semi合集-English.pdf - 第5687页

SEMI P10-0705 © SEMI 1990, 2005 182 ! LEVEL_ID 1000001 PA TTERN_NAME FILENAME05.S$ START_P ATTERN_OPTIONS FL1 PATTER N_ADDRESS_ SIZE .25 DIGITIZED_DATA_DARK F END_PATTERN_OP TIONS FL1 END_PATTERN_DEFINITION 1000001 ! END…

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SEMI P10-0705 © SEMI 1990, 2005 181
END_PATTERN_DEFINITION 1000001
END_PATTERN_GROUP FLD_2_PG
!
! BARCODE Component
PATTERN_GROUP_ID BARCODES
END_PATTERN_GROUP_OPTIONS BARCODES
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME02.1$
START_PATTERN_OPTIONS BC1
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS BC1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP BARCODES
!
! BOJ Component
PATTERN_GROUP_ID BOJ
END_PATTERN_GROUP_OPTIONS BOJ
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME03.50
START_PATTERN_OPTIONS BJ1
PATTERN_ADDRESS_SIZE 0.250
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS BJ1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP BOJ
!
! EOJ Component
PATTERN_GROUP_ID EOJ
END_PATTERN_GROUP_OPTIONS EOJ
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME04.50
START_PATTERN_OPTIONS EJ1
PATTERN_ADDRESS_SIZE 0.250
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS EJ1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP EOJ
!
! Fiducial Component
PATTERN_GROUP_ID FID
END_PATTERN_GROUP_OPTIONS FID
SEMI P10-0705 © SEMI 1990, 2005 182
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME05.S$
START_PATTERN_OPTIONS FL1
PATTERN_ADDRESS_SIZE .25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS FL1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP FID
!
! LOGO Component
PATTERN_GROUP_ID LOGO
END_PATTERN_GROUP_OPTIONS LOGO
!
LEVEL_ID 1000001
PATTERN_NAME FILENAME06.25
START_PATTERN_OPTIONS LO1
PATTERN_ADDRESS_SIZE .25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS LO1
END_PATTERN_DEFINITION 1000001
!
END_PATTERN_GROUP LOGO
!------------------------------------------
!
END_MASK_GROUP UT1X_GROUP_1
!
END_MASK_SET ABC123
!
END_ORDER ORDER1111
CHECKSUM 0
SEMI P10-0705 © SEMI 1990, 2005 183
RELATED INFORMATION 7
EXAMPLE OF A COMPLEX BOOLEAN FUNCTION
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
The following is an excerpt of a P10 file which demonstrates how the
<data_manipulation> capability may be applied.
DATA_PATTERN_NAME METAL-1
PATTERN_FORMAT MEBES
!----------------------------------------------------------------------------
------------
START_DATA_MANIPULATION 1
BOOLEAN MINUS
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 1;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 2;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
END_DATA_MANIPULATION 1
!
START_DATA_MANIPULATION 2
BOOLEAN MINUS
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 3;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 4;0