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SEMI C41-0705 © SEMI 1978, 2005 7 Table 1 Impurity Limits and Other Require ments for 2-Propanol Previous SEMI Reference # C1.15-96 C7.7-93 C11.7-0698 C8.7-92 - Grade 1 Grade 2 VLSI Grade Grade 3 Grade 4 (Specification) …
SEMI C41-0705 © SEMI 1978, 2005 6
temperature, dilute to 50 mL with 1% nitric acid, add an appropriate volume of indium internal standard and mix
well. Prepare a reagent blank.
9.3.4 Analysis
9.3.4.1 Using the prepared solutions and reagent blank, analyze all trace metals by ICP-MS using analytical
conditions optimized for each element. Calibration standards are made in 1% nitric acid solution with the same
concentration of indium internal standard as in ¶9.3.3.1.
10 Grade 4 Procedures
NOTE 6: Each laboratory is responsible for verifying the validity of the method within its own operation.
10.1 See §7, which contains procedures for the following tests:
Assay
Color (APHA)
Residue after Evaporation
Water (H
2
O)
10.2 See §9, which contains procedures for the following tests:
Assay of Anions
Assay of Trace Metals
11 Grade 5 Procedures
11.1 This section does not apply to this chemical.
12 VLSI Grade Procedures
12.1 Specific procedures for this grade do not exist. Refer to §7 and §8 for available procedures.
13 Tier A Procedures
13.1 This section does not apply to this chemical.
14 Tier B Procedures
14.1 This section does not apply to this chemical.
15 Tier C Procedures
15.1 This section does not apply to this chemical.
16 Tier D Procedures
16.1 This section does not apply to this chemical.
SEMI C41-0705 © SEMI 1978, 2005 7
Table 1 Impurity Limits and Other Requirements for 2-Propanol
Previous SEMI Reference # C1.15-96 C7.7-93 C11.7-0698 C8.7-92 -
Grade 1 Grade 2 VLSI Grade Grade 3 Grade 4
(Specification) (Specification) (Guideline) (Specification) (Specification)
Assay (CH
3
CHOHCH
3
) 99.5% min 99.8% min 99.7% min 99.8% min 99.8% min
Color (APHA) 10 max 10 max 10 max 10 max 10 max
Residue after Evaporation 5 ppm max 5 ppm max
5 ppm max 5 ppm max
5 ppm max
Resistivity - - 15 MegOhm cm min - -
Solubility in Water To pass test - - - -
Chloride (Cl) 0.2 ppm max 200 ppb max 0.2 ppm max 50 ppb max 50 ppb max
Nitrate (NO
3
) - - - 50 ppb max 50 ppb max
Phosphate (PO
4
) 0.5 ppm max 500 ppb max 0.5 ppm max 50 ppb max 50 ppb max
Sulfate (SO
4
) - - 1 ppm max 50 ppb max 50 ppb max
Aldehydes and Ketones (as
CH
3
COCH
3
)
- - 100 ppm max - -
Water (H
2
O) 0.05% max 0.05% max 0.05% max 0.05% max 0.05% max
Acidity 0.2 µeq/g max - 0.2 µeq/g max - -
Alkalinity 0.1 µeq/g max - 0.1 µeq/g max - -
Aluminum (Al) 0.1 ppm max 10 ppb max 0.05 ppm max 1 ppb max 100 ppt max
Antimony (Sb) - - 0.01 ppm max 1 ppb max 100 ppt max
Arsenic (As) - - 0.01 ppm max 1 ppb max 100 ppt max
Arsenic and Antimony (as As) 0.01 ppm max 10 ppb max - - -
Barium (Ba) - 10 ppb max 0.02 ppm max 1 ppb max 100 ppt max
Beryllium (Be) - 10 ppb max 0.01 ppm max - -
Bismuth (Bi) - 10 ppb max 0.02 ppm max - -
Boron (B) 0.01 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Cadmium (Cd) - 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Calcium (Ca) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Chromium (Cr) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Cobalt (Co) - 10 ppb max 0.01 ppm max - -
Copper (Cu) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Gallium (Ga) - 10 ppb max 0.01 ppm max - -
Germanium (Ge) - 10 ppb max - - -
Gold (Au) 0.1 ppm max 5 ppb max 0.02 ppm max - -
Indium (In) - - 0.01 ppm max - -
Iron (Fe) 0.1 ppm max 5 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Lead (Pb) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Lithium (Li) - 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Magnesium (Mg) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Manganese (Mn) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Molybdenum (Mo) - 10 ppb max 0.01 ppm max - -
Nickel (Ni) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Niobium (Nb) - 10 ppb max - - -
Platinum (Pt) - - 0.02 ppm max - -
Potassium (K) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Silicon (Si) - - - - -
Silver (Ag) - 5 ppb max 0.01 ppm max - -
Sodium (Na) 0.1 ppm max 10 ppb max 0.1 ppm max 1 ppb max 100 ppt max
SEMI C41-0705 © SEMI 1978, 2005 8
Strontium (Sr) - 10 ppb max 0.01 ppm max - -
Tantalum (Ta) - 10 ppb max - - -
Thallium (Tl) - 10 ppb max 0.01 ppm max - -
Tin (Sn) 0.1 ppm max 10 ppb max 0.02 ppm max 1 ppb max 100 ppt max
Titanium (Ti) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Vanadium (V) - 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Zinc (Zn) 0.1 ppm max 10 ppb max 0.01 ppm max 1 ppb max 100 ppt max
Zirconium (Zr) - 10 ppb max 0.01 ppm max - -
Particles in bottles (size,
#/mL)
#1 #1 #1 #1 #1
#1
Due to the limitations of current particle counters, particle size and number are to be agreed upon between supplier and user. See SEMI C1,
‘Calibration and Measurement Method for Particles in Liquids’.
#2
Residue after Evaporation - since no new analytical data is available at this time the specification level remains at Grade 2 level.
#3
Water (H
2
O) - since no new analytical data is available at this time the specification level remains at Grade 2 level.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
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