semi合集-English.pdf - 第2287页

SEMI E81-0600 © 1999, 2 000 24 Compo nentManag er Sensor Mac hineRes ource Produ ction Machi ne Proces sReso urce 0..* Supp ortReso urce Dur able Material Consum able Transp ort M achine Storag eMachine any Own e dEnti t…

• Manufacturing operators and other factory

personnel are important resources to facilitate and

supervise material processing and handling,

preventive maintenance, and in some cases,

perform manufacturing steps such as moving

material or performing a visual inspection.

• Other factory resources include durables (reticles,

cassettes, pods, etc.) and consumables (gases,

utilities, etc.).

• The information model in Figure 8 shows the CIM

Framework Resource Composition Architecture.

The interfaces in the box labeled Resource Abstract

Interface Group define the generic resource

architecture. In general, resources can be composed

of other resources. In particular, at the factory and

area levels, Factory can be composed of Areas and

an Area can be composed of other Areas. Areas

group Support Resources, such as machines and

persons. This is not a strict composition so that

support resources can be in more than one Area

grouping. At the machine level, Machine

Resources are composed of other Machine

Resources, in general. In particular, Production

Machines are composed of Process Resources.

Production Machine

Transport Machine Storage Machine

Transport Resource Storage Resource

Enterprise

rea

Factory

Process Resource

Person

... ...

Figure 7

Factory Resource Hierarchy Model

Resource

MachineResource

Machine

ProductionMachine

ProcessResource

0..*0..*

MESFactory

SupportResource

Area

0..*0..*

groups

0..*

0..*0..*

Generic

Resource

Architecture

(part)

Figure 8

Resource Composition Architecture

ComponentManager

Sensor

MachineResource

Production Machine

ProcessResource

0..*

SupportResource

Durable

Material

Consumable

TransportMachineStorageMachine

any

OwnedEntity

is owned by

another

HistoryCollection

NamedEntity

0..1

is associated

with

Port

Machine

Person

0..*

assigned to

Capability

Resource

0..*

possible

0..*

assigned

0..*

Resource

Abstract

Interface Group

(part)

Area

MESFactory

Figure 9

Resource Type Architecture

7.3.3.3.2 Figure 9 shows the CIM Framework

Resource Type Architecture. Specializations of these

interfaces, such as Machine Resource and Durable,

provide component-specific details that extend the

generic resource architecture. The functions added at

each level of type specialization are discussed next.

7.3.3.3.3 Named Entity

7.3.3.3.3.1 The CIM Framework Named Entity

interface provides for names and histories to be

associated with any CIM Framework entity, including

resources.

7.3.3.3.4 Owned Entity

7.3.3.3.4.1 The Owned Entity interface provides for

resources to be organized into hierarchies.

7.3.3.3.5 Resource

7.3.3.3.5.1 The Resource interface provides for

• composition of subresources into complex

resources,

• representing resource capabilities (such as capacity

or process capability) (See Section 7.3.3),

• a simple state model (available, not available) and

services to startup and shutdown the resource, and

• modeling of resource levels as in Figure 7 and

Figure 8.

7.3.3.3.5.2 Each Resource has an attribute called

resourceLevel to support the factory resource

composition hierarchy of Figure 8. The CIM

Framework defines the following resource levels:

Factory (called MESFactory so as not to be confused

with the OMA’s object Factory type), Area, Machine

and Machine Resource. The Area level is optional, or it

may have multiple levels (such as an area called

LithoBay with sub-areas called Zone1 and Zone2).

Other levels can be defined. The resourceLevel concept,

combined with the Named Entity and Owned Entity,

also provide a name scoping facility.

7.3.3.3.6 Support Resource

7.3.3.3.6.1 The Support Resource interface provides

services for reserving resources (to support scheduling,

for example) and to track resource utilization and

effectiveness and associate maintenance tasks with

resources (see Figure 10 and Section 7.3.3.5). The

support resources include machine resources, material

load ports, sensors, durables and people.

7.3.3.3.7 Machine Resource

7.3.3.3.7.1 The Machine Resource interface provides

attributes for machine description, serial number, model

number, vendor, software version, etc. The interface

extends resource composition to provide machine

resources as composites of machine (sub)resources and

specialized process resources with associated process

capabilities. The Machine Resource interface also

extends the resource state model to include the states

and substates of SEMI E10 and SEMI E58. Specific

subtypes of Machine Resource and Machine are

possible. The CIM Framework defines the subtypes for

Production Machine and Process Resource. Additional

subtypes to support Transport Machine and Storage

Machine interfaces are also possible if there are

additional attributes or behaviors required that Machine

and Machine Resource interfaces do not already

provide.

7.3.3.3.8 Port, Sensor, Durable, Consumable, Person,

etc.

7.3.3.3.8.1 The other support resource subtypes

provide additional, resource-specific, attributes and

behavior. Note that durables are also subtypes of

Material so they can be moved and tracked as material.

Consumables are not currently considered as resources,

but a given implementation of the CIM Framework

could have consumables be support resources to track

their consumption and replenish them as regular

maintenance. Persons are considered support resources

to schedule them and associate them with machines and

other resources and to have associated “maintenance”

schedules for training and certification.

7.3.3.4 Resource Capabilities

7.3.3.4.1 Resources have associated capabilities, as

Figure 9 shows. Factory operations and scheduling use

capabilities to identify resources with the capability to

perform a specific task. A CIM Framework capability is

represented as a text string, providing flexibility to

define types of capabilities appropriate for a variety of

resources. For example, an MESFactory resource may

have capabilities defined in terms of its capacity and the

product families it can produce, and a Process Resource

may have capabilities that define its C

process

capability and its throughput.

7.3.3.4.2 The Capability interface maintains a list of

Resources which have that specific capability, and the

associated Resource interface maintains a list of its

overall possible capabilities and the subset of possible

capabilities that resource is assigned to perform.

7.3.3.4.3 The Capability interface is specialized for

Process Capabilities associated with Process Resources.

This provides an association to the Process Operation

Specifications a Process Resource can perform and the

Process Durables and the person Skills needed to

support the Process Capability. Other Resources can

specialize the Capability interface.

7.3.3.5 Resource Tracking and Maintenance

7.3.3.5.1 Support Resources have an associated

resource tracking and maintenance management

function, as Figure 10 shows. A Resource Tracking

Supervisor for a Resource monitors and records

resource usage and status and creates Maintenance Jobs

according to Maintenance Specifications. Factory

Operations, with the aid of a scheduler or dispatcher,

assigns Persons and other support resources defined in

the Maintenance Specification and initiates

Maintenance Job execution. The Resource Tracking

Supervisor then supervises Maintenance Job execution.

The Maintenance Job and Resource Tracking

Supervisor specialize the Job/Job Supervisor pair as

Section 7.3.4.6 describes. The Resource Tracking

Supervisor also records appropriate history, such as

maintenance logs and resource utilization and state, in

the Named History Collection for the Resource

(inherited from Named Entity). Resource type-specific

specializations of the resource tracking and

maintenance interfaces are possible.

7.3.4 Job Architecture

7.3.4.1 This section describes the job management and

control architecture of the CIM Framework. It defines a

hierarchical job supervision and control structure that

manages factory-level jobs (create product material to

fill enterprise product requests) and implements these

factory-level jobs by creating and managing machine-

level process jobs and transport jobs, coordinated with

maintenance jobs and other support jobs. The job

control architecture defines and manages relationships

between manufacturing resources (process equipment,

transport equipment, people), material groups (lots,

product groups, process groups, transport groups) and

specifications (product specifications, process flows

and recipes). This is the central functional architecture

which integrates the CIM Framework components into

a coherent manufacturing execution system

architecture. The concepts are derived from existing

standards and related standards efforts [ANSI],

[ALBUS], [OMA], [WfMC].