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SEMI E88-1104 E © SEMI 1999, 2004 11 8.4.4 Stocker Carrier Stat e Transition Table Table 3 Stocker Carrier State Tran sition Table Transition # Previous State Trigger New State Action Comments 1 none Carrier arrives at a…

SEMI E88-1104

8.4 Stocker Carrier State Model

8.4.1 Stocker Carrier State Model Requirements

8.4.1.1 The purpose of the stocker carrier state model is to provide information to the host regarding carrier tracking

(the Host will not control carriers) while the carrier is in the domain of the stocker. The carrier is in the domain of

the stocker when it is in storage or transport internal to the stocker or on a stocker interface port (manual, interbay,

or intrabay). The equipment shall track each carrier in compliance with the Stocker Carrier State Model.

8.4.2 Stocker Carrier State Model

INSTALLED

WAIT IN

WAIT OUT

STORED

COMPLETED

ALTERNATE

TRANSFERRING

WAIT IN

WAIT OUT

STORED

COMPLETED

ALTERNATE

TRANSFERRING

COMPLETED

LTERNATE

Figure 5

Generic Stocker SEM Carrier State Model Diagram

8.4.3 Stocker Carrier State Definitions

8.4.3.1 INSTALLED — Carrier in stocker database.

8.4.3.2 WAIT IN (INSTALLED sub-state) — Carrier at final internal port location of the stocker. Carrier is ready to

be transferred to storage or output location and no further movement or action should be taken on this carrier prior to

transfer.

8.4.3.3 WAIT OUT (INSTALLED sub-state) — Carrier is at an Output, Buffer, or Loading Port.

8.4.3.4 TRANSFERRING (INSTALLED sub-state) — Carrier ‘moving’ between locations in the stocker. The

carrier may not be physically moving but may be on the crane (or other position) waiting for a new TRANSFER

command as the result of an anomaly condition.

8.4.3.5 STORED (INSTALLED sub-state) — Carrier is sitting at a storage location.

8.4.3.6 COMPLETED (STORED sub-state) — The carrier is stored at a shelf location as a result of completing a

transfer for which this shelf represents the destination of the transfer command.

8.4.3.7 ALTERNATE (STORED sub-state) — The carrier is temporarily stored at a shelf location. The transfer

command completion is pending until the destination and the crane become available.

SEMI E88-1104

8.4.4 Stocker Carrier State Transition Table

Table 3 Stocker Carrier State Transition Table

Transition

Previous State Trigger New State Action Comments

1 none Carrier arrives at a

WaitIn position of the

stocker.

WAIT IN S6F11

CarrierWaitIn

2 WAIT IN Stocker is executing a

TRANSFER command

for the carrier.

TRANSFERRING S6F11 Carrier-

Transferring

3 TRANSFERRING Completion of a

TRANSFER command

with a DEST of

internal stocker

storage.

COMPLETED S6F11

CarrierStored

Carrier is at an

internal storage

destination.

4 COMPLETED Stocker is executing a

TRANSFER command

for the carrier.

TRANSFERRING S6F11 Carrier-

Transferring

5 TRANSFERRING Carrier has arrived at

the output port.

WAIT OUT S6F11

CarrierWaitOut

6 WAIT OUT Carrier has advanced

(automatically) on a

port beyond the output

port.

WAIT OUT S6F11

CarrierWaitOut

7 WAIT OUT Carrier is removed

from the stocker

domain (removed from

the output LP).

None S6F11

CarrierRemoved

8 TRANSFERRING The destination of the

move command is

occupied.

ALTERNATE S6F11

CarrierStoredAlt

SC is waiting for the

Destination to become

available.

9 ALTERNATE The port becomes

available and transfer

command is first in

queue.

TRANSFERRING S6F11

CarrierResumed

Carrier continues with

move to the

Destination.

10 None Carrier entry is created

or modified in the SC

database.

COMPLETED S6F11

CarrierInstall-

Completed

Could be due to an

INSTALL remote

command or initiated

by the Stocker

Controller.

11 INSTALLED Carrier entry is

removed from the SC

database.

None S6F11

CarrierRemove-

Completed

Could be due to a

REMOVE remote

command.

12 ALTERNATE Transfer command is

Aborted.

COMPLETED S6F11

CarrierStored

13 WAIT OUT Carrier on a bi-

directional port is

ready to be moved to a

storage or output

location.

WAIT IN S6F11

CarrierWaitIn

Examples of a trigger

could be the operator

pressing a button or

the host issuing a

transfer command for

the carrier.

14 None The result of ID read at

an output port that did

not match the expected

ID.

WAITOUT S6F11

CarrierWaitOut

SEMI E88-1104

Transition

Previous State Trigger New State Action Comments

15 None 1. Carrier created

directly on the crane

(as the result of

duplicate ID

recovery).

2. Transfer

Command received

from host with the

source being a port

with no SC

controlled sensors

(e.g.directly

connected process

equipment).

TRANSFERRING S6F11 Carrier-

Transferring

It is also

permissible to use

state transitions #1

and #2 for the

scenario in trigger

#2 especially when

the transfer

command is

queued. This

transition may not

be required in all

configurations.

16 TRANSFERRING Carrier has arrived at

an Output port and is

removed from the

stocker domain.

None S6F11

CarrierRemoved

This generally

occurs when

delivering directly

to process

equipment at a port

with no sensors

controlled by the

SC.

8.5 Stocker Crane State Model

8.5.1 Stocker Crane State Model Requirements

8.5.1.1 The purpose of the stocker crane state model is to provide information to the host for use of stocker crane

information and metric tracking (i.e., the Host will not control the stocker crane). If it is possible for the stocker to

continue operation while the stocker crane is not operational then the Stocker Crane State Model will retain its

current state and the SC State Model will be ALARM. When the stocker crane becomes operational again, the state

of the Stocker Crane State Model will transition to the new state. Whether it is possible to continue operation while

the stocker crane is not operational is specific to the stocker SEM equipment supplier. If a single stocker contains

multiple stocker cranes, each stocker crane must comply with the stocker crane state model. Compliance with the

stocker crane state model is only required for devices that contain a crane. The Host should not be dependent on any

events from the stocker crane state model.

8.5.2 Stocker Crane State Model

ACTIVEIDLE

Figure 6

Generic Stocker SEM Stocker Crane State Model Diagram

8.5.3 Stocker Crane State Definitions

8.5.3.1 IDLE — The stocker crane is not performing Host or SC initiated work.

8.5.3.2 ACTIVE — The stocker crane is busy performing Host or SC initiated work.