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SEMI E51-0200 © SEMI 1995 , 2000 8 Table 2 Site-Sp ecific Facilities Serv ices and Termination Mat rix Water Se rvice Supply Temp. Supply Pre ssure (Return Pressure where no ted) Filtration (absolute ) Specificati o n PO…
SEMI E51-0200 © SEMI 1995, 20007
0
100
200
300
400
500
140
110
120
50
70
80
90
1.0
10
µ
100 µ
0.001
0.01
0.1
1
µ
10
100
Duration in Seconds
Percent of Nominal Supply Voltage (RMS or Peak)
Eilt
Steady
State
0.5
0.2
0.02
0.003
200
µ
Supply Voltage
Range Envelope
NOTE 1: For Equipment Voltage Sag Immunity Specification see SEMI F47.
Figure 2
Typical Facilities Supply Voltage Range Envelope
SEMI E51-0200 © SEMI 1995, 2000 8
Table 2 Site-Specific Facilities Services and Termination Matrix
Water Service Supply
Temp.
Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Non-Potable Water
Ultra Pure Water
Deionized Water
Hot Ultra Pure Water
Fire Protection
Process Cooling Water
Gas Service Supply
Temp.
Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Nitrogen, Ultra Pure
Nitrogen, Process
Nitrogen, Non-Process
Compressed Air
Oxygen
Hydrogen, Bulk
Argon
Helium
Natural Gas
Process Vacuum
Specialty Gases
Drains Waste Temp. Pressure Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acid Waste
H
2
SO
4
Solvent Waste
Industrial
DI Reclaim
Fluoride Waste
HF Reclaim
Slurry
Bulk Chemical
Distribution
Supply Temp. Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acids, Bases, Oxidizers
Solvents
SEMI E51-0200 © SEMI 1995, 20009
Exhaust Temp. Supply Filtration
(absolute)
Specification POC Material POC Fitting Notes
Heat/General
Solvent
Vacuum Pump
Acid
Electrical Services
Applicable Code
Supply Voltage, Nominal
Supply Voltage Range
EMI Noise
ESD Ambient
Ground Currents
Computer Interfaces
Electrical Interface
UPS
Site-Specific Notes:
Freight Elevator:
Height/Width/Depth
Load Rating
Bldg./Fab Restrictions:
Cleanroom Parameters
Noise Level
Ceiling Heights
Max. Clearances in Support Areas
Other:
8 Related Documents
8.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications
Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services
Single-Session Mode (HSMS-SS)
SEMI E37.2 — High-Speed SECS Message Services
General Session (HSMS-GS)
SEMI E76 — Guide for 300 mm Process Equipment
Points of Connection to Facility Services
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — Safety Guideline for Ventilation