semi合集-English.pdf - 第357页
SEMI E51-0200 © SEMI 1995 , 2000 3 (See Figure 1). The POC locations are th e top, the bottom, or the back of the tool. The cu stomer shou ld identify a P OC location in the tool p urchase specif ication. Suppliers shoul…
SEMI E51-0200 © SEMI 1995, 2000 2
5.1.2 atm — atmospheric conditions, 14.7 psi at sea
level
5.1.3 CPVC — chlorinated polyvinyl chloride
5.1.4 Cu — copper
5.1.5 EP — electropolished
5.1.6 Galv. — galvanized
5.1.7 Hg — mercury
5.1.8 kPa — kiloPascals
5.1.9 µ — micron
5.1.10 NFPA — National Fire Protection Association
5.1.11 NPT — National Pipe Thread (U.S. Standard)
5.1.11.1 FNPT — Female National Pipe Thread
5.1.11.2 MNPT — Male National Pipe Thread
5.1.12 NW Flange — ISO NW flange
5.1.13 P. Flange — ANSI B16.5 pipe flange (for the
purpose of this guide)
5.1.14 PFA — Perfluoralkoy, resin
5.1.15 POC — point of connection (POC is the point
where the facility utility connects to the exterior of the
tool.)
5.1.16 POU — point of use
5.1.17 PP — Polypropylene
5.1.18 psia — pounds per square inch, absolute
5.1.19 psig — pounds per square inch, gauge
5.1.20 PVC — Polyvinyl Chloride
5.1.21 PVDF — Polyvinylidene Fluoride
5.1.22 RES. — resistivity
5.1.23 S.M. Flange — sheet metal flange
5.1.24 SS — stainless steel
5.1.25 Stub — pipe or tube stub
6 Typical Facilities Services and Termination
Matrix
6.1 This section of the guide identifies utilities,
performance and connections at typical semiconductor
facilities. This includes a Typical Facilities Services
and Termination Matrix Example—United States (see
Table 1). The guide identifies typical utilities and is not
intended to be limited to the listed utilities. A Site-
Specific Facilities Services and Termination Matrix
(see Table 2) is also provided to document differences
from Table 1 utilities.
6.2 The following is an explanation of the table
headings in the Typical Facilities Services and
Termination Matrix.
6.2.1 Utilities — This is a list of process or process-
related services typically found in semiconductor
facilities. The list is divided into water service, gas
service, drains, bulk chemical distribution, exhaust and
electrical services.
6.2.2 Supply Temperature — Temperature and ranges
are measured in °C (°F). Equipment or tool cooling
systems should be sized to accommodate these ranges.
6.2.3 Supply/Return Pressure — Pressure and ranges
are measured in kPa (psig). Where possible, equipment
should be designed to operate at lower pressure which
reduces energy and safety risks. Regulators should be
specified by the customer and provided with the tool by
the supplier.
6.2.4 Filtration — Filtration provides an indicator of
particle size expectation at POC to the tool. The
fabrication and quality of point of use (POU) filtration
should be specified by the customer and provided with
the tool by the supplier.
6.2.5 Specification — The specification column is a
condensed version of typical customer specifications.
The column should be used by customers to specify
service quality at POC to the tool. Specified quality
should not be compromised or lessened in any way
internally by the supplier’s tool. When the tool
purchase specification is prepared, expanded, and
detailed, quality requirements should be documented.
6.2.6 POC Material — Material that the facility
typically uses for connections to tools. Additional
material quality characteristics should be identified in
the tool purchase specification. Interior piping or
tubing should be specified by the customer and
provided with the tool by the supplier to meet or exceed
the facility POC material quality. (See SEMI E49.)
6.2.7 POC Fitting — Compatible connectors are
critical to ensure that a tool is “facility ready” once it
arrives at a customer site. It is recommended that
equipment be supplied with matching connections as
requested by customer.
6.2.8 Notes — Special conditions or exceptions.
7 General Considerations
7.1 In addition to typical utilities, other facility-related
issues should be addressed prior to tool installation.
7.1.1 Point of Connection Locations — Due to age of
construction or design, all semiconductor facilities are
not the same. To interface with equipment or tool,
three suggested POC locations have been determined.
SEMI E51-0200 © SEMI 1995, 20003
(See Figure 1). The POC locations are the top, the
bottom, or the back of the tool. The customer should
identify a POC location in the tool purchase
specification. Suppliers should design tools to allow
for internal routing to all locations, to avoid
customization for every installation.
Figure 1
Three Point of Connection Locations
7.1.2 Seismic — The customer should specify the
applicable earthquake zone for the installation site. The
supplier should provide appropriate seismic restraints
and installation instructions.
7.1.3 Vibration — The customer should specify that
the supplier should provide the vibration sensitivity of
the tool prior to purchase. (See SEMI E6.)
7.1.4 Control and Signal Circuits — The customer
should specify and the supplier should provide control
and signal circuits that when routed external to the tool
are compliant with Article 725, Class 1, Class 2, and
Class 3, Remote Control, Signaling and Power Limited
Control Circuits of the National Electrical Code.
(See NFPA 70.)
Class 1 — No power limitation, 600 volts max.
Class 2 — Derived from listed Class 2 power supply.
Class 3 — Derived from listed Class 3 power supply.
7.1.5 Installation Requirements Provided by Suppliers
— See SEMI E6.
7.1.6 High Purity Distribution Systems Recom-
mendations — See SEMI E49.
7.1.7 POC Labeling — To ensure accurate connection
of facility utilities to each tool POC, the customer
should specify and the supplier should provide labeling
for each POC. Service labeling should match
descriptions listed in the supplier provided installation
documentation. (See SEMI E6.)
7.1.7.1 If required, mechanical POC labels should
include:
• Service purpose,
• Maximum pressure or pressure range, and
• Flow rate (if appropriate).
POC Label Example: Process Purge, Nitrogen, 80 psig
Max.
7.1.7.2 If required, electrical power POC labels should
include:
• Service purpose,
• Voltage & phase, and
• Current (Full load ampere continuous).
POC Label Example: Cryo Pump No. 2, 208 V, 1-
phase, 28.2 FLA
7.1.7.3 If required, control and signaling POC labels
should include:
• Purpose, and
• Class of control (see Section 7.1.4).
POC Label Example: Cryo Pump No. 2 Control, Class
2
SEMI E51-0200 © SEMI 1995, 2000 4
Table 1 Typical Facilities Services and Termination Matrix Example — United States
Water Service Supply Temp. Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Non-Potable Water 4°C - amb
(40°F - amb)
S = 258–552 kPa
(40–80 psig)
N/A non-human
consumption
Cu/
PVC SCH 40/
PVC SCH 80
NPT
Ultra Pure Water 20–24°C
(68–76°F)
S = 310–379 kPa
(45–55 psig)
< 0.1 µ 18+ M ohms
RES
PVDF/PFA stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Deionized Water 20–24°C
(68–76°F)
S = 310–379 kPa
(45–55 psig)
0.1–0.2 µ 17.5 M ohms
RES
PVC SCH80/
PVDF/PFA
stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Hot Ultra Pure
Water
60–90°C
(140–194°F)
S = 310–379 kPa
(45–55 psig)
< 0.1 µ site-specific PVDF stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Fire Protection amb NFPA 13 N/A NFPA 13 N/A Carbon
Steel/SS
Process
Cooling Water
10–16°C
(50–60°F)
S = 310–552 kPa
(45–80 psig)
R = 0–207 kPa
(0–30 psig)
1.0–40 µ 50 K ohms RES PVC SCH80/
Cu/SS
NPT
Gas Service Supply Temp. Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Nitrogen, Ultra
Pure
amb 586–655 kPa
(85–95 psig)
0.01–0.1 µ - 316L EP SS face seal
Nitrogen, Process amb 552–621 kPa
(80–90 psig)
0.01–0.1 µ - 316L EP SS face seal
Nitrogen, Non-
Process
amb 552–655 kPa
(80–95 psig)
0.01–0.1 µ - Cu/SS face seal
Compressed Air amb 655–758 kPa
(95–110 psig)
0.1–5.0 µ –73 to –40°C
(–100 to –40°F)
dew point
Cu/SS compression
Oxygen amb 552–586 kPa
(80–85 psig)
0.01–0.1 µ - 316L EP SS face seal
Hydrogen, Bulk amb 414–552 kPa
(60–80 psig)
0.01–0.1 µ - 316L EP SS face seal See NOTE
2.
Argon amb 448–586 kPa
(65–85 psig)
0.01–0.1 µ - 316L EP SS face seal
Helium amb 448–586 kPa
(65–85 psig)
0.01–0.1 µ - 316L EP SS face seal