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SEMI E140-0305 © SEMI 2005 7 Row #1 Parameter Units Example Value TA74 This Section Contains Data fo r Routine Operation of the Piece of Equipment TA76 Materials Used During Operation of the Piece of Eq uipment TA77 Unit…

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SEMI E140-0305 © SEMI 2005 6
Row
#1
Parameter Units Example Value
TA27 Fab-Specific Data
TA28 Value of Wafer Entering Piece of Equipment $/wafer 1,422
TA29 Value of Wafer Exiting Piece of Equipment $/wafer 2,244
TA30 Cost of Test Wafer $/wafer 500
TA31 Scheduled Production Hours per Year hrs/yr 8,400
TA32 Inflation Rate % 3
TA33 Burdened Equipment Engineering Salary $/yr 111,000
TA34 Burdened Process Engineering Salary $/yr 111,000
TA35 Burdened Supervision Salary $/yr 111,000
TA36 Burdened Operator Rate $/hr 25.00
TA37 Burdened Maintenance Technician Rate $/hr 35.00
TA38 OEM Field Service Rate Billed to Fab $/hr 175.00
TA39 OEM Field Process Rate Billed to Fab $/hr 45.00
TA40 Electricity Charge $/kWh 0.10
TA41 DI Water Charge $/m
3
1.00
TA42 Chilled Water Charge $/m
3
1.00
TA43 Purge Gas Charge $/m
3
1.00
TA44 Waste/Exhaust Charge $/m
3
1.00
TA45 This Section Contains Data Related to Equipment Installation
TA47 Initial Training Data (One-Time Training at Installation. On-Going Training is Accounted for under
Maintenance.)
TA48 Time Required for Training hrs/person 8.0
TA49 Hourly Rate Paid for Training $/hr 200.00
TA50 Number of Equipment Engineers Trained person 2.0
TA51 Number of Process Engineers Trained person 2.0
TA52 Number of Supervisors Trained person 2.0
TA53 Number of Operators Trained person 6.0
TA54 Number of Maintenance Technicians Trained person 6.0
TA55 Materials Consumed for Training $ 2,000
TA56 Installation Data
TA57 Fab Costs Incurred to Move/Rearrange A Piece of Equipment to
Accommodate Gas Box
$ 30,000
TA58 Equipment Engineering Time Required for System Installation hrs 200
TA59 Process Engineering Time Required for System Installation hrs 2.0
TA60 Supervision Time Required for System Installation hrs 2.0
TA61 Operator Time Required for System Installation hrs 2.0
TA62 Maintenance Technician Time Required for System Installation hrs 6.0
TA63 OEM Field Service Time Required for System Installation hrs 6.0
TA64 OEM Field Process Time Required for System Installation hrs 6.0
TA65 Qualification Data
TA66 Equipment Engineering Time Required for System Prove-In hrs 40.0
TA67 Process Engineering Time Required for System Prove-In hrs 40.0
TA68 Supervision Time Required for System Prove-In hrs 2.0
TA69 Operator Time Required for System Prove-In hrs 2.0
TA70 Maintenance Technician Time Required for System Prove-In hrs 2.0
TA71 OEM Field Service Time Required for System Prove-In hrs 6.0
TA72 OEM Field Process Time Required for System Prove-In hrs 6.0
TA73 Materials Consumed for System Prove-In $ 2,000
SEMI E140-0305 © SEMI 2005 7
Row
#1
Parameter Units Example Value
TA74 This Section Contains Data for Routine Operation of the Piece of Equipment
TA76 Materials Used During Operation of the Piece of Equipment
TA77 Unit Volume of Purge Gas Consumed m
3
/wafer 1.00×10
-4
TA78 Unit Volume of Waste Generated m
3
/wafer 2.00×10
-4
TA79 Test/Filler Wafers number/wafer 1.00×10
-6
TA80 Electricity Consumed on an Ongoing Basis kWh/wafer 0.067
TA81 DI Water Consumed on an Ongoing Basis $/m
3
0.00
TA82 Chilled Water Consumed on an Ongoing Basis $/m
3
0.00
TA83 Consumables (Parts that are Worn Out During Normal Operation and Require Replacement after Less than
One Year of Operation)
TA84 Consumable Purchase Price $ 1,200
TA85 Consumable Life yrs 1.0
TA86 Labor Required to Operate the Piece of Equipment
TA87 Operator hrs/wafer 0.0033
TA88 Labor Required to Support the Piece of Equipment
TA89 Equipment Engineering hrs/wafer 0.0
TA90 Process Engineering hrs/wafer 0.0
TA91 Supervision hrs/wafer 0.0
TA92 Maintenance Technician hrs/wafer 0.0
TA93 OEM Field Service hrs/wafer 0.0
TA94 OEM Field Process hrs/wafer 0.0
TA95 Support Services
TA96 Annual ESH Charge $/yr 500.00
TA97 Other Annual Charge $/yr 100.00
TA98 This Section Contains Data Related to Reliability, Availability, and Maintainability (RAM)
TA100 RAM Data
TA101 Scheduled Maintenance Downtime hrs/week 0.0
TA102 Mean Time Between Failure hrs 4,200
TA103 Average Response Time hrs 0.3
TA104 Mean Time to Repair hrs 7.0
TA105 Mean Time to Test hrs 0.3
TA106 Mean Time to Restart Production hrs 1.3
TA108 Standby Time (independent of process equipment standby time) hrs/week 0.0
TA109 Process Engineering Time hrs/week 2.0
TA110 Non-Personnel Maintenance Costs
TA111 Service Contract $/yr 0.00
TA112 Spares Inventory Cost to Fab $/yr 3,800
TA113 Repair Parts $/maintenance event 5.0
TA114 Electricity Consumed Solely during Maintenance kWh/maintenance event 1,000
TA115 On-Going Training
TA116 Frequency of Training events/yr 1.0
TA117 Time Required for Training hrs/person 8.0
TA118 Hourly Rate Paid for Training Per Student $/hr 200.00
TA119 Number of Equipment Engineers Trained person 2.0
TA120 Number of Process Engineers Trained person 2.0
TA121 Number of Supervisors Trained person 0.0
TA122 Number of Operators Trained person 6.0
TA123 Number of Maintenance Technicians Trained person 6.0
SEMI E140-0305 © SEMI 2005 8
Row
#1
Parameter Units Example Value
TA124 Materials Consumed for Training $ 2,000
TA125 Labor per Maintenance Event
TA126 Equipment Engineering Time Required per Maintenance Event hrs/maintenance event 8.0
TA127 Process Engineering Time Required per Maintenance Event hrs/maintenance event 1.0
TA128 Supervision Time Required per Maintenance Event hrs/maintenance event 1.0
TA129 Operator Time Required per Maintenance Event hrs/maintenance event 0.5
TA130 Maintenance Technician Time Required per Maintenance Event hrs/maintenance event 0.5
TA131 OEM Field Service Time hrs/maintenance event 8.0
TA132 OEM Field Process Time hrs/maintenance event 0.0
TA133 Equipment Requalification Costs
TA134 Equipment Engineering Time Required per Maintenance Event hrs/maintenance event 1.5
TA135 Process Engineering Time Required per Maintenance Event hrs/maintenance event 0.0
TA136 Supervision Time Required per Maintenance Event hrs/maintenance event 0.0
TA137 Operator Time Required per Maintenance Event hrs/maintenance event 0.0
TA138 Maintenance Technician Time Required per Maintenance Event hrs/maintenance event 1.5
TA139 OEM Field Service Time Required per Maintenance Event hrs/maintenance event 1.5
TA140 OEM Field Process Time Required per Maintenance Event hrs/maintenance event 0.0
TA141 Number of Test Wafers Consumed wafers/maintenance
event
1.0
TA142 Other Consumables Required to Requalify A Piece of Equipment $/maintenance event 100.00
TA143 This Section Contains Data Related to Yield
TA145 NOTE: Yield Costs are Only Those Caused by Gas Box Problems, Not Other Problems on the Piece of Equipment.
TA146 Composite Yield
TA147 Equipment Yield dimensionless 1.00
TA148 Probe Yield dimensionless 1.00
TA149 Inputs for Annualized Yield Costs
TA150 Number of Wafers Lost to Equipment Yield wafer 0.0
TA151 Number of Equivalent Wafers Lost to Defect Limited Yield wafer 0.0
TA152 Number of Equivalent Wafers Lost to Parametric Limited Yield wafer 0.0
#1
Row numbers begin with 8 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table
number (using a lettering scheme to simplify the formulae) followed by the row in that table.
Table 2 Annualized Fixed Costs for the Input Data Listed in Table 1.
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TB7 Depreciation , $
#2
14,843 14,843 14,843 14,843 14,843 14,843 14,843
=(TB9:TB16)
TB9
Gas Box
TB10 Straight Line, $ 14,143 14,143 14,143 14,143 14,143 14,143 14,143
TB11 Fixed Declining Balance, $ - - - - - - -
TB12 Double Declining Balance, $ - - - - - - -
TB13
Support Equipment
TB14 Straight Line, $ 700 700 700 700 700 700 700
TB15 Fixed Declining Balance, $ - - - - - - -
TB16 Double Declining Balance, $ - - - - - - -
TB17
System Qualification
7,816 0 0 0 0 0 0
=(TB18:TB25
)
TB18 Cost to Equipment Engineering, $ 2,135 =TA66 ×
TA33/52/40