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SEMI E84-0305 © SEMI 1999, 2005 44 Table A1-8 Example Active Equipment Error Messages No. Time r Name Equipment Error Me ssage 1 TA1 TA1 Timeout – L_REQ/U_REQ signal did not turn ON within specified time. (TA1 = xxx) 2 T…

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SEMI E84-0305 © SEMI 1999, 2005 43
No. Description of Passive Equipment HO_AVBL Signal Response
9 Manual Placement of a FOUP onto a Load Port in Auto Access Mode OFF
10 ES Signal OFF OFF
#1
During normal load/unload operation the presence and placement sensors may turn on/off for a very short period.
A1-4.5 ES Signal
A1-4.5.1 The ES signal allows the Passive Equipment to signify to the Active Equipment any specific instance
where the material, product, or operation is in jeopardy. The ES Signal is not loadport specific but rather tool
specific. That means, for example, if an EMO is pressed on the Passive Equipment the ES signal should be OFF on
all SEMI E84 loadports. Table A1-7 shows some specific scenarios for the ES Signal.
Table A1-7 Example ES Signal Scenarios
No. Description ES Signal Response
1 EMO button is pressed. OFF
2
Interlocked maintenance door or interlocked panel on the Passive
Equipment is opened
OFF
3
Carrier Handling Robot is in Error at the load port (internal buffer
equipment or stocker)
OFF
A1-4.6 L_REQ and U_REQ Signals
A1-4.6.1 When the L_REQ and U_REQ signals are turned OFF they verify the completion of the Load/Unload
sequence as indicated by the presence/placement sensors on the load port.
A1-4.6.1.1
Here are some practical examples of using these signals.
1) During a Load both Presence and Placement sensors are ON once the carrier is detected. This should signal the
L_REQ signal to turn OFF. The L_REQ signal should typically not turn OFF unless both the presence and
placement sensors are ON.
2) When delivering, the Active Equipment should not release the FOUP until L_REQ is OFF.
3) During an Unload both Presence and Placement sensors are OFF once the carrier is not detected. This should
signal the U_REQ signal to turn OFF. The U_REQ signal should typically not turn OFF unless both the presence
and placement sensors are OFF.
4) The L_REQ and U_REQ signals should turn off immediately after the presence and placement sensors have
turned ON (load) or OFF (unload). There should be no delay timer between the presence and placement sensor
ON/OFF and L_REQ / U_REQ OFF.
5) During an Unload, once the active vehicle has fully gripped the FOUP, in most cases the vehicle should ignore
the response from the U_REQ signal until completion of its move. For example, the OHT vehicle should not stop
150 mm – 300 mm above the loadport, check the status of U_REQ and then complete its move. The OHT should
fully complete its move, check U_REQ and finish the E84 sequence. If the U_REQ signal is still high after the
completion of its move and the active vehicle can be certain the carrier is safely and securely contained aboard the
vehicle, in some cases the vehicle should abort the E84 sequence and continue normally to its destination.
A1-4.7
Error Messages
A1-4.7.1 Interlock timeouts are required to detect handoff sequence errors between the active and passive
equipment. When these timeouts occur, an error message shall be displayed to the user including the following
information: Timer Name, Timer Description, and current Timer setting. Some examples of error messages are
listed in Tables A1-8, A1-9, and A1-10.
SEMI E84-0305 © SEMI 1999, 2005 44
Table A1-8 Example Active Equipment Error Messages
No. Timer Name Equipment Error Message
1 TA1 TA1 Timeout – L_REQ/U_REQ signal did not turn ON within specified time. (TA1 = xxx)
2 TA2 TA2 Timeout – READY signal did not turn ON within specified time. (TA2 = xxx)
3 TA3 TA3 Timeout – READY signal did not turn OFF within specified time. (TA3 = xxx)
#1
“xxx” refers to the time in seconds that the specific timer was set to.
Table A1-9 Example Passive Equipment Error Messages
No. Timer Name Equipment Error Message
1 TP1 TP1 Timeout – TR_REQ signal did not turn ON within specified time. (TP1 = xxx)
2 TP2 TP2 Timeout – BUSY signal did not turn ON within specified time. (TP2 = xxx)
3 TP3 TP3 Timeout – Carrier was not detected/removed within specified time. (TP3 = xxx)
4 TP4 TP4 Timeout – BUSY signal did not turn OFF within specified time. (TP4 = xxx)
5 TP5 TP5 Timeout – VALID signal did not turn OFF within specified time. (TP5 = xxx)
6 TP6 TP6 Timeout – VALID signal did not turn ON within specified time. (TP6 = xxx)
#1
“xxx” refers to the time in seconds that the specific timer was set to.
Table A1-10 Example Delay Timer Error Messages
No. Timer Name Equipment Error Message
1 TD0 TD0 Timeout – VALID signal did not turn ON within specified time. (TD0 = xxx)
2 TD1 TD1 Timeout – VALID signal did not turn ON within specified time. (TD1 = xxx)
#1
“xxx” refers to the time in seconds that the specific timer was set to.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that some implementations of this standard may involve use of
inventions covered by U.S. patents 4,306,292 and other patents issued or pending, held by Texas Instruments
Incorporated. By publication of this standard, SEMI takes no position respecting either the applicability or the
validity of these or other patent rights asserted in connection with any item mentioned in this standard. Users of this
standard are expressly advised that determination of any such patent rights, and the risk of infringement of such
rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E85-0705 © SEMI 1999, 2005 1
SEMI E85-0705
SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY
TRANSPORT SYSTEM INTEROPERABILITY
This specification was technically approved by the global Physical Interfaces & Carriers Committee. This
edition was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It
was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published June 1999;
previously published November 2001.
1 Purpose
1.1 This specification defines the dimensional requirements for the interbay load ports of 300 mm AMHS
equipment. It is intended to promote a list of required features and dimensions that define the physical interfaces
between different types of interbay equipment, to facilitate the use of different automated transport systems in order
to meet the different material handling requirements found throughout the factory. This is done by defining six
options of interfaces that both the stocker and interbay transport system must comply with. Options defined are as
follows:
Option A: Active transport loads a carrier to an internal stocker position
Option B: Active transport loads a carrier to an external stocker position
Option C: Passive transport presents a carrier to an internal stocker position
Option D: Passive transport presents a carrier to an external stocker position (kinematic coupling pin pick-up)
Option E: Passive transport presents a carrier to an external stocker position (conveyor flange pick-up)
Option F: Passive transport presents a carrier to an external stocker position for pickup with either (a) all 3
kinematic pins, (b) all 3 secondary kinematic pins or (c) top robotic flange. Carrier is oriented with front of
carrier perpendicular to load face plane.
2 Scope
2.1 This is a standard covering physical interface of 300 mm AMHS interbay equipment only. Similar
requirements covering 300 mm AMHS intrabay equipment are covered in SEMI E15.1.
2.2 This specification does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use.
3 Limitations
3.1 This standard does not specify that every type of 300 mm stocker has to interface with every type of 300 mm
interbay transport system. It only specifies six different options of physical interface. Within any option however,
all stockers must be able to physically interface with all interbay transports. This standard only specifies single
carrier handoff and not dual simultaneous handoffs as implied by the dimensions in the rest of this document.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm
Wafers