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SEMI E15-0698 E2 © SEMI 1990, 2003 4 Figure 2 Load Port Requirements, Plan View Figure 3 Load Port Requirements, Elevation View

SEMI E15-0698

Dimension Application Value, mm (in.) Notes

H range 900 (35.4) ± 10 (.4) See Note 2

H1 maximum 50 (2.0)

S  150 mm carriers

200 mm carriers

350 (13.8)

400 (15.7)

See Section 7.8.

T maximum 10 degrees

NOTE 1: Applies to tools with enclosed port; otherwise, clearance above the port must be unrestricted by the tool (see Section 5.8).

NOTE 2: Fully adjustable over ± 10 mm (~0.4 in.) range.

Table 2 Dimension Definitions

Dimension Description

C1 Minimum side clearance between one carrier envelope and another, or to vertical obstruction.

C2 Minimum rear clearance from carrier envelope to vertical obstruction.

C3 Minimum clearance above carrier envelope to horizontal obstruction on the tool.

D Maximum load depth to carrier centroid.

H Allowable load height to bottom of carrier envelope.

H1 Maximum height of horizontal obstruction above load height between load face plane and carrier envelope.

S Recommended minimum spacing between carrier centroids.

T Maximum cassette or wafer carrier tilt.

Figure 1

Envelope Concept

SEMI E15-0698

Figure 2

Load Port Requirements, Plan View

Figure 3

Load Port Requirements, Elevation View

SEMI E15-0698

Figure 4

Wafer and Cassette Orientation, Wafers Horizontal

Figure 5

Wafer and Cassette Orientation, Wafers Vertical

8 Related Documents

8.1 SEMI Documents

SEMI E47 — Specification for 150 mm/200 mm Pod Handles

SEMI E48 — Specification for SMIF Indexer Volume Requirement

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI T4 — Specification for 150 mm and 200 mm Pod Identification Dimensions

SEMI Compilation of Terms