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SEMI S14-0704 © SEMI 2000, 2004 12 RELATED INFORMATION 2 SMOKE MANAGEMENT IN CLEANROOMS NOTICE : This related information is not an o fficial part of SEMI S14 and was deri ved from the work of a mem ber of the Fire Pr ot…

SEMI S14-0704 © SEMI 2000, 2004 11

RELATED INFORMATION 1

TEST PROTOCOL FOR WET BENCH MATERIALS PROCESS

COMPATIBILITY

NOTICE: This related information is not an official part of SEMI S14 and is not intended to modify or supersede the official

guideline. It has been derived from the cited work. Publication is authorized by vote of the responsible committee. Determination

of the suitability of this material is solely the responsibility of the user.

R1-1 SEMATECH has published the results of a study

on testing of polymeric materials for use in wet

benches. The Abstract and citation are provided as

Related Information 1 to SEMI S14, Safety Guidelines

for Fire Risk Assessment and Mitigation for

Semiconductor Manufacturing Equipment as the

responsible committee believes the information in this

document may be of use in identifying materials that

are appropriate for the described applications and

consistent with appropriate management of fire risks.

R1-2 The report, SEMATECH Document ID #:

98123623A-ENG, entitled Process Compatibility

Parameters for Wet Bench Plastic Materials, was

written by Archibald Tewarson, Avtar S. Jassal, Latif

Ahmed, and Mark Camenzind and published 30

December 1998.

R1-3 SEMATECH retains the copyright to the

document, but has granted SEMI permission to include

the Abstract and citation in this Safety Guideline. The

complete document (90 pages) is available from

SEMATECH' s web site:

http://www.sematech.org/public/docubase/abstract/tech

-5.htm.

R1-4 Abstract

R1-4.1 This report presents a test protocol of accepted

analytical procedures to determine the process

compatibility parameters for commonly used wet bench

plastic materials (PP, FRPP, and PVC) and proposed

plastic materials (CPVC, ECTFE, and PVDF) that may

be used for wet bench construction. Three industry

standard test methods were used to determine the

outgassing, leaching, and extraction parameters, defined

in combination as the process compatibility parameters.

To supplement them, the presence of critical elements

at the surface of the materials and the condition of the

surface were examined before and after exposure to

water and chemicals. Changes in the mass of plastic

materials as a result of outgassing, leaching, and

extraction were also used to supplement the parameters.

The report includes details of the test procedures, data

analysis, surface topography of the plastic materials,

before and after exposure to water and chemicals, and

discussion of the results.

SEMI S14-0704 © SEMI 2000, 2004 12

RELATED INFORMATION 2

SMOKE MANAGEMENT IN CLEANROOMS

NOTICE: This related information is not an official part of SEMI S14 and was derived from the work of a member

of the Fire Protection Task Force of the North American Environmental, Health, and Safety Committee. This

related information was approved for publication by 2/3 committee vote on July 17, 2003.

R2-1 Introduction

R2-1.1 Semiconductor cleanrooms are operationally

sensitive to products of a fire. A fire will result in

smoke and corrosive particle contamination to the

cleanroom, process equipment, and work in process. A

properly designed, installed, and maintained smoke

detection and control system will not prevent

contamination, but will limit the spread and

concentration of the contaminant. The basis of the

smoke control system design should be aligned with the

organization’s risk management objectives.

R2-1.2 This Related Information deals with smoke

management systems for cleanrooms themselves, not

for equipment. Smoke removal from a cleanroom may

be performed by ventilation systems that are in place

for other purposes (e.g., process exhaust systems of

equipment) or by equipment designed and installed

specifically to remove smoke from the room. These

may both be parts of the protection for a cleanroom and

may differ in how they are activated.

R2-2 Actuation

R2-2.1 Automatic actuation of dedicated smoke control

systems is preferable; however, many facilities prefer

manual activation. If the system is manually activated,

the following should be done.

R2-2.1.1 The smoke detection system should be

monitored by qualified personnel 24 hours per day.

R2-2.1.2 Emergency response teams (ERT) or other

personnel authorized to actuate the manual smoke

control system should be capable of prompt

notification.

R2-2.1.3 Detailed smoke control emergency

procedures should be documented and practiced. These

procedures can include hazardous gas shutdowns and

shutdowns of appropriate air recirculation fans as well

as activating the smoke control exhaust fans.

R2-2.2 A secondary means of manual actuation of the

smoke/contaminant control system should be provided

in a clearly marked and accessible area outside the

cleanroom.

R2-3 Capacity

R2-3.1 The smoke control system capacity needed is

directly related to the design fire size which depends

upon the type, amount and arrangement of combustible

materials in the cleanroom. In order to achieve a

system that is economically feasible, the maximum

design fire size should be limited to the fire size at

sprinkler operation. For a typical cleanroom

configuration, the fire size at sprinkler operation is in

the range of 600 to 800 kilowatts.

R2-3.2 Smoke removal system capacity can be

designed based on an integrated system approach. The

total capacity can include the fume exhaust system

capacity and dedicated smoke removal system capacity.

R2-4 Design Considerations

R2-4.1 When the fume exhaust system is used for

smoke removal, the following design parameters should

be followed.

R2-4.1.1 The fume exhaust system ductwork should be

of non-combustible construction or should be

listed/approved for smoke removal and not incorporate

the use of fire dampers or interrupters.

R2-4.1.2 It should be confirmed that sufficient fume

exhaust system intake points exist throughout the clean

room. If not, additional intake points should be

provided and incorporate the use of normally closed

dampers. These dampers should be opened either

automatically by activation of the smoke detection

system or by manual means.

R2-4.1.3 When the fume exhaust system is used for

smoke removal, it can incorporate the use of variable

speed fan(s). During the smoke removal mode, fire

dampers on supplemental intake points will open and

the fan speed will be increased. The design capture

velocity at the tool(s) could be affected, and this should

be reviewed. Necessary balancing changes should be

made to ensure the design capture velocity is

maintained.

R2-4.2 The ventilation system make-up air fans should

be sized such that under full smoke and process

exhaust, the fabrication area maintains a positive

pressure relative the adjacent areas.

R2-4.3 Smoke removal system intake locations are

dependent on the fabrication area design. Design

alternatives should be addressed with a competent fire

protection engineering design firm. For example, for

open manufacturing areas, smoke removal system

intake sequencing should be designed such that

individual zones can be activated to prevent

contaminant migration to adjacent clean areas of the

fab. From a smoke removal perspective, ducted returns

are a better option than open attic plenum

configurations.

R2-5 Testing

R2-5.1 The smoke/contaminant control system should

have a functional test done annually of all detection and

control systems including system dampers and fans.

The system should be designed so that operational and

functional testing can be done without interruption to

the normal clean room air handling.

R2-5.2 The smoke/contaminant control system for new

semiconductor facilities should be fully tested during

mechanical system tests done near the end of the

construction process. Testing should consist of a

complete functional test of detection and control

systems, plus activation of smoke/contaminant removal

fan and damper systems. The performance of the

smoke/contaminant removal system should be verified

using either sulfur hexafluoride (SF

) or another tracer

gas method.