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SEMI E58-0703 © SEMI 1997, 2003 2 10.4 ARAMS Sym p tom Table 11 ARAMS Data 11.2 Status Inform ation 11.2.3 ARAMSI nfo 11.2.4 ARAMSState 11.2.5 ARAMSText 11.2.6 Clock 11.2.7 CycleCtr 11.2.8 DowntimeAlarm 11.2.9 DowntimeAl…

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SEMI E58-0703 © SEMI 1997, 2003 1
SEMI E58-0703
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on October 19, 2000. Initially available at www.semi.org
January 2001; to be published March 2001. Originally published June 1997.
NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of
SEMI E58.1.
CONTENTS
1 Purpose
1.2 Background and Motivations
2 Scope
3 Referenced Documents
4 Terminology
4.1 Acronyms
4.2 General Terms
4.3 Data Types
5 Basic Requirements
6 Conventions
6.1 State Model Methodology
6.2 Object Attribute Representation
6.3 Service Message Representation
6.3.1 Service Resource Definition
6.3.2 Service Parameter Dictionary
6.3.3 Service Message Definition
7 Overview
8 State Models
8.2 SEMI E10 Equipment States
8.3 ARAMS State Model Definition
8.3.1 ARAMS State Model Diagram
8.3.2 Descriptions of ARAMS States
8.3.2.1 TOTAL TIME
8.3.2.2 MANUFACTURING
8.3.2.3 PRODUCTIVE
8.3.2.4 STANDBY
8.3.2.5 ENGINEERING
8.3.2.6 UNSCHEDULED DOWNTIME
8.3.2.7 SCHEDULED DOWNTIME
8.3.2.8 NON-SCHEDULDED TIME
8.3.3 ARAMS Substates
8.3.4 State Transitions
8.4 General Equipment Operations Model
8.4.2 State Definitions
8.4.2.1 POWER-OFF
8.4.2.2 POWER-ON
8.4.2.3 INITIALIZING
8.4.2.4 READY
8.4.2.5 IDLE
8.4.2.6 BUSY
8.4.3 General Equipment Operations Model
Table of Transitions
8.5 State Model Relationships
8.5.2 IDLE and BUSY
8.5.3 Non-Manufacturing States
9 ARAMS Substate Codes
9.2 Reserved Codes
9.3 Additional Codes
9.4 Valid ARAMS Substate Code
9.5 Manufacturing Code
10 ARAMS Tables
10.2 Definition of Tables
10.2.1 Table Types and Identifiers
10.2.2 Table Row Definition
10.2.3 Table Attributes
10.2.4 Additional Requirements
10.3 ARAMS Substate Table
SEMI E58-0703 © SEMI 1997, 2003
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10.4 ARAMS Symptom Table
11 ARAMS Data
11.2 Status Information
11.2.3 ARAMSInfo
11.2.4 ARAMSState
11.2.5 ARAMSText
11.2.6 Clock
11.2.7 CycleCtr
11.2.8 DowntimeAlarm
11.2.9 DowntimeAlarmText
11.2.10 DowntimeData
11.2.11 LastPowerdown
11.2.12 PowerdownTime
11.2.13 PrdState
11.2.14 PrevARAMSState
11.2.15 SymptomID
11.2.16 SymptomText
11.3 Constant Data
11.3.1 EqpModel
11.3.2 EqpSerialNum
11.4 User-Configurable Data
11.4.1 EngInterrupt (optional)
11.4.2 EngRecovery (optional)
11.4.3 EqpName (required)
11.4.4 PowerupState (optional)
11.4.5 PrdRecovery (optional)
11.4.6 SbyRecovery (optional)
11.4.7 SubstateSelect (optional)
11.5 Accumulators
11.5.2 ARAMSAccumReset
11.5.3 ARAMSTimestamp
11.5.4 EngTime
11.5.5 InterruptionPrd
11.5.6 InterruptionTotal
11.5.7 NSTime
11.5.8 PrdTime
11.5.9 SbyTime
11.5.10 SDTime
11.5.11 UDTime
12 Events and Pre-Defined Event Reports
13 Object Services Compliance
13.1 Equipment Object
13.2 Table Objects
14 Human Interface Requirements
14.1 Data Access
14.2 Selection of an ARAMS State/Substate
14.3 User-Defined ARAMS Symptom Tables
14.4 Table Access
14.5 Color Codes
15 Services
15.2 Services Parameter Dictionary
15.3 TableSend
15.4 TableRequest
15.5 ARAMSStateChange
15.6 ResetAccumulators
16 ARAMS Behavioral Requirements
16.1 ARAMS State Transitions
16.2 Powerup Entry
16.3 Powerup and Powerdown States
16.3.2 PowerupState
16.4 User-Initiated State Change Requests
16.5 Production and Standby Substates
16.6 Equipment-Selected Substates
16.7 Equipment-Detected Exceptions
16.7.4 Fault Detection in ENGINEERING
16.8 Equipment-Initiated Recovery
16.8.2 Automatic Recovery
17 Requirements for Compliance
17.1 Fundamental Requirements
17.1.1 Event Notification
17.1.2 Clock Services
17.1.3 Read-Only Data Access
17.1.4 User-Configurable Data Access
17.1.5 Alarm/Exception Management
SEMI E58-0703 © SEMI 1997, 2003 3
17.1.6 ARAMS State Model
17.1.7 ARAMS State Transition Notification
17.1.8 ARAMS Substate Codes
17.1.9 ARAMS Status Data
17.1.10 ARAMS Constant Data
17.1.11 ARAMS Event Report Data
17.1.12 Host State Change Request
17.1.13 Estimation of Powerdown Time
17.1.14 ARAMS Behavioral Requirements
17.2 Additional Capabilities
17.2.1 User-Configurable Powerup State
17.2.2 User-Configurable Fault Recovery to
Manufacturing
17.2.3 Accumulator Data
17.2.4 User-Generated ARAMS Substate
Table(s)
17.2.5 Equipment-Generated ARAMS
Substate Table(s)
17.2.6 User-Generated Symptom Table(s)
17.2.7 Human Interface Requirements
17.2.8 Equipment-Selected Substates
17.2.9 User-Configurable Fault Detection in
ENGINEERING
17.2.10 User-Configurable Fault Recovery to
ENGINEERING
17.2.11 Human Interface Requirements
17.3 Requirements for Compliance
18 ARAMS States for Multi-Module Equipment
Related Information 1
R1-1 Estimating Powerdown Time
R1-1.2 UpdatePeriod
R1-2 Powerup Scenario
R1-3 Equipment-Initiated Transition
R1-4 Operator-Initiated Transition
R1-5 Host-Initiated Transition
Related Information 2
R2-1 User-Initiated Transitions to
UNSCHEDULED DOWNTIME