semi合集-English.pdf - 第5539页

SEMI P10-0705 © SEMI 1990, 2005 34 <xs:element name="Rotation" type="xs:string"/> </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="Mirror" type=&qu…

SEMI P10-0705 © SEMI 1990, 2005 33

<xs:element name="ResultFileName"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0"

maxOccurs="unbounded">

<xs:element name="SummaryFileName"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0"

maxOccurs="unbounded">

<xs:element name="LogFileName"

type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartDataFunction"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndDataFunction"/>

</xs:complexType>

<xs:complexType name="DataFractureType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Sizing" type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="SizingRule"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SizingBorderRule"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="FracturingScale" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DataScaleFactor" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternAddressSize"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DarkInternalWindow"

type="WindowType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ClearInternalWindow"

type="WindowType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ExternalWindow" type="WindowType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

SEMI P10-0705 © SEMI 1990, 2005 34

<xs:element name="Rotation" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Mirror" type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartDataFracture"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndDataFracture"/>

</xs:complexType>

<xs:complexType name="JobDataType">

<xs:sequence>

<xs:element name="JobFormat" type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartJobData"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndJobData"/>

</xs:complexType>

<xs:complexType name="StandardPatternType">

<xs:sequence>

<xs:element name="PatternFormat" type="xs:string"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartStandardPattern"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndStandardPattern"/>

</xs:complexType>

<xs:complexType name="MaskGroupType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MaskOptions"

type="MaskOptionsType"/>

</xs:sequence>

<xs:element name="PlacementTopCell" type="xs:string"/>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="MaskDefinition"

type="MaskDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CellDefinition"

type="CellDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="PatternGroup"

type="PatternGroupType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartMaskGroup"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndMaskGroup"/>

SEMI P10-0705 © SEMI 1990, 2005 35

</xs:complexType>

<xs:complexType name="MaskOptionsType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="BlanketPoNumber" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PoNumber" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SoNumber" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="OrderId" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ReleaseNumber" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="LineItemNumber" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="QuoteNumber" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Status" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DueDateTimeRequested"

type="xs:dateTime"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="DeliveryPriority"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="LayerPriority" type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="ElapsedTime"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Milestones" type="xs:boolean"/>

<xs:element name="ShipTo" type="ShipToType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PeriodicUpdates"

type="xs:integer"/>

<xs:element name="ShipTo" type="ShipToType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="EstimatedArrivals"

type="xs:boolean"/>

<xs:element name="ShipTo" type="ShipToType"/>

</xs:sequence>

<xs:sequence minOccurs="0">