semi合集-English.pdf - 第1180页

SEMI E5-1104 © SEMI 1982, 2004 122 Stream,Function Name (Mnemonic) Direction S6,F9 Formatted Va riable Send (FVS) M,H<-E,[ reply] Description The same function as S6,F3 except that th e DVNAMEs are supplied from a pre…

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SEMI E5-1104 © SEMI 1982, 2004 121
Stream,Function Name (Mnemonic) Direction
S6,F6 Multi-block Grant (MBG) S,H->E
Description
Grant permission to send
Structure
<GRANT6>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F7 Data Transfer Request (DDR) S,H->E,reply
Description
The host may initiate a data transfer of specified data stored in the equipment with this function.
Structure
<DATAID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F8 Data Transfer Data (DDD) M,H<-E
Description
Equipment sends data to the host.
Structure
Similar to the structure of S6,F3
Exception
A zero-length item returned means the requested data cannot be sent.
SEMI E5-1104 © SEMI 1982, 2004 122
Stream,Function Name (Mnemonic) Direction
S6,F9 Formatted Variable Send (FVS) M,H<-E,[reply]
Description
The same function as S6,F3 except that the DVNAMEs are supplied from a predefined form that is known to the host. Thus, the
data are more compact. If S6,F9 is multi-block, it must be preceded by the S6,F5/S6,F6 Inquire/Grant transaction.
Structure
L,4
1. <PFCD>
2. <DATAID>
3. <CEID>
4. L,n
1. L,2
1. <DSID1
1
>
2. L,m
1. <DVVAL
1
>
.
.
m. <DVVAL
m
>
2. L,2
.
.
n. L,2
1. <DSID
n
>
2. etc.
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F10 Formatted Variable Acknowledge (FVA) S,H->E
Description
Acknowledge or error
Structure
<ACKC6>
Exception
SEMI E5-1104 © SEMI 1982, 2004 123
Stream,Function Name (Mnemonic) Direction
S6,F11 Event Report Send (ERS) M,H<-E, reply
Description
The purpose of this message is for the equipment to send a defined, linked, and enabled group of reports to the host upon the
occurrence of an event (CEID).
If S6,F11 is Multi-block, it must be preceded by the S6,F5/S6,F6 Inquire/Grant transaction.
Structure
L,3
1. <DATAID>
2. <CEID>
3. L,a
1. L,2
1. <RPTID
1
>
2. L,b
1. <V
1
>
.
.
b. <V
b
>
.
.
a. L,2 report a
1. <RPTIDa>
2. L,c #Vs this report
1. <V
1
>
.
.
c. <V
c
>
Exception
If there are no reports linked to the event a ‘null’ report is assumed. A zero-length list for # of reports means there are no reports
linked to the given CEID.
Stream,Function Name (Mnemonic) Direction
S6,F12 Event Report Acknowledge (ERA) S,H->E
Description
Acknowledge or error
Structure
<ACKC6>
Exception
None