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SEMI S2-0703a E © SEMI 1991, 2004 93 R15-6.3 Annual and semi-annual maintenance should be carried out by competent personnel with ade quate training for the tasks in hand.

SEMI S2-0703a

the field review should concentrate on ensuring that

components are located so that they can see the hazard

without obstruction, including clear vision panels,

which may prevent detector from “seeing” the flame.

R15-3.5 Similarly, detectors need to be sited so that

they will not experience normal process temperatures,

radiation or be exposed to chemical, liquid or particles

that could result in an accidental activation.

R15-3.6 Where linear heat detection cable is used it

should be located where it will not be exposed to levels

of ambient or process related heat that could trigger an

alarm signal. In addition, the cable should be securely

attached to prevent it dislodging and coming into

contact with hot surfaces.

R15-3.7 Nozzle locations in many suppression systems

can be critical to ensuring functionality, reliability and

safety. For example, CO

nozzles incorrectly

positioned can result in chemical splashing or

dislodging product or quartzware. If nozzles are

exposed to chemical action including corrosive

chemicals, it is important that the materials are resistant

to the chemical

R15-3.8 Where automatic sprinkler heads are used, the

fusible link should be adequately protected from

chemical and mechanical attack.

R15-4 Commissioning Tests

R15-4.1 All installations should undergo a thorough

commissioning and acceptance test conducted by the

installer and witnessed by the owner or owner’s

representative.

R15-4.2 Functional Tests are essential, but not

sufficient to ensure that system will operate as in

tended. The types of problems that can be picked up by

functional testing are:

R15-4.2.1 Inability of detection system to detect as

intended,

R15-4.2.2 Inability of control system to receive signal

from individual detectors, and

R15-4.2.3 Inability of alarm panel to initiate system

discharge or send alarm signals to connected devices

and safety systems, e.g.,

 local or remote alarm panels,

 sounders & warning devices, and

 interlocks to equipment shutdown and safety

systems, EMO.

R15-4.3 Discharge Testing is the only way that we can

ensure that that a system will fulfill its intended

function. The types of problems that can be picked up

by discharge testing are:

R15-4.3.1 Lack of extinguishing agent

R15-4.3.2 Inability to transfer agent from supply to

nozzles due to:

 Blockages arising from incorrect equipment,

 Incomplete piping, loose fittings & supports, and

 Installation, design problems (e.g., icing up of CO

pipes or nozzles).

R15-4.4 In many cases discharge testing within the

cleanroom environment is not considered acceptable or

practical. Accordingly, alternatives such as type testing

can prove that the design will provide the necessary

protection, but may need to be supplemented by a more

rigorous commissioning test of the final systems. Type

testing would involve the installation and discharge

testing of a system on a tool during manufacture or on a

mock up of the tool. The aim would be to prove that

distribution pipework and nozzles have been correctly

designed and that the concentration of agents and

distribution patterns from nozzles is acceptable. This

would be supplemented by additional tests on each

installation, including pressure tests of pipework and

“puff” tests to verify pipework integrity.

R15-5 Burn In

R15-5.1 In order to avoid unnecessary discharges, a

period of burn-in for the detection system is advisable.

This involves the detection system operating, enabling

detection of fires and initiation of alarms, but the

detection is not interlocked to shut down the process

equipment or initiate a discharge.

R15-5.2 A period of days or weeks may be appropriate

depending on the effect of an accidental activation of

the system in terms of interruption to processing,

damage to product or contamination of the

environment.

R15-6 Maintenance & Servicing

R15-6.1 Once systems are installed and commissioned

it is important that the routine inspection and

maintenance procedures recommended by

manufacturers and those required by codes and

standards, are adequately implemented.

R15-6.2 The inspection frequencies may need to be

modified if the ambient conditions can adversely affect

the protection systems. For example, sprinkler heads

protecting corrosive fume exhaust ducts may need to be

inspected weekly or monthly until the appropriate

frequency for that particular system can be determined.

SEMI S2-0703a

R15-6.3 Annual and semi-annual maintenance should

be carried out by competent personnel with adequate

training for the tasks in hand.

SEMI S2-0703a

DELAYED REVISIONS SECTION 1 (EFFECTIVE JULY 1, 2006)

LASER MODIFICATIONS TO SEMI S2

NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the

SEMI Environmental Health and Safety Committee, but is not immediately effective. The provisions of this

material are not an authoritative part of the document until their effective date. The main body of SEMI S2-

0703 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may

optionally be applied prior to the effective date, providing they do not conflict with portions of the

authoritative version other than those that are to be revised or replaced as part of the deferred revision, and

are labeled accordingly.

NOTICE: Unless otherwise noted, all material to be added shall be underlined

, and all material to be deleted shall

be struck through

D1-1 Revisions to Section 4 (Referenced Standards) — OPTIONAL Before Effective Date

D1-1.1 Addition of the following in alphanumeric order to Section 4.5 (IEC Standards):

IEC 60825-1 — Safety of Laser Products, Part 1: Equipment Classification, Requirements, and User’s Guide

D1-1.2 Addition of the following in alphanumeric order to Section 4:

4.# US Code of Federal Regulations

21CFR Parts 1000-1050 — Food and Drug Administration / Center for Devices and Radiological Health

(FDA/CDRH), Performance Standards for Electronic Products, Title 21 Code of Federal Regulations, Parts 1000-

1050

D1-2 Revisions to Section 5 (Terminology) — OPTIONAL Before Effective Date

D1-2.1 Addition of the following in alphabetical order to Section 5.1 (Abbreviations & Acronyms):

5.1.# MPE — maximum permissible exposure

5.1.# NOHD — nominal ocular hazard distance

D1-2.2 Addition of the following in alphabetical order to Section 5.2 (Definitions):

5.2.# maximum permissible exposure (MPE) – Level of laser radiation to which, under normal circumstances,

persons may be exposed without suffering adverse effects.

5.2.# nominal ocular hazard distance (NOHD) – Distance at which the beam irradiance or radiant exposure equals

the appropriate corneal maximum permissible exposure (MPE).

D1-3 Revisions to Section 26 (Lasers) — OPTIONAL Before Effective Date

D1-3.1 Revision of the existing Section 26 (Lasers) as shown below:

26 Lasers

26.1 Equipment containing lasers

should be properly identified with a laser product classification. This

classification should be based on the laser radiation level energy accessible during operation, per the applicable

standard or regulation. The laser product classification, applicable standard, and the certification file number (where

appropriate) should be documented on a Laser Data Sheet (format in Part 1 of Appendix 7) that is provided to the

user.

NOTE122: A Class 1 label may be required in some jurisdictions, but is not currently required in the United States.

26.1.1 The laser energy (or power), wavelength, and temporal mode (continuous wave or pulsed) should be

identified in the documentation to the user.

25 United States Food and Drug Administration/ Center for Devices and Radiological Health (FDA/CDRH). Available from FDA/CDRH

Website: http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/cfrsearch.cfm