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SEMI E21-94 © SEMI 1991, 2002 5 Figure 2 Wafer Transport Plane Elevation Figure 3 Inte rface P lane

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SEMI E21-94 © SEMI 1991, 2002 4
Figure 1
Module Interface with Wafer Transport and Placement Detail (Plan View)
SEMI E21-94 © SEMI 1991, 2002 5
Figure 2
Wafer Transport Plane Elevation
Figure 3
Interface Plane
SEMI E21-94 © SEMI 1991, 2002 6
Figure 4
Flange Specification