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SEMI D3-91 © SEMI 1991, 2003 2 L , L QA , QA EF , EF EV , EV are not speci fied, but result from tol erance effects. X X X X Y Y Y Y are specifi ed, n ominal dimensio ns Figure 1 Substrate Area Relationships NOTICE: SEMI…

SEMI D3-91 © SEMI 1991, 2003 1

SEMI D3-91 (Reapproved 0703)

QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY

SUBSTRATES

This specification was technically reapproved by the Global Flat Panel Display Committee and is the direct

responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the

Japanese Regional Standards Committee on April 28, 2003. Initially available at www.semi.org June 2003;

to be published July 2003. Originally published in 1991.

1 Purpose

1.1 This document defines various areas on the pattern

surface of a flat panel display substrate and describes

their relationship. It assumes the existence of

terminology and a banking convention described in

other SEMI flat panel display documents.

2 Scope

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI D9 — Terminology for FPD Substrates

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Significance

4.1 The patterns placed on a flat panel display substrate

are expected to occur only in a specified, central area,

and certain requirements are applied in that area to both

the substrate and pattern quality. The substrate

peripheral area(s) outside this zone have different

specified properties. Defining the terms to apply and

the geometric relationship in these various areas will

assist the suppliers and users of substrates and

processing/inspection equipment.

5 Summary

5.1 A substrate edge length is defined in two

dimensions, L

and L

, with nominal and tolerance

values for each.

5.2 A quality area is defined by two dimensions, QA

and QA

, with nominal and tolerance values for each.

5.3 A fixed edge exclusion area is defined for the

substrate edges to be placed against reference (also

called “banking”) pins.

5.4 Two variable edge exclusion areas result from

combining the above three dimension sets.

6 Procedure

6.1 Locate the properties in Sections 6.2–6.4 relative to

the substrate origin, using the nominal values assigned

by the substrate specification.

6.2 Let L

= the substrate edge length in the x-

direction, and

= the substrate edge length in the y-direction. (See

Figure 1.)

6.3 Let EF

= the fixed edge exclusion area along the

substrate’s lower edge, and

= the fixed edge exclusion area along the

substrate’s left edge.

6.4 Let QA

= the quality area’s edge length in the x

direction, and

= the quality area’s edge length in the y direction.

6.5 Then EV

and EV

, the variable edge exclusions,

are not specified. They result from the interaction of

substrate tolerance variations from nominal with the

fixed location origin.

SEMI D3-91 © SEMI 1991, 2003 2

L , L

QA , QA

EF , EF

EV , EV are not specified, but result from tolerance effects.

are specified, nominal dimensions

Figure 1

Substrate Area Relationships

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI D5-94 © SEMI 1992, 2003 1

SEMI D5-94 (Reapproved 0703)

STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES

This standard was technically reapproved by the Global Flat Panel Display Committee and is the direct

responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the

Japanese Regional Standards Committee on April 28, 2003. Initially available at www.semi.org June 2003;

to be published July 2003. Originally published in 1993; previously published in 1994.

1 Purpose

1.1 This standard covers the specification of nominal

edge length and thickness and related tolerances of a

flat panel display substrate.

2 Scope

2.1 These dimensions apply to substrates that are

principally used in fabricating AMLCD displays. These

dimensions may also be applicable to substrates for

other display types. The edge lengths specified range

from 300 × 300 mm to 500 × 500 mm. A single

thickness, 1.1 mm, applied to all substrates.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI D3 — Quality Area Specification for Flat Panel

Display Substrates

SEMI D4 — Method for Referencing Flat Panel

Display Substrates

SEMI D12 — Specification for Edge Condition of Flat

Panel Display (FPD) Substrates

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Dimensions

4.1 Edge Length

Table 1 Standard (Arithmetical Progression) Edge

Length (mm)

300 × 300 300 × 350 300 × 400 300 × 450 300 × 500

350 × 350 350 × 400 350 × 450 350 × 500

400 × 400 400 × 450 400 × 500

450 × 450 450 × 500

500 × 500

NOTE 1: For substrates larger than 500 mm × 500 mm, it is

recommended that the edge lengths be increased in increments of 50

mm.

Table 2 Standard Edge Length (mm)

320 mm × 300 mm

320 mm × 400 mm

360 mm × 465 mm

Table 3 Edge Length Tolerance

Nominal Tolerance

< 400 mm ± 0.2 mm

≥ 400 mm ± 0.3 mm

4.2 Thickness — 1.1 ± 0.1 mm

NOTE 1: Nominal values and tolerances for thickness < 1.1

mm, and > 1.1 mm are under discussion.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.