semi合集-English.pdf - 第2832页

SEMI E102-0600 © SEMI 2000 40 53: Transfer Command Complete (I BSEM) 56: Transfer Command to Stk. 7 ( carrier 3232, src. Stk. 7/B ay_In, dest. shelf)(StockerS EM) 57: Transfer Command Updates from Stk. 7 ( StockerS EM) 5…

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SEMI E102-0600 © SEMI 200039
Stk.7 now
available.
31: Transfer Command to Stk.5( carrier 3232, src. Stk. 5/Bay_In, dest. Stk. 5/Bay_Out() (StockerSEM))
32: Transfer Command Updates from Stk. 5 (StockerSEM)
33: Transfer Command Complete (StockerSEM)
34: Transfer Command to Ohs2 (carrier 3232, src. Stk. 5 Bay/Out, dest. Stk. 8/Bay_In)(IBSEM)
35: Transfer Command Updates from Ohs2 (IBSEM)
38: Transfer Command Complete (IBSEM)
41: Transfer Command to Stk.8 (carrier 3232, src. Stk 8/Bay_In, dest. shelf) (StockerSEM)
42: Transfer Command Updates from Stk. 8 (StockerSEM)
43: Transfer Command Complete (StockerSEM)
44: Status update from Stk.7 (available capactiy) (StockerSEM)
46: Transfer Command to Stk. 8 (carrier 3232, src. Stk. 8 shelf, dest. Stk. 8 Bay_Out) (StockerSEM)
47: Transfer Command Updates from Stk. 8 (StockerSEM)
48: Transfer Command Complete (StockerSEM)
49: Transfer Command to Ohs2 (carrier 3232, src. Stk. 8/Bay_Out, dest. Stk. 7/Bay_In) (IBSEM)
50: Tranfer Command Updates from Ohs2 (IBSEM)
36: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
39: setMaterialTrackingLocation(MaterialTrackingLocation Stk.8)
51: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
45: MaterialTrackingLocationNotFullEvent
37: DurableLocationChangedEvent
40: DurableLocationChangedEvent
30: MaterialTrackingLocationFullEvent
Carrier is temporarily stored in
Alternate Stk. 8 until Stk. 7
becomes available.
29: ZoneCapacityEvent(StockerSEM)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-10
Scenario Case 4 (continued)
SEMI E102-0600 © SEMI 2000 40
53: Transfer Command Complete (IBSEM)
56: Transfer Command to Stk. 7 ( carrier 3232, src. Stk. 7/Bay_In, dest. shelf)(StockerSEM)
57: Transfer Command Updates from Stk. 7 ( StockerSEM)
58: Transfer Command Complete (StockerSEM)
54: setMaterialTrackingLocation(MaterialTrackingLocation Stk.7)
59: makeStored()
62: informJobStateChange(JobType TrJob1, previousState JobExecuting, newState JobCompleted)
55: DurableLocationChangedEvent
52: DurableLocationChangedEvent
60: MaterialContainerStateChangedEvent
61: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
63: removeFinishedJob(Job TrJob1)
64: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-11
Scenario Case 4 (continued)
SEMI E102-0600 © SEMI 200041
R1-2.5 Scenario Five — Manual Carrier Input and Handling
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
1: Stk6 Event Report CarrierWaitIn(carrier aaa) (Stocker SEM)
3: Transfer Command to Stk6 (carrier aaa, src Man_In, dest shelf) (Stocker SEM)
4: Transfer Command Updates (Stocker SEM)
5: setMaterialTrackingLocation( MaterialTrackingLocation stk6/manin)
6: DurableLocationChangedEvent
7: Transfer Command Completed (Stocker SEM)
9: MaterialContainerStateChangedEvent
11: requestJob(JobType TransportJob, Priority 1, Deadline time1, Container aaa, destination stk6)
15: InformJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
16: getUnit()
18: MaterialContainerStateChangedEvent
20: InformJobStateChange(aJob TrJob1, previousState JobExecuting, newState JobCompleted)
12: returns Job Handle TrJob1
8: makeStored()
2: MaterialContainerArrivedAtManualInputPortEvent
Supervisor determines TransportJob is required from
MaterialContainerArrivedAtManualInputPortEvent
13: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
14: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
19: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
21: removeFinishedJob(Job TrJob1)
22: JobstateChangedEvent(..previousState JobCompleted, newState JobUndefined)
10: setUnit(unitvalue)
17: setMaterialTrackingLocation(MaterialTrackingLocation Stk. 6/MTL1)
MTSC determines
logical partition from
getUnit() - (internal)
Figure R1-12
Scenario Case 5