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SEMI P10-0705 © SEMI 1990, 2005 175 RELATED INFORMATION 6 SEMI PHOTOMASK ORDER EX AMPLE FOR UT1X RETICLES NOTICE : The information contained in this rel ated information is not an offici al part of SEMI P10, and it is no…

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SEMI P10-0705 © SEMI 1990, 2005 174
PATTERN_ADDRESS_SIZE 0.25
END_PATTERN_GROUP_OPTIONS FID
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.04
START_PATTERN_OPTIONS 1CPO
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS 1CPO
END_PATTERN_DEFINITION M111
!
LEVEL_ID M222
PATTERN_NAME FILESNAME.04
START_PATTERN_OPTIONS 2CPO
DIGITIZED_DATA_DARK T
END_PATTERN_OPTIONS 2CPO
END_PATTERN_DEFINITION M222
!
END_PATTERN_GROUP FID
!
!
END_MASK_GROUP G5555
END_MASK_SET S55555
END_ORDER O555555
CHECKSUM 118
SEMI P10-0705 © SEMI 1990, 2005 175
RELATED INFORMATION 6
SEMI PHOTOMASK ORDER EXAMPLE FOR UT1X RETICLES
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
!NOTE: Indentation is for clarity only and is not required.
!
START_ORDER ORDER11111
SEMI_REVISION P10-0704
CUSTOMER AAA CUSTOMER
VENDOR ANY VENDOR
FILE_DATE_TIME 01-Jan-2002, 12:00
OPERATOR_NAME AN OPERATOR
!
MASK_SET_ID ABC123
BILLING_CONTACT CONTACT NAME
BILLING_ADDRESS BILLING ADDRESS LINE 1
BILLING_ADDRESS BILLING ADDRESS LINE 2
PRICE_UNITS USD
SHIPPING_CONTACT CONTACT NAME
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 1
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 2
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 3
!
DATA_MEDIUM FTP
DATA_PATTERN_NAME FILENAME01.1$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME01.1$
DATA_PATTERN_NAME FILENAME01.2$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME01.2$
DATA_PATTERN_NAME FILENAME02.1$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME02.1$
DATA_PATTERN_NAME FILENAME03.50
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME03.50
DATA_PATTERN_NAME FILENAME04.50
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME04.50
DATA_PATTERN_NAME FILENAME05.S$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME05.S$
DATA_PATTERN_NAME FILENAME06.25
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME06.25
END_DATA_MEDIUM FTP
SEMI P10-0705 © SEMI 1990, 2005 176
!
MASK_SET_NAME ABC123
MASK_SET_VERSION ABC123
!
END_MASK_SET_OPTIONS ABC123
!
MASK_GROUP_ID UT1X_GROUP_1
END_MASK_GROUP_OPTIONS UT1X_GROUP_1
!
PLACEMENT_TOP_CELL UT_1X_TOP_CELL
!
!-----------MASKS-------------------------
MASK_ID 100001
MASK_NAME NAME100001
DELIVERABLE_MASK T
PO_NUMBER 123456789
RELEASE_NUMBER 987654
STATUS NEW
DUE_DATE_TIME_REQUESTED 01-Jan-2002, 10:44
PRICE 1111.0
REPAIRS_AUTHORIZED T
!
START_SHIPPABLE_DATA 1
SHIP_CD_PRINTOUT T
SHIP_DEFECT_DATA T
SHIP_REGISTR_DATA T
END_SHIPPABLE_DATA 1
!
PRODUCT_TYPE 1X_STD_FIELD_RETICLE
PRODUCT_MAGNIFICATION 1X
PRODUCT_IMAGING_TYPE BINARY
QUANTITY 1
WAFER_EXPOSURE_TOOL ULTRATECH
JOB_NAME j1000001.jb
JOB_LEVEL 1
!
START_TITLE TITLE_1
TITLE_TEXT ABC123
TITLE_TYPE DEVICE
TITLE_JUSTIFICATION L
TITLE_LOCATION -33000.0, -1000.0
MIRROR_TITLE F
ROTATE_TITLE 0
ROTATE_TITLE_CHARACTERS 0
END_TITLE TITLE_1
!
START_TITLE TITLE_2
TITLE_TEXT NAME100001