semi合集-English.pdf - 第84页

SEMI E7-91 © SEMI 1984, 2004 1 SEMI E7-91 (Reapproved 1104) SPECIFICATION FOR ELECTRICAL IN TERFACES FOR THE U.S. ONLY This specification was technically approved by the Gl obal Ph ysical Interfaces & Carriers Commit…

100%1 / 7923
SEMI E6-0303 © SEMI 1982, 2003 29
RELATED INFORMATION 3
MOVE-IN, PLACEMENT AND ASSEMBLY INSTRUCTIONS
NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to
modify or supersede the official standard. It has been derived from the work of the originating task force.
Determination of the suitability of the material is solely the responsibility of the user.
R3-1 Instructions
R3-1.1 Consider every step from receiving until hookup
is complete when writing installation instructions. The
installation process usually includes the need for tools,
transportation equipment, and personnel (quantity,
duration, and skills). All requirements should be
indicated so availability can be assured. The following
is a sample outline for the instructions recommended in
SEMI E6 Section 7.1.3.
R3-1.1.1 Move in — Provide instructions for transport
and location of the equipment in the cleanroom. List
any special equipment required to move the equipment.
R3-1.1.2 Placement — Include procedures for items
such as but not limited to the following:
• Use of templates and jigs if provided,
• Through-the-wall mounting,
• 3-dimension alignment,
• Leveling the equipment,
• Floor loading,
• Floor mounting,
• Pedestal mounting, and
• Seismic restraint.
R3-1.1.3 Assembly — Provide instructions for all
necessary steps required to make the equipment
functional. List necessary parts, and special equipment
to be provided by the equipment purchaser. List
necessary contractors, and include estimated schedule
and duration information. Include procedures for:
• Component assembly and attachment,
• Electrical power hookup,
• Water hookup,
• Bulk chemical hookup,
• Drain hookup,
• Gas hookup,
• Vacuum hookup,
• Exhaust hookup,
• Inspection, and
• Energizing equipment.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer' s instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E7-91 © SEMI 1984, 2004 1
SEMI E7-91 (Reapproved 1104)
SPECIFICATION FOR ELECTRICAL INTERFACES FOR THE U.S. ONLY
This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is
the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition
approved by the North American Regional Standards Committee on July 11, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published in 1984; last
published June 1999.
For Japan electrical interface requirements, see SEMI E31.
1 Purpose
1.1 The purpose of this standard is to simplify the
design and implementation of future semiconductor
facilities where both equipment suppliers and users can
be assured of the exact electrical interfaces required.
2 Scope
2.1 This standard presents recommendations for the
selection of specific electrical power interfaces:
Service categories by voltage, current and phase
for systems, motors, and other electrical loads
Electrical connectors
Cordage
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 Other Standards
NEMA — National Electrical Manufacturer’s
Association
1
NFPA 70-1981 — National Electrical Code, (NEC)
National Fire Protection Association
2
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
None.
1 National Electrical Manufacturer’s Association, 1300 N. 17th
Street, Suite 1847, Rosslyn, VA, 22209, (703) 841-3200, fax (703)
841-5900, http://www.nema.org/
2 National Fire Protection Association, 1 Batterymarch Park
Quincy, Massachusetts, 02169-7471, +1 617 770-3000, fax +1 617
770-0700, http://www.nfpa.org
5 Service Categories
5.1 Voltage, current, and phase for motors and other
electrical/electronic loads:
5.2 Motors — (From Article 430-148, 150 of National
Electrical Code)
Power Recommended
Phase & Voltage
Recommended
Current Range
Motors 1/6 to 3/4 HP 120V 1Ø
208V 1Ø
230V 1Ø
4.4 to 13.8 AMPs
2.4 to 7.6 AMPs
2.2 to 6.9 AMPs
Motors 3/4 to 5 HP 208V 3Ø
230V 3Ø
3.1 to 16.7 AMPs
2.8 to 15.2 AMPs
Motors 5 HP and
Larger
480V 3Ø 7.6 AMPs and up
5.3 Other Loads — (By Calculation)
Ampere Range for Recommended Volts &
Phases
Power 120V 1Ø 208V 1Ø 208V 3Ø 480V 3Ø
0-3000 Watts 0 to 25
A.
0 to 14 A. 0 to 8 A.
3000-5000 Watts 14 to
24 A.
8 to 14 A.
5000-
30,000 Watts
13 to
83 A.
30,000 and
Above
36 A. and
up
6 Electrical Connectors
6.1 The NEMA types listed below are available in
many forms from many manufacturers. For example,
the “receptacle” configurations shown also apply to
connectors and flanged outlets.
6.1.1 125 Volt, 1Ø, 20 AMPs max., straight blade
SEMI E7-91 © SEMI 1984, 2004 2
Figure 1
Dead front plugs are preferred.
6.1.2 120 Volt, Ø, 30 AMPs max., locking type.
Figure 2
6.1.3 120 Volt, 1Ø, 30 AMPs max., locking blade type.
Figure 3
6.1.4 250 Volt, 1Ø, 30 AMPs max., locking type
Figure 4
6.1.5 120/208 Volt, 3ØY, 30 AMPs max., locking type
(4 pole, 5-wire grounding)
Figure 5
6.1.6 Above 10,000 watts, use of connectors is
discouraged. Wherever possible, such loads should be
wired into junction boxes using appropriate crimped or
pressure terminations.
7 Cordage and Cables
7.1 The flexible cord and cable types shown are
examples; for more detail see the National Electrical
Code.
7.2 The following table gives the allowable ampacity
for the specified number of current-carrying copper
conductors in a cord.
7.3 Type SO-ST-STO preferred with 600 Volt
insulation.
AWG #18 #16 #14 #12 #10 #8 #6 #4
2 cond. 10 13 18 25 30 40 55 70
3 cond. 7 10 15 20 25 35 45 60
4 cond. 5.6 8 12 16 20 28 36 48
5 cond. 5.6 8 12 16 20 28 36 48