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SEMI E130-1104 © SEMI 2003, 2004 45 R1-1.7.2 Clea ning Probes – Detail — This scenario assumes the recipe is se tu p for cleaning probes using a cleani ng substrate. The cleaning substrate is store d in an internal stora…

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SEMI E130-1104 © SEMI 2003, 2004 44
R1-1.7 Scenario VII – Inspect and Clean Probes — The host issues an INSPECT-PROBES command during
substrate processing. The probe inspection fails so the host issues the CLEAN-PROBES command. The prober is
configured to automatically inspect the probes after the probe cleaning operation. The host resumes processing after
the successful clean/inspection:
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Host Prober
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ()
PS: MOVING XYZ to AWAITING COMMAND(X:targetX, Y:targetY)
Move Chuck to Designated Coordinates()
Host attributes repeat unit defect to probes()
Tester
Start()
Device Test Complete(Result:Fail)
INSPECT-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:INSPECT-PROBES)
Perform Inspection()
PS: SERVICE TASK to AWAITING COMMAND(X:targetX, Y:targetY, Fail)
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
CLEAN-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
CLEAN-PROBES()
Since the INSPECT-PROBES service task failed,
the host issues the CLEAN-PROBES command
If the prober automatically performs a probe inspection
after performing a probe cleaning, the Process State
model transition #14 would signify the transition from
the CLEAN-PROBES service task to the INSPECT-PROBES
service task
PS: SERVICE TASK to SERVICE TASK(Task Id: INSPECT-PROBES)
PS: SERVICE TASK to AWAITING COMMAND(X:targetX, Y:targetY, Task Result: Passed)
SERVICE TASK
14
SERVICE TASK
Task Id:
CLEAN-PROBES
Task Id:
INSPECT-PROBES
Figure R1-20
Probe Inspection and Cleaning Scenario
SEMI E130-1104 © SEMI 2003, 2004 45
R1-1.7.2 Cleaning Probes – Detail — This scenario assumes the recipe is setup for cleaning probes using a cleaning
substrate. The cleaning substrate is stored in an internal storage site. The substrates currently loaded on the chuck
and pre-align stage(s) are returned to the source carrier so that the cleaning substrate can be loaded on the chuck.
When the cleaning substrate is removed from the chuck, the substrate(s) that occupied the chuck/pre-align stage(s)
are restored.
R1-1.7.2.1 Points of Interest
R1-1.7.2.1.1 The service task involves moving substrates between substrate locations. This is not reflected in the
Process State model. The host is not involved in the service task. Therefore, there is no need for the Process State
model to transition to the HANDLING MATERIAL state.
R1-1.7.2.2 Pre-Conditions
R1-1.7.2.2.1 Job Setup — See Section R1-1.1.2.1
R1-1.7.2.2.2 Job Start — See Section R1-1.1.2.2.
R1-1.7.2.2.3 State Models
Table R1-3 Object States for Probe Cleaning Scenario
Object Reference Description States Occupied
PS Process State model AWAITING COMMAND
CJ1 Control Job 1 EXECUTING
PJ01 Process Job 1 PROCESSING
PJ02 Process Job 2 POOLED
SubstPJ01.01 PJ1 Substrate 1 AT WORK; IN PROCESS
SubstPJ01.02 PJ1 Substrate 2 AT WORK; NEEDS PROCESSING
SubstPJ01.03 PJ1 Substrate 3 AT SOURCE; NEEDS PROCESSING
SubstPJ02.01 PJ2 Substrate 1 AT SOURCE; NEEDS PROCESSING
SubstPJ02.02 PJ2 Substrate 2 AT SOURCE; NEEDS PROCESSING
SubstPJ02.03 PJ2 Substrate 3 AT SOURCE; NEEDS PROCESSING
SEMI E130-1104 © SEMI 2003, 2004 46
Host Prober
CLEAN-PROBES()
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
CarrierA.02: UNOCCUPIED to OCCUPIED
SubstPJ01.02: AT WORK to AT SOURCE
Pre-align: OCCUPIED to UNOCCUPIED
CarrierA.01: UNOCCUPIED to OCCUPIED
SubstPJ01.01: AT WORK to AT SOURCE
Chuck: OCCUPIED to UNOCCUPIED
Chuck: UNOCCUPIED to OCCUPIED
1
2
3
5
6
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subs t PJ 01.0 2
1
2
3
56
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subs t PJ 01.0 1
Unload SubstPJ01.01 from the Chuck
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Unload SubstPJ01.02 from Pre-align
CLEAN-PROBES()
Chuck: OCCUPIED to UNOCCUPIED()
Unload Cleaning Substrate()
Align and Profile
SubstPJ01.01: AT WORK to AT WORK
Pre-align: OCCUPIED to UNOCCUPIED
Chuck: UNOCCUPIED to OCCUPIED
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PS: SERVICE TASK to AWAITING COMMAND(X:refX, Y:refY, Passed)
Move SubstPJ01.02 to Pre-align()
Pre-align()
SubstPJ01.01: AT SOURCE to AT WORK()
Pre-align: UNOCCUPIED to OCCUPIED()
CarrierA.01: OCCUPIED to UNOCCUPIED()
Move SubstPJ01.01 to Pre-align()
Pre-align()
Move PJ01.01 to Chuck()
Load Cleaning Substrate()
Figure R1-21
Clean Probes Detailed Scenario
R1-1.7.2.3 Post Conditions — The post conditions match the pre-conditions.