semi合集-English.pdf - 第1504页

SEMI E30.5-0302 © SEMI 2001, 2002 32 Where C and D are th e adjusted site 1 coordin ates in a rotation-adjusted coordinate system calculated, for example, usin g the fo rmul as: C = yA1 - ((xN1 sin Θ ) + ((yN1 cos Θ ) D …

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SEMI E30.5-0302 © SEMI 2001, 200231
Table R1-1 ALIGN-DEF-LIST
Align-Name Coordx Coordy Coordsys Align- Attribute(n)
Coarse1 -60000 -200 M20P
Fine1 -60020 -205 M20P
Coarse 2 60000 200 M20P
Fine2 59980 195 M20P
R1-4.3 ALIGN-DEF-LIST
L,4
1. <Coarse1>
2. <Fine1>
3. <Coarse 2>
4. <Fine2>
R1-4.4 Using this information, the equipment will go to the nominal M20 location for Coarse, then “find” where it
actually is. The offset between the nominal M20 location and the actual M20 location is then used to “find” Fine1.
The actual M20 location of Fine1 is saved. The process is then repeated for Coarse 2 and Fine2. The equipment can
now determine the M20 to M20P offset from the nominal and actual coordinates.
First, a summary of the data:
xN1=-60020 yN1=-205 Nominal x and y data for the first fine site
xA1=-59800 yA1=-150 Actual x and y data for the first fine site
xN2= 59980 yN2= 195 Nominal x and y data for the second fine site
xA2= 60060 yA2= 175 Actual x and y data for the second fine site
R1-4.5 The equipment first calculates THETA ( Θ ), using, for example, the formula:
+
−
=Θ
−
MNMA
MNMA
1
tan
1
where MA and MN are, respectively, the slopes of the lines connecting the nominal and actual fine sites, in M20
coordinates, calculated as follows:
MA
yA yA
xA xA
MN
yN yN
xN xN
=
−
−
=
−
−
21
21
21
21
R1-4.6 The equipment then calculates DELTAX and DELTAY, using, for example, the formulas:
DELTAX
CD
=
+
+
sin ( ) cos ( )
(sin ( )) (cos ( ))
ΘΘ
ΘΘ
22
DELTAY
CD
=
−
+
sin ( ) cos ( )
(sin ( )) (cos ( ))
ΘΘ
ΘΘ
22
SEMI E30.5-0302 © SEMI 2001, 2002 32
Where C and D are the adjusted site 1 coordinates in a rotation-adjusted coordinate system calculated, for example,
using the formulas:
C = yA1 - ((xN1 sin Θ) + ((yN1 cos Θ)
D = xA1 - ((xN1 cos Θ) - ((yN1 sin Θ)
R1-4.7 The equipment can also calculate a SCALEFACTOR term to indicate the relative difference between the
length of the vector connecting the nominal alignment sites and the length of the vector connecting the actual
alignment sites. This can be used, for example, to judge whether there is a problem with the alignment process,
since the difference between these two vectors should be small.
SCALEFACTOR
VA
V
N
=
where VA and VN are the length of the vectors connecting the actual and nominal alignment sites, calculated using
the formulas:
()()
VN yN yN xN xN=−+−
21
2
21
2
()()
VA yA yA xA xA=−+−
21
2
21
2
SEMI E30.5-0302 © SEMI 2001, 200233
Figure R1-1
M20/M20P Coordinate Systems Example
R1-5 Multi Measurement Station Metrology Equipment — MSEM implementation on metrology equipment with
multiple measurement stations should follow guidelines setablished for multi-processing station SEMS such as the
Apply and Develop Track Specific Equipment Model (SEMATECH ID #: 95113021AENG Title: SEMATECH
Apply/Develop Track Specific Equipment Model (ADTSEM), Version 0.8, January 4, 1996).
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