RecipeVarValue Value of the recipe variable. Depends on variable
Status Reports any errors found. Structure composed of:
ErrorCode
ErrorText
Timestamp Event date and time. Text:
yyyymmddhhmmsscc
10.4 Service Detail — The tables below define the parameters for each service. In some cases, parameters have
additional detail which is defined in the parameter definition section.
10.4.1 PRJobCreate
Table 7 PRJobCreate Service Detail
PRJobCreate Service Detail Section
Parameter Req/Ind Rsp/Cnf Comment
PRJobID - M The processing agent assigns the unique identifier which is used in all
subsequent process job communications.
PRMtlType M -
(List of) PRMtlName M - All material shall be of the same material type. This is an ordered list and
indicates the order in which the process job should process the material, if
it is single wafer processing equipment.
PRRecipe M -
PRProcessStart M - Indicates auto or manual start.
PRStatus - M
PRRecipe Parameter Detail Section
PRRecipeMethod M -
RecID M - The process job recipe identifier shall be unique within the domain of the
processing agent.
(List of) Recipe Variable C - Parameters required depend on the recipe method selected.
PRStatus Parameter Detail Section
PRAck - M Indication of acceptance to perform the job.
(List of) Status - C Error information, required if PRAck is unsuccessful.