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SEMI PR8-0703 © SEMI 2003 14 7.6.2.7. 3 XML Definition of Data Management Respo nses — Responses t o data management request s are embedded in the HTTP response to the data management request. The respon se will contain …

SEMI PR8-0703 © SEMI 2003 13

Table 14 Generic Service Acknowledge for

DeactivatePlan

Field Name Value

SVCACK 0, 2, 3, 5

Use 5 only when data management

configuration switch is not set to SECS/GEM

LINKID 0

SPNAME

“DeactivatedPlanIds”

SPVAL

L,n n=number of deactivated DCP’s

1. <OBJID

2. <OBJID

n. <OBJID

Each plan id is a separate entry (format 20) in

this list.

ERRCODE

Supplier chooses the number and value of

ERRCODE

and ERRTEXT

entries for error

responses

ERRTEXT

Supplier chooses the number and value of

ERRCODE

and ERRTEXT

entries for error

responses

7.6.2.7 EDA Data Management via SOAP — The EDA

client may also perform EDA data management via

SOAP. Data management requests issued from an

EDA client to the equipment via SOAP will apply to

the data port associated with that client.

7.6.2.7.1 EDA Data Management Message Structure

— The data management messages from an EDA client

will be structured in the same way as the data

acquisition messages defined below in Section 7.7.2.

The XML fragments inside the SOAP body element are

structured as described in Tables 15 and 16.

7.6.2.7.2 XML Definition of Data Management Requests

Table 15 XML Data Management Request Definition

Tag Name Description XML Datatype Behavior

IsEda-

Enabled

GetDefined-

PlanIds

GetActive-

PlanIds

ActivatePlan Deactivate-

Plan

see columns 4-8

in this row for

tag names, shown

in quotes

Operation Name

Element

Complex

Required-

“IsEda-

Enabled”

Required-

“GetDefined

PlanIds”

Required-

“GetActive-

PlanIds”

Required-

“Activate-

Plan”

Required-

“Deactivate-

Plan”

EquipmentID EquipmentID element Complex Required Required Required Required Required

PlanID Data collection plan to

be activated or

deactivated (“ALL” is

reserved for

DeactivatePlan)

String N/A N/A N/A Required Required

UntilDeactivated Indicates mode of

activation

Boolean N/A N/A N/A Required N/A

SEMI PR8-0703 © SEMI 2003 14

7.6.2.7.3 XML Definition of Data Management Responses — Responses to data management requests are

embedded in the HTTP response to the data management request. The response will contain only the operation type

element as defined below.

Table 16 XML Data Management Response Definition

Tag Name Description XML Datatype Behavior

IsEda-

Enabled

GetDefined-

PlanIds

GetActive-

PlanIds

ActivatePlan Deactivate-

Plan

See columns 4-8

in this row for

tag names,

shown in quotes

Operation Name

Element

Complex

Required-

“IsEda-

Enabled

Response”

Required-

“GetDefined

PlanIds

Response”

Required-

“GetActive-

PlanIds

Response”

Required-

“Activate-

Plan

Response”

Required-

“Deactivate-

Plan

Response”

DefinedPlanIds Space delimited array

of defined data

collection plan names

List N/A Required N/A N/A N/A

ActivePlanIds Space delimited array

of Active data

collection plan names

List N/A N/A Required N/A N/A

IsEnabled Whether or not the

EDA port is enabled

Boolean Required N/A N/A N/A N/A

IsActivated Whether or not the

equipment activated

the requested plan

Boolean N/A N/A N/A Required N/A

Deactivated-

PlanIds

Data collection plan

ids de-activated by

this operation

List N/A N/A N/A N/A Required

Error Include if data

management request

could not be executed

Complex Optional Optional Optional Optional Optional

ErrorTime Time of the error DateTime Optional Optional Optional Optional Optional

ErrorType Category of error String Optional Optional Optional Optional Optional

ErrorCode Unique identifier of

error

String Optional Optional Optional Optional Optional

ErrorDesc Text description of

error

String Optional Optional Optional Optional Optional

7.7 XML Message Formats

7.7.1 This section describes the XML fragments that

make up the body of the SOAP messages that will be

sent by equipment to EDA clients through the EDA

port. The section describes the general construction of

the SOAP body and the structure of the elements that

make up the SOAP body. Each EDA client must

implement all of the messages defined in this section.

7.7.2 General Construction — Each SOAP body will

have the following structure: The root element is the

Operation Name element, and is named after the

operation being performed. The first element inside the

root element will be the Equipment ID element. The

Equipment ID element is followed by one or more

Operation Name elements. Each Operation Name

element in a data acquisition message may contain 0 or

more Param elements.

7.7.3 Equipment ID

7.7.3.1 Each message has one and only one

EquipmentID element. The EquipmentID element

identifies the equipment for which all data in the

message apply.

Table 17 Equipment ID XML definition

Tag Name Description XML Datatype Behavior

EquipmentID Complex element that contains all the equipment

identifier fields

Complex Required

Supplier Supplier Name String Required

Model Equipment Model String Required

ImmutableID Serial number or Immutable ID of the specific tool String Required

7.7.3.2 General Structure Example

<Supplier>Some Supplier</Supplier>

</EquipmentID>

<Event>

……..

…….

</Event>

……..

</ExEvent>

</EdaData>

7.7.4 Param Element

7.7.4.1 There may be zero or more Param elements

inside any Operation Name element. Param elements

can describe measured values or descriptive attributes.

Any tag names not explicitly defined in this proposed

standard must be communicated through param

elements. All param elements that may be

communicated through the EDA interface must be

defined in the Metadata files.

7.7.4.2 All param elements must contain the Name and

Value elements, at a minimum. Other, optional

elements are listed in the table below. The equipment

supplier may define additional optional elements. The

elements to be included in the communication of

specific Names must be defined in the Metadata files.

The units and the data type of specific Names must be

defined in the Metadata files.

Table 18 Param Element Definition

Tag Name Description XML Datatype Behavior

Param Complex element containing all fields

pertaining to a single parameter.

Complex Required

Name The name of the parameter. String Required

Value The value of the parameter. See below for

more definition.

Complex Required

IntVal An integer value Integer Optional;

maxOccurrances=unbounded

IntArrayVal An array of integers List; itemType=integer Optional;

maxOccurrances=unbounded

FloatVal A float value Float Optional;

maxOccurrances=unbounded

FloatArrayVal An array of Float values List; itermType=Float Optional;

maxOccurrances=unbounded

DoubleVal A double value Double Optional;

maxOccurrances=unbounded

DoubleArrayVal An array of double values List; itemType=double Optional;

maxOccurrances=unbounded

StringVal A string String Optional;

maxOccurrances=unbounded

StringArrayVal An array of strings List: itemType=string Optional;

maxOccurrances=unbounded

DateTimeVal A dateTime DateTime Optional;

maxOccurrances=unbounded