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SEMI M31-0705 © SEMI 1998, 2005 10 Value Specified Symbol Used Figure Number Manual Door Auto-door Datum Measured from Boundary or Feature Measured to z 8 3, 4, 7 44 mm (1.73 in) horizontal datum plan e bottom nominal wa…

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SEMI M31-0705 © SEMI 1998, 2005 9
5.9.3 Wafer Pick-Up Volume — If a wafer is placed in the wafer set-down volume and is then pushed toward the
rear of the FOSB, then the entire bottom of the wafer must be contained in the wafer pick-up volume. However, if
the wafer is not pushed toward the rear of the FOSB, then the wafer may only be somewhere within the wafer
extraction volume. The wafer pick-up volume is defined by a cylindrical section with radius r1 and a main axis at
the nominal wafer centerline. Its top and bottom are the upper and lower tolerance of z10 around the nominal wafer
seating plane.
5.10 Pitch and Capacity — Table 1 shows the different options with regard to the wafer pitch (spacing) and the
FOSB capacity. Again, no tolerance is given on the wafer pitch (z12), for reasons given in ¶5.9.
Table 1 Pitch and Capacity Options
Option Number
FOSB Capacity (c)
Wafer Pitch (z12)
Wafer Clearance (z11)
1 13 wafers 10 mm (0.39 in.) 6 mm (0.24 in.) minimum
2 25 wafers 10 mm (0.39 in.) 6 mm (0.24 in.) minimum
Table 2 Internal FOSB Dimensions (Figures 2
7)
Value Specified
Symbol
Used
Figure
Number
Manual Door Auto-door
Datum Measured from Boundary or Feature Measured to
r1 2 151 mm (5.94 in.) maximum nominal wafer centerline outer edge of wafer pick-up volume
r2 2, 5 152 = 1 – 0 mm
(5.99 + 0.03 – 0 in.)
y1 in front of nominal wafer
centerline
encroachment of FOSB side domains on
wafer set-down volume
r3 2, 5 r2 + 1 mm (0.04 in.) minimum y1 in front of nominal wafer
centerline
encroachment of FOSB side domains on
wafer extraction volume
r4 2 170 mm (6.69 in.) minimum nominal wafer centerline encroachment of FOSB on end effector
exclusion zone between front and rear
FOSB side domains
x1 2, 4 50 mm (1.97 in.) minimum bilateral datum plane inside of rear FOSB side domains
x2 2, 4 75 mm (2.95 in.) maximum bilateral datum plane outside of rear FOSB side domains
x3 2, 4, 5, 7 125 mm (4.92 in.) minimum bilateral datum plane inside of front FOSB side domains
x51 2 140 mm (5.51 in.) minimum bilateral datum plane interior of FOSB sides between y11 and
y49
x52 2 170 mm (6.69 in.) minimum bilateral datum plane interior of FOSB sides between y49 and
y52
y1 2 3 mm (0.12 in.) maximum facial datum plane origin of r2 and r3 on bilateral datum
plane
y5 2, 3 120 mm (4.72 in.) minimum facial datum plane front of rear FOSB side domains
y11 2 85 mm (3.35 in.) maximum facial datum plane interior of FOSB sides between x3 and
x51
y20
#1
None 158 mm (6.22 in.) facial datum plane maximum protrusion of wafers toward
the front of the FOSB
y49 2 134 mm (5.28 in.) maximum facial datum plane interior of FOSB sides between x51 and
x52
y51 2 50 mm (1.97
in.) minimum
140 mm
(5.51 in.)
minimum
facial datum plane rear of door
z6 3, 4, 7 32 mm (1.26 in.) maximum horizontal datum plane top of FOSB bottom domain
SEMI M31-0705 © SEMI 1998, 2005 10
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-door
Datum Measured from Boundary or Feature Measured to
z8 3, 4, 7 44 mm (1.73 in) horizontal datum plane bottom nominal wafer seating plane
z10 5, 6 0 ± 0.5 mm
(0.00 ± 0.02 in.)
each nominal wafer seating
plane
entire bottom of the wafer
z11 5, 6 See Table 1. each nominal wafer seating
plane
encroachment of FOSB side domains on
clearance above the wafer
z12 3, 4, 5, 6, 7 See Table 1. each nominal wafer seating
plane
adjacent nominal wafer seating planes
z15 3, 4, 5 13 mm (0.51 in.) minimum top nominal wafer seating
plane
bottom of FOSB top domain
z23 5 3 mm (0.12 in.) maximum each nominal wafer seating
plane
bottom of wafer extraction volume
z29 6 0.7 mm (0.028 in.) maximum each nominal wafer seating
plane
encroachment of FOSB side domains
under wafer extraction volume
#1
These dimensions are for optional features.
5.11 External Dimensions — Figures 8 through 12 respectively show the side view, rear view, top view, robotic
flange, and bottom view for the front-opening FOSB. Table 3 defines all of the dimensions. If an identification tag is
used, it must be located at the bottom rear centered on the bilateral datum plane and must be contained within the
maximum outer dimensions of the FOSB.
5.12 Human Handles — All handles for use by humans must either be contained within the maximum outer
dimensions of the FOSB, be detached when not in use, or be retractable into the maximum outer dimensions when
not in use. Although such handles may extend past x53, they must still be contained within x50, y40, and r67.
Handles for use by humans (if present) must follow SEMI S8, and they must require the use of both hands (each
using a full wrap-around grip, given the minimum clearance requirement in SEMI E15.1). Automation handling
features shall not be considered dual purpose unless they are designed to meet SEMI S8 guidelines.
5.13 Automation Handling — On the top of the FOSB, there is an optional robotic handling flange for manipulating
the FOSB as illustrated in Figure 12 On the bottom of the FOSB, there are optional rails for use with roller
conveyors or forklifts. Although they are only required to extend y58 to the left and right, it is recommended that
they be as long as possible. Beyond y58, only the lower bound on z43 apply. These optional conveyor rails (defined
by x56, x57, and z43) are located on the left and right bottom edges of the front-opening shipping box. The
conveyor rails also have vertical cylindrical pin holes for fork lift centering (defined by d65).
SEMI M31-0705 © SEMI 1998, 2005 11
facial
datum plane
horizontal datum of
box nest or load
port plane
y53 190
y52 165 ± 0.5 mm
(6.52 ± 0.02 in.)
y50 130
(numbers in parentheses are for 25-wafer FOSB, if different)
y46
= 71 ± 1
y44
53
z49
8
z48
15
z47
= 210
(330)
± 1
y40
116
human
handle
(optional)
front side
of the
FOSB
where
wafers
are
accessed
y
58 75
z
41 0
z
2 2
(
at sensor
p
ads
)
d
65 =10±0.5
z
65 7
z43 = 2 ± 1
Figure 8
Side View of FOSB
bilateral datum plane
(numbers in parentheses are for 25-wafer FOSB, if different)
horizontal datum plane of
box nest or load port
x
53

195 (elsewhere)
x
46
= 71 ± 1
x
44
53
z
49
8
z
48
15
z
47
= 210
(330)
± 1
human
handle
(optional)
z
41

0
z
2

2
(at sensor pads)
z
43 = 2 ± 1
bottom rail
x
57

180
d65
= 10± 0.5
z
65 7
x
65 = 187.5
x
56 = 194.75(at bottom rail)
x
50

215 (at human handle)
Figure 9
Rear View of FOSB